SCHEMBL1901702

SCHEMBL1901702

[Ge+4].[N-3].[N-3].[N-3].[Ta+5]

nearest known ligand 0.00

⚠ Novel chemotype — no close known analogue (best Tanimoto < 0.3). Unexplored chemical space relative to ChEMBL.

Similar compounds — the chemically nearest patent molecules

Nearest neighbours by Morgan-fingerprint cosine across the patent-compound collection, with each neighbour's top predicted target and the predicted targets it shares with this molecule.

Compoundsimilaritytop predictedshared targets
SCHEMBL4928849 0.87
SCHEMBL33275 0.82
SCHEMBL2069057 0.82
SCHEMBL271946 0.82
SCHEMBL3467470 0.82
SCHEMBL2539870 0.67
SCHEMBL5434695 0.67
SCHEMBL1537999 0.67
SCHEMBL4913395 0.67
SCHEMBL975457 0.67

Similarity is cosine over the 2,048-bit Morgan fingerprint (≈ Tanimoto). Identical fingerprints score 1.00.

Patent provenance — the patents this molecule appears in, and who filed them

Claimed or disclosed in 20 patents. claimed = in the patent's claims; disclosed = body only.

PatentTitleAssigneePublishedPriorityFilingCountryStatus
CN-113823597-A Method for manufacturing semiconductor device 台湾积体电路制造股份有限公司 2021-12-21 CN disclosed
CN-109309054-B Semiconductor structure and forming method thereof 中芯国际集成电路制造(北京)有限公司 2020-12-22 CN disclosed
EP-2189842-B1 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask HOYA CORP (JP) 2017-08-23 EP disclosed
US-9529251-B2 Flare-measuring mask, flare-measuring method, and exposure method NIKON CORPORATION (JP) 2016-12-27 US disclosed
EP-2317384-B1 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask HOYA CORP (JP) 2016-11-09 EP disclosed
EP-2317382-B1 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask HOYA CORP (JP) 2016-10-26 EP disclosed
US-20150138559-A1 FLARE-MEASURING MASK, FLARE-MEASURING METHOD, AND EXPOSURE METHOD NIKON CORPORATION (JP) 2015-05-21 US disclosed
US-8945802-B2 Flare-measuring mask, flare-measuring method, and exposure method NIKON CORPORATION (JP) 2015-02-03 US disclosed
EP-1498936-B1 REFLECTION TYPE MASK BLANK AND REFLECTION TYPE MASK AND PRODUCTION METHODS FOR THEM HOYA CORP (JP) 2012-11-14 EP disclosed
US-7981573-B2 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask HOYA CORPORATION (JP) 2011-07-19 US disclosed
EP-2317383-A2 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask HOYA Corporation (JP) 2011-05-04 EP disclosed
EP-2317382-A2 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask Hoya Corporation (JP) 2011-05-04 EP disclosed
EP-2317384-A2 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask Hoya Corporation (JP) 2011-05-04 EP disclosed
WO-2010101048-A1 FLARE-MEASURING MASK, FLARE-MEASURING METHOD, AND EXPOSURE METHOD NIKON CORPORATION (JP) 2010-09-10 WO disclosed
US-20100227261-A1 Flare-measuring mask, flare-measuring method, and exposure method NIKON CORPORATION (JP) 2010-09-09 US disclosed
EP-2189842-A2 Reflective mask blank, reflective mask and methods of producing the mask blank and the mask Hoya Corporation (JP) 2010-05-26 EP disclosed
US-20080248409-A1 Photoresists; extreme ultraviolet region and absorber layer for exposure light; semiconductors HOYA CORPORATION 2008-10-09 US disclosed
US-7390596-B2 Reflective layer for reflecting exposure light in a short-wavelength region, absorber layer, and an upper layer of tantalum (Ta), boron (B), and nitrogen (N) HOYA CORPORATION (JP) 2008-06-24 US disclosed
US-20050208389-A1 Reflective layer for reflecting exposure light in a short-wavelength region, absorber layer, and an upper layer of tantalum (Ta), boron (B), and nitrogen (N) HOYA CORPORATION (JP) 2005-09-22 US disclosed
EP-1498936-A1 REFLECTION TYPE MASK BLANK AND REFLECTION TYPE MASK AND PRODUCTION METHODS FOR THEM HOYA CORPORATION (JP) 2005-01-19 EP disclosed