SCHEMBL409933

SCHEMBL409933

[Ce+3].[Ce+3].[Hf+4].[Hf+4].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2]

nearest known ligand 0.00

⚠ Novel chemotype — no close known analogue (best Tanimoto < 0.3). Unexplored chemical space relative to ChEMBL.

Similar compounds — the chemically nearest patent molecules

Nearest neighbours by Morgan-fingerprint cosine across the patent-compound collection, with each neighbour's top predicted target and the predicted targets it shares with this molecule.

Compoundsimilaritytop predictedshared targets
SCHEMBL29564178 1.00
SCHEMBL31379755 0.87
SCHEMBL22028739 0.87
SCHEMBL30138594 0.87
SCHEMBL30061791 0.87
SCHEMBL10578288 0.82
SCHEMBL7544479 0.82
SCHEMBL6931147 0.82
SCHEMBL3455590 0.82
SCHEMBL7548349 0.82

Similarity is cosine over the 2,048-bit Morgan fingerprint (≈ Tanimoto). Identical fingerprints score 1.00.

Patent provenance — the patents this molecule appears in, and who filed them

Claimed or disclosed in 124 patents. claimed = in the patent's claims; disclosed = body only.

PatentTitleAssigneePublishedPriorityFilingCountryStatus
US-12484232-B2 Ferroelectric memory device and method of fabricating the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-11-25 US claimed
US-20250351466-A1 OXIDE SEMICONDUCTOR FERROELECTRIC FIELD EFFECT TRANSISTOR TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2025-11-13 US claimed
US-20250241015-A1 OXIDE SEMICONDUCTOR FERROELECTRIC FIELD EFFECT TRANSISTOR TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-07-24 US claimed
US-12302590-B2 Ferroelectric MFM capacitor array and methods of making the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED (TW) 2025-05-13 US claimed
CN-119967855-A Device structure, semiconductor device and forming method thereof 台湾积体电路制造股份有限公司 2025-05-09 CN claimed
US-12154938-B2 Ferroelectric MFM capacitor array and methods of making the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED (TW) 2024-11-26 US claimed
US-12102019-B2 Data storage structure for improving memory cell reliability TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-09-24 US claimed
US-12051750-B2 Memory array gate structures TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2024-07-30 US claimed
US-20230387186-A1 FERROELECTRIC MFM CAPACITOR ARRAY AND METHODS OF MAKING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED (TW) 2023-11-30 US claimed
US-20230345847-A1 DATA STORAGE STRUCTURE FOR IMPROVING MEMORY CELL RELIABILITY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-10-26 US claimed
US-20230276633-A1 FERROELECTRIC MEMORY DEVICE AND METHOD OF FABRICATING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2023-08-31 US claimed
CN-116347894-A Semiconductor device and method for manufacturing the same 台湾积体电路制造股份有限公司 2023-06-27 CN claimed
US-20220416085-A1 Memory Array Gate Structures TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2022-12-29 US claimed
US-20210376055-A1 FERROELECTRIC MFM CAPACITOR ARRAY AND METHODS OF MAKING THE SAME TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2021-12-02 US claimed
CN-113299830-A Ferroelectric metal-ferroelectric metal capacitor formed on semiconductor die and method 台湾积体电路制造股份有限公司 2021-08-24 CN claimed
CN-102472721-B Ion-sensitive sensor having multilayer construction in the sensitive region CONDUCTA ENDRESS & HAUSER 2015-01-28 CN claimed
US-8461587-B2 Ion-sensitive sensor with multilayer construction in the sensitive region Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG (DE) 2013-06-11 US claimed
CN-102472721-A Ion sensitive sensor with multilayer structure in sensor area CONDUCTA ENDRESS & HAUSER 2012-05-23 CN claimed
US-20120018722-A1 ION-SENSITIVE SENSOR WITH MULTILAYER CONSTRUCTION IN THE SENSITIVE REGION ENDRESS + HAUSER CONDUCTA GESELLSCHAFT FUR MESS- UND REGELTECHNIK MBH + CO. KG (DE) 2012-01-26 US claimed
US-12575109-B2 Antiferroelectric non-volatile memory TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2026-03-10 US disclosed
US-20250364482-A1 Memory Device and Method of Forming The Same TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2025-11-27 US disclosed
US-20250365967-A1 FERROELECTRIC-BASED MEMORY DEVICE AND METHOD OF FORMING THE SAME TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2025-11-27 US disclosed
US-12484232-B2 Ferroelectric memory device and method of fabricating the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-11-25 US disclosed
US-20250351466-A1 OXIDE SEMICONDUCTOR FERROELECTRIC FIELD EFFECT TRANSISTOR TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2025-11-13 US disclosed
US-20250344397-A1 FERROELECTRIC MEMORY DEVICE AND METHOD OF FABRICATING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-11-06 US disclosed
US-20250331196-A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2025-10-23 US disclosed
US-20250318144-A1 BOTTOM-ELECTRODE INTERFACE STRUCTURE FOR MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-10-09 US disclosed
US-20250318143-A1 Ferroelectric Memory Device and Method of Manufacturing the Same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-10-09 US disclosed
US-12382640-B2 Memory device and method for fabricating the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-08-05 US disclosed
US-20250248046-A1 SEMICONDUCTOR DEVICES TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-07-31 US disclosed
US-20250241015-A1 OXIDE SEMICONDUCTOR FERROELECTRIC FIELD EFFECT TRANSISTOR TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-07-24 US disclosed
US-12369329-B2 Bottom-electrode interface structure for memory TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-07-22 US disclosed
US-20250212417-A1 SEMICONDUCTOR STRUCTURE INCLUDING CRACK DETECTOR AND MANUFACTURING METHOD THEREOF TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (TW) 2025-06-26 US disclosed
US-20250159888-A1 NOVEL 3D RAM SL/BL CONTACT MODULATION TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-05-15 US disclosed
US-12302590-B2 Ferroelectric MFM capacitor array and methods of making the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED (TW) 2025-05-13 US disclosed
CN-119967855-A Device structure, semiconductor device and forming method thereof 台湾积体电路制造股份有限公司 2025-05-09 CN disclosed
US-12289893-B2 Semiconductor devices including FTJ structure TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-04-29 US disclosed
CN-222776514-U Three-dimensional memory array and field effect transistor device 台湾积体电路制造股份有限公司 2025-04-18 CN disclosed
CN-112436087-B Memory cell, memory device, and method for forming memory device 台湾积体电路制造股份有限公司 2025-03-14 CN disclosed
US-20250089264-A1 3D FERROELECTRIC MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-03-13 US disclosed
US-12232322-B2 3D RAM SL/BL contact modulation TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-02-18 US disclosed
US-12200943-B2 Memory device structure and manufacturing method thereof TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-01-14 US disclosed
US-12193240-B2 3D ferroelectric memory TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2025-01-07 US disclosed
CN-113380820-B Memory cell, semiconductor device and forming method thereof 台湾积体电路制造股份有限公司 2024-12-24 CN disclosed
US-20240397725-A1 ANTI-FERROELECTRIC MEMORY DEVICE TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD (TW) 2024-11-28 US disclosed
US-12154938-B2 Ferroelectric MFM capacitor array and methods of making the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED (TW) 2024-11-26 US disclosed
US-20240389349-A1 MEMORY DEVICE STRUCTURE AND MANUFACTURING METHOD THEREOF TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-11-21 US disclosed
US-20240381664-A1 Ferroelectric Memory Device and Method of Manufacturing the Same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-11-14 US disclosed
US-20240381653-A1 MEMORY DEVICE AND METHOD OF FORMING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-11-14 US disclosed
US-12137572-B2 Ferroelectric memory device and method of manufacturing the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-11-05 US disclosed
US-12133390-B2 Memory array TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-10-29 US disclosed
US-12102019-B2 Data storage structure for improving memory cell reliability TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-09-24 US disclosed
US-20240315033-A1 3D MEMORY WITH GRAPHITE CONDUCTIVE STRIPS TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-09-19 US disclosed
CN-111312714-B Microelectronic devices and electronic systems including etch stop materials and related methods 美光科技公司 2024-08-20 CN disclosed
CN-113488484-B Three-dimensional memory device and method of manufacturing the same 台湾积体电路制造股份有限公司 2024-08-13 CN disclosed
US-12051750-B2 Memory array gate structures TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2024-07-30 US disclosed
US-12041776-B2 3D memory with graphite conductive strips TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-07-16 US disclosed
CN-220935482-U Nonvolatile memory cell structure and antiferroelectric memory array structure 台湾积体电路制造股份有限公司 2024-05-10 CN disclosed
US-20240107776-A1 ANTIFERROELECTRIC NON-VOLATILE MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-03-28 US disclosed
US-20240074204-A1 THREE-DIMENSIONAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-02-29 US disclosed
US-20240064984-A1 NOVEL 3D RAM SL/BL CONTACT MODULATION TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2024-02-22 US disclosed
US-20240006304-A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2024-01-04 US disclosed
US-11849587-B2 Three-dimensional memory device and manufacturing method thereof TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-12-19 US disclosed
US-11839080-B2 3D memory with graphite conductive strips TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-12-05 US disclosed
US-20230389324-A1 FERROELECTRIC-BASED MEMORY DEVICE AND METHOD OF FORMING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-11-30 US disclosed
US-20230387186-A1 FERROELECTRIC MFM CAPACITOR ARRAY AND METHODS OF MAKING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED (TW) 2023-11-30 US disclosed
US-20230371257-A1 3D MEMORY WITH GRAPHITE CONDUCTIVE STRIPS TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-11-16 US disclosed
US-20230371273-A1 SEMICONDUCTOR DEVICES TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-11-16 US disclosed
US-20230363178-A1 BOTTOM-ELECTRODE INTERFACE STRUCTURE FOR MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-11-09 US disclosed
US-11805652-B2 3D RAM SL/BL contact modulation TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-10-31 US disclosed
US-20230345847-A1 DATA STORAGE STRUCTURE FOR IMPROVING MEMORY CELL RELIABILITY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-10-26 US disclosed
US-11792996-B2 Bottom-electrode interface structure for memory TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-10-17 US disclosed
US-20230299042-A1 Memory Device and Method of Forming The Same TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2023-09-21 US disclosed
US-20230292526-A1 Memory Device Structure and Manufacturing Method Thereof TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD (TW) 2023-09-14 US disclosed
US-20230276633-A1 FERROELECTRIC MEMORY DEVICE AND METHOD OF FABRICATING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2023-08-31 US disclosed
CN-116583113-A Integrated circuit device and method of forming the same 台湾积体电路制造股份有限公司 2023-08-11 CN disclosed
US-11716913-B2 Data storage structure for improving memory cell reliability TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-08-01 US disclosed
US-11706928-B2 Memory device and method for fabricating the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-07-18 US disclosed
US-11695073-B2 Memory array gate structures TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2023-07-04 US disclosed
US-20230209835-A1 MEMORY ARRAY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-06-29 US disclosed
CN-116347894-A Semiconductor device and method for manufacturing the same 台湾积体电路制造股份有限公司 2023-06-27 CN disclosed
US-11672126-B2 Three-dimensional memory device and manufacturing method thereof TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-06-06 US disclosed
US-11637126-B2 Memory device and method of forming the same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-04-25 US disclosed
US-20230122757-A1 NOVEL 3D RAM SL/BL CONTACT MODULATION TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-04-20 US disclosed
US-11574929-B2 3D ferroelectric memory TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-02-07 US disclosed
US-11569264-B2 3D RAM SL/BL contact modulation TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2023-01-31 US disclosed
US-20220415923-A1 THREE-DIMENSIONAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2022-12-29 US disclosed
US-20220416085-A1 Memory Array Gate Structures TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2022-12-29 US disclosed
US-11527548-B2 Semiconductor devices and electronic systems including an etch stop material, and related methods MICRON TECHNOLOGY, INC. (US) 2022-12-13 US disclosed
US-20220392919-A1 3D FERROELECTRIC MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2022-12-08 US disclosed
US-20220328508-A1 BOTTOM-ELECTRODE INTERFACE STRUCTURE FOR MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2022-10-13 US disclosed
US-20220278115-A1 Ferroelectric Memory Device and Method of Manufacturing the Same TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2022-09-01 US disclosed
CN-114883362-A Integrated circuit chip and forming method thereof 台湾积体电路制造股份有限公司 2022-08-09 CN disclosed
US-20220238802-A1 DATA STORAGE STRUCTURE FOR IMPROVING MEMORY CELL RELIABILITY TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2022-07-28 US disclosed
US-20220231036-A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2022-07-21 US disclosed
US-20220139935-A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2022-05-05 US disclosed
US-11309491-B2 Data storage structure for improving memory cell reliability TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2022-04-19 US disclosed
CN-114078860-A Integrated circuit device and method of forming the same 台湾积体电路制造股份有限公司 2022-02-22 CN disclosed
US-20210399014-A1 THREE-DIMENSIONAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2021-12-23 US disclosed
US-20210375937-A1 MEMORY DEVICE AND METHOD OF FORMING THE SAME TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TW) 2021-12-02 US disclosed
US-20210375932-A1 3D FERROELECTRIC MEMORY TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2021-12-02 US disclosed
US-20210376153-A1 Memory Array Gate Structures TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2021-12-02 US disclosed
US-20210375919-A1 NOVEL 3D RAM SL/BL CONTACT MODULATION TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2021-12-02 US disclosed
US-20210376055-A1 FERROELECTRIC MFM CAPACITOR ARRAY AND METHODS OF MAKING THE SAME TAIWAN SEMICONDUCTOR MFG CO LTD (TW) 2021-12-02 US disclosed
US-20210375917-A1 3D MEMORY WITH GRAPHITE CONDUCTIVE STRIPS TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2021-12-02 US disclosed
CN-113517300-A Memory device and method of forming the same 台湾积体电路制造股份有限公司 2021-10-19 CN disclosed
CN-113488484-A Three-dimensional memory device and method of manufacturing the same 台湾积体电路制造股份有限公司 2021-10-08 CN disclosed
CN-113380820-A Memory cell, semiconductor device and forming method thereof 台湾积体电路制造股份有限公司 2021-09-10 CN disclosed
CN-113299830-A Ferroelectric metal-ferroelectric metal capacitor formed on semiconductor die and method 台湾积体电路制造股份有限公司 2021-08-24 CN disclosed
CN-113299655-A Memory device and forming method thereof 台湾积体电路制造股份有限公司 2021-08-24 CN disclosed
US-20210066587-A1 DATA STORAGE STRUCTURE FOR IMPROVING MEMORY CELL RELIABILITY TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. (TW) 2021-03-04 US disclosed
CN-112436087-A Memory cell, memory device and method for forming memory device 台湾积体电路制造股份有限公司 2021-03-02 CN disclosed
US-20200185406-A1 SEMICONDUCTOR DEVICES AND ELECTRONIC SYSTEMS INCLUDING AN ETCH STOP MATERIAL, AND RELATED METHODS MICRON TECHNOLOGY, INC. 2020-06-11 US disclosed
CN-102472721-B Ion-sensitive sensor having multilayer construction in the sensitive region CONDUCTA ENDRESS & HAUSER 2015-01-28 CN disclosed
US-8461587-B2 Ion-sensitive sensor with multilayer construction in the sensitive region Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG (DE) 2013-06-11 US disclosed
EP-2191034-B1 METHODS OF PREPARING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TRIAMINO ZIRCONIUM PRECURSORS SIGMA ALDRICH CO LLC (US) 2013-03-13 EP disclosed
CN-101815807-B Method for preparing thin films by atomic layer deposition using monocyclopentadienyl trialkoxy hafnium and zirconium precursors SIGMA ALDRICH CO 2012-06-13 CN disclosed
CN-102472721-A Ion sensitive sensor with multilayer structure in sensor area CONDUCTA ENDRESS & HAUSER 2012-05-23 CN disclosed
US-20120018722-A1 ION-SENSITIVE SENSOR WITH MULTILAYER CONSTRUCTION IN THE SENSITIVE REGION ENDRESS + HAUSER CONDUCTA GESELLSCHAFT FUR MESS- UND REGELTECHNIK MBH + CO. KG (DE) 2012-01-26 US disclosed
US-8039062-B2 Methods of atomic layer deposition using hafnium and zirconium-based precursors SIGMA-ALDRICH CO. LLC (US) 2011-10-18 US disclosed
CN-101815807-A Method for preparing thin films by atomic layer deposition using monocyclopentadienyl trialkoxy hafnium and zirconium precursors SIGMA ALDRICH CO 2010-08-25 CN disclosed
EP-2191034-A1 METHODS OF PREPARING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TRIALKOXY HAFNIUM AND ZIRCONIUM PRECURSORS Sigma-Aldrich Co. (US) 2010-06-02 EP disclosed
US-20090081385-A1 METHODS OF ATOMIC LAYER DEPOSITION USING HAFNIUM AND ZIRCONIUM-BASED PRECURSORS IROBOT CORPORATION 2009-03-26 US disclosed
WO-2009036046-A1 METHODS OF PREPARING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TRIALKOXY HAFNIUM AND ZIRCONIUM PRECURSORS SIGMA-ALDRICH CO. (US) 2009-03-19 WO disclosed
WO-2009036046-A1 METHODS OF PREPARING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TRIALKOXY HAFNIUM AND ZIRCONIUM PRECURSORS SIGMA-ALDRICH CO. (US) 2009-03-19 WO disclosed