SCHEMBL134579

SCHEMBL134579

CC(C)(c1ccc(N)cc1)c1ccc(O)cc1

nearest known ligand 0.76

Predicted protein targets (top 20)

geneUniProtsupporting neighboursconfidence
ESR1 P03372 10/20 0.76
ESR2 Q92731 9/20 0.76
CYP3A4 P08684 3/20 0.76
HSD17B10 Q99714 2/20 0.76
HPGD P15428 2/20 0.76
AR P10275 1/20 0.76
TSHR P16473 1/20 0.76
SLC6A2 P23975 1/20 0.76
SLC6A4 P31645 1/20 0.76
HTR6 P50406 1/20 0.76
ESRRG P62508 1/20 0.76
SLC6A3 Q01959 1/20 0.76
ALDH1A1 P00352 3/20 0.64
CA3 P07451 1/20 0.62
THRB P10828 1/20 0.62
ALOX15 P16050 1/20 0.62
CA6 P23280 1/20 0.62
CASP1 P29466 1/20 0.62
HIF1A Q16665 1/20 0.62
CA14 Q9ULX7 1/20 0.62

Click a target to see other patent compounds predicted against it — the reverse direction, in place.

Similar compounds — the chemically nearest patent molecules

Nearest neighbours by Morgan-fingerprint cosine across the patent-compound collection, with each neighbour's top predicted target and the predicted targets it shares with this molecule.

Compoundsimilaritytop predictedshared targets
Bisphenol A SCHEMBL28319737 0.94 ESR1 (0.67) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL27861385 0.90 ESR1 (0.61) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL10008975 0.89 ESR1 (0.76) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL584084 0.87 ESR1 (0.89) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL9774987 0.87 ESR1 (1.00) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL3170263 0.87 ESR1 (1.00) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL8058731 0.87 ESR1 (1.00) ESR1ESR2CYP3A4HSD17B10HPGD
SCHEMBL27996 0.87 ESR1 (1.00) ESR1ESR2CYP3A4HSD17B10HPGD
SCHEMBL15868669 0.87 ESR1 (1.00) ESR1ESR2CYP3A4HSD17B10HPGD
Bisphenol A SCHEMBL31267162 0.87 ESR1 (1.00) ESR1ESR2CYP3A4HSD17B10HPGD

Similarity is cosine over the 2,048-bit Morgan fingerprint (≈ Tanimoto). Identical fingerprints score 1.00.

Patent provenance — the patents this molecule appears in, and who filed them

Claimed or disclosed in 1294 patents. claimed = in the patent's claims; disclosed = body only.

PatentTitleAssigneePublishedPriorityFilingCountryStatus
EP-1521794-B1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM SABIC INNOVATIVE PLASTICS IP (NL) 2010-01-06 EP claimed
CN-100366659-C Weather-resistant polycarbonate containing oxanilide structural unit, manufacturing method thereof and product prepared from same GEN ELECTRIC (US) 2008-02-06 CN claimed
US-7153630-B2 Resist with reduced line edge roughness MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2006-12-26 US claimed
US-20060078820-A1 Resist with reduced line edge roughness MASS INSTITUTE OF TECHNOLOGY (MIT) (US) 2006-04-13 US claimed
CN-1668670-A Weather-resistant polycarbonate containing oxanilide structural unit, manufacturing method thereof and product prepared from same GEN ELECTRIC (US) 2005-09-14 CN claimed
EP-1521794-A1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM GENERAL ELECTRIC COMPANY (US) 2005-04-13 EP claimed
WO-2004005372-A1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM GENERAL ELECTRIC COMPANY (US) 2004-01-15 WO claimed
US-20030036015-A1 Resist with reduced line edge roughness AIR FORCE, UNITED STATES 2003-02-20 US claimed
WO-2002091084-A2 RESIST WITH REDUCED LINE EDGE ROUGHNESS MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2002-11-14 WO claimed
US-20020161164-A1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM GENERAL ELECTRIC COMPANY 2002-10-31 US claimed
US-6462168-B1 POLYCARBONATE COMPOSITIONS OF ULTRAVIOLET ABSORBING COMPOUNDS TO PREVENT PHOTOYELLOWING GENERAL ELECTRIC COMPANY 2002-10-08 US claimed
US-5731125-A FOR FORMING RESIST FILM JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1998-03-24 US claimed
EP-0558280-A1 Chemically amplified resist JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1993-09-01 EP claimed
EP-0523957-A1 Radiation-sensitive composition JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1993-01-20 EP claimed
US-5079331-A Sealing electronic devices such as semiconductors, polyepoxides, hardeners MITSUI TOATSU CHEMICAL, INC. (JP) 1992-01-07 US claimed
EP-0400898-A2 Heat resistant epoxy resin composition MITSUI TOATSU CHEMICALS, Inc. (JP) 1990-12-05 EP claimed
US-4654401-A SOLVENT RESISTANCE, HIGH IMPACT STRENGTH MOLDING MATERIAL GENERAL ELECTRIC COMPANY (US) 1987-03-31 US claimed
US-4632962-A USING IN MAKING MODIFIED POLYESTERS, POLYCARBONATES GENERAL ELECTRIC COMPANY (US) 1986-12-30 US claimed
EP-0186060-A2 Hydroxyl group graft modified polyolefins GENERAL ELECTRIC COMPANY (US) 1986-07-02 EP claimed
JP-8081556-A None JP disclosed
JP-6172273-A None JP disclosed
JP-3000725-A None JP disclosed
JP-58177945-A None JP disclosed
JP-62010051-A None JP disclosed
JP-2147621-A None JP disclosed
JP-3041067-A None JP disclosed
JP-57045092-A None JP disclosed
JP-62145063-A None JP disclosed
JP-3000724-A None JP disclosed
JP-10310564-A None JP disclosed
JP-4328121-A None JP disclosed
JP-3231916-A None JP disclosed
US-12547072-B2 Self-aligned build-up processing GEMINATIO, INC. (US) 2026-02-10 US disclosed
US-20250336673-A1 METHODS FOR SUBSTRATE PATTERNING PROCESS TOKYO ELECTRON LTD (JP) 2025-10-30 US disclosed
US-20250314970-A1 OVERCOAT COMPOSITION AND PATTERNING METHODS TOKYO ELECTRON LTD (JP) 2025-10-09 US disclosed
US-20250314968-A1 SELF-ALIGNED DOUBLE PATTERNING USING METAL-BASED RESIST TOKYO ELECTRON LTD (JP) 2025-10-09 US disclosed
US-20250314969-A1 SELF-ALIGNED DOUBLE PATTERNING USING METAL-BASED RESIST TOKYO ELECTRON LTD (JP) 2025-10-09 US disclosed
US-12386261-B2 In-resist process for high density contact formation GEMINATIO, INC. (US) 2025-08-12 US disclosed
US-12372867-B2 Photoresists comprising multiple acid generator compounds DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC (US) 2025-07-29 US disclosed
US-20250233019-A1 MULTI-LEVEL SELECTIVE PATTERNING FOR STACKED DEVICE CREATION GEMINATIO, INC. (US) 2025-07-17 US disclosed
US-20250216782-A1 MASKING PROCESS USING SWITCHABLE POLYMER TOKYO ELECTRON LTD (JP) 2025-07-03 US disclosed
US-20250216763-A1 ANTI-SPACER MASKING PROCESS USING RESIST LAYER WITH SOLUBILITY SHIFTING AGENT TOKYO ELECTRON LTD (JP) 2025-07-03 US disclosed
US-20250216790-A1 MATERIALS AND METHODS FOR FORMING PATTERNED MASK ON SUBSTRATE GEMINATIO, INC., 2025-07-03 US disclosed
US-20250216783-A1 ANTI-SPACER MASKING PROCESS USING SECOND SWITCHABLE POLYMER TOKYO ELECTRON LTD (JP) 2025-07-03 US disclosed
US-20250216784-A1 IN-RESIST PROCESS FOR HIGH DENSITY CONTACT FORMATION GEMINATIO, INC. (US) 2025-07-03 US disclosed
US-20250218775-A1 MATERIALS AND METHODS FOR FORMING PATTERNED MASK ON SUBSTRATE GEMINATIO, INC. 2025-07-03 US disclosed
US-12306538-B2 Treatment liquid and pattern forming method FUJIFILM CORPORATION (JP) 2025-05-20 US disclosed
US-20250132207-A1 OPTIMIZATION FOR LOCAL CHEMICAL EXPOSURE GEMINATIO, INC. (US) 2025-04-24 US disclosed
US-20250130501-A1 ENHANCED FIELD STITCHING WITH CORRECTIVE CHEMISTRY GEMINATIO, INC. (US) 2025-04-24 US disclosed
US-20250132156-A1 NARROW LINE CUT MASKING PROCESS GEMINATIO, INC. (US) 2025-04-24 US disclosed
US-20250132166-A1 GENERATION OF MULTILINE ETCH SUBSTRATES GEMINATIO, INC. (US) 2025-04-24 US disclosed
US-12242193-B2 Coating compositions for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2025-03-04 US disclosed
US-20250068064-A1 ANTI-SPACER BASED SELF-ALIGNED HIGH ORDER PATTERNING GEMINATIO, INC. (US) 2025-02-27 US disclosed
CN-119330866-A A photoacid generator Photoresist composition comprising the same 湖北鼎龙控股股份有限公司 2025-01-21 CN disclosed
CN-119330920-A Photoacid generator, resist composition and application thereof 湖北鼎龙控股股份有限公司 2025-01-21 CN disclosed
US-20240419079-A1 CHEMICALLY SELECTIVE ADHESION AND STRENGTH PROMOTERS IN SEMICONDUCTOR PATTERNING GEMINATIO, INC. (US) 2024-12-19 US disclosed
CN-119080661-A Zwitterionic compounds Photoresist comprising the same 罗门哈斯电子材料有限责任公司 2024-12-06 CN disclosed
US-20240404828-A1 SELF-ALIGNED BUILD-UP PROCESSING GEMINATIO, INC. (US) 2024-12-05 US disclosed
US-20240377749-A1 ASSISTED FEATURE PLACEMENT IN SEMICONDUCTOR PATTERNING GEMINATIO, INC. (US) 2024-11-14 US disclosed
US-12129335-B2 Curable composition, cured product, and compound TOKYO OHKA KOGYO CO., LTD. (JP) 2024-10-29 US disclosed
CN-111033381-B With overcoated photoresist coating composition for use together 罗门哈斯电子材料韩国有限公司 2024-10-11 CN disclosed
CN-118251759-A Multi-level selective patterning for stacked device creation 杰米纳蒂奥公司 2024-06-25 CN disclosed
CN-118215986-A Chemoselective adhesion and strength promoters in semiconductor patterning 杰米纳蒂奥公司 2024-06-18 CN disclosed
CN-117941028-A Self-aligned stacking method 杰米纳蒂奥公司 2024-04-26 CN disclosed
CN-117941029-A Self-aligned high-order patterning based on anti-spacer 杰米纳蒂奥公司 2024-04-26 CN disclosed
CN-117916852-A Assist feature placement in semiconductor patterning 杰米纳蒂奥公司 2024-04-19 CN disclosed
CN-117916851-A Enhanced field stitching with corrective chemistry 杰米纳蒂奥公司 2024-04-19 CN disclosed
CN-117916854-A Narrow line cutting mask method 杰米纳蒂奥公司 2024-04-19 CN disclosed
CN-117916668-A Optimization for localized chemical exposure 杰米纳蒂奥公司 2024-04-19 CN disclosed
CN-117916853-A Formation of a multi-line etched substrate 杰米纳蒂奥公司 2024-04-19 CN disclosed
CN-117916855-A In-resist process for forming high density contacts 杰米纳蒂奥公司 2024-04-19 CN disclosed
US-11932713-B2 Monomers, polymers and lithographic compositions comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2024-03-19 US disclosed
US-11880134-B2 Salts and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2024-01-23 US disclosed
US-20230418161-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2023-12-28 US disclosed
US-11852970-B2 Material for lithography, production method therefor, composition for lithography, pattern formation method, compound, resin, and method for purifying the compound or the resin MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2023-12-26 US disclosed
US-11822248-B2 Coating compositions for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2023-11-21 US disclosed
CN-109856911-B Salt and photoresist comprising the same 罗门哈斯电子材料有限责任公司 2023-10-27 CN disclosed
WO-2023028249-A9 ASSISTED FEATURE PLACEMENT IN SEMICONDUCTOR PATTERNING GEMINATIO, INC. (US) 2023-10-12 WO disclosed
US-11762292-B2 Coating compositions for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2023-09-19 US disclosed
US-11681222-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2023-06-20 US disclosed
WO-2023076224-A9 CHEMICALLY SELECTIVE ADHESION AND STRENGTH PROMOTORS IN SEMICONDUCTOR PATTERNING GEMINATIO, INC. (US) 2023-06-15 WO disclosed
WO-2023076251-A1 MULTI-LEVEL SELECTIVE PATTERNING FOR STACKED DEVICE CREATION GEMINATIO INC. (US) 2023-05-04 WO disclosed
WO-2023076224-A1 CHEMICALLY SELECTIVE ADHESION AND STRENGTH PROMOTORS IN SEMICONDUCTOR PATTERNING GEMINATIO, INC. (US) 2023-05-04 WO disclosed
WO-2023028223-A1 OPTIMIZATION FOR LOCAL CHEMICAL EXPOSURE GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028244-A1 GENERATION OF MULTILINE ETCH SUBSTRATES GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028245-A1 SELF-ALIGNED BUILD-UP PROCESSING GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028249-A1 ASSISTED FEATURE PLACEMENT IN SEMICONDUCTOR PATTERNING GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028259-A1 ENHANCED FIELD STITCHING WITH CORRECTIVE CHEMISTRY GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028236-A1 IN-RESIST PROCESS FOR HIGH DENSITY CONTACT FORMATION GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028246-A1 ANTI-SPACER BASED SELF-ALIGNED HIGH ORDER PATTERNING GEMINATIO, INC. (US) 2023-03-02 WO disclosed
WO-2023028243-A1 NARROW LINE CUT MASKING PROCESS GEMINATIO, INC. (US) 2023-03-02 WO disclosed
US-11572430-B2 Compound, resin, resist composition or radiation-sensitive composition, resist pattern formation method, method for producing amorphous film, underlayer film forming material for lithography, composition for underlayer film formation for lithography, method for forming circuit pattern, and purification method MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2023-02-07 US disclosed
US-11505565-B2 Zwitterion compounds and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2022-11-22 US disclosed
CN-115373221-A Monomers, polymers and lithographic compositions comprising the same 罗门哈斯电子材料有限责任公司 2022-11-22 CN disclosed
US-11500291-B2 Underlying coating compositions for use with photoresists ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2022-11-15 US disclosed
CN-109725493-B Primer composition for use with photoresists 罗门哈斯电子材料韩国有限公司 2022-11-08 CN disclosed
US-11480877-B2 Resist composition, method for forming resist pattern, and polyphenol compound used therein MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2022-10-25 US disclosed
CN-109988259-B Monomers, polymers and lithographic compositions comprising the same 罗门哈斯电子材料有限责任公司 2022-10-14 CN disclosed
US-11453734-B2 Treatment liquid and pattern forming method FUJIFILM CORPORATION (JP) 2022-09-27 US disclosed
CN-115079517-A Salt and photoresist comprising the same 罗门哈斯电子材料有限责任公司 2022-09-20 CN disclosed
US-11448964-B2 Coating compositions for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2022-09-20 US disclosed
US-11448960-B2 Salts and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2022-09-20 US disclosed
CN-115058175-A Coating compositions for use with overcoated photoresists 罗门哈斯电子材料有限责任公司 2022-09-16 CN disclosed
CN-109725492-B Underlayer coating composition for use with photoresists 罗门哈斯电子材料韩国有限公司 2022-09-02 CN disclosed
CN-109791362-B Coating compositions for use with an overcoated photoresist 罗门哈斯电子材料韩国有限公司 2022-08-16 CN disclosed
CN-105739236-B Coating compositions for use with overcoated photoresists 罗门哈斯电子材料韩国有限公司 2022-07-19 CN disclosed
WO-2022145189-A1 PHOTOSENSITIVE RESIN COMPOSITION AND ORGANIC EL ELEMENT PARTITION 昭和電工株式会社 2022-07-07 WO disclosed
WO-2022145187-A1 PHOTOSENSITIVE RESIN COMPOSITION AND ORGANIC EL ELEMENT PARTITION 昭和電工株式会社 2022-07-07 WO disclosed
WO-2022145188-A1 PHOTOSENSITIVE RESIN COMPOSITION AND ORGANIC EL ELEMENT PARTITION 昭和電工株式会社 2022-07-07 WO disclosed
US-20220177641-A1 CURABLE COMPOSITION, CURED PRODUCT, AND COMPOUND TOKYO OHKA KOGYO CO., LTD. (JP) 2022-06-09 US disclosed
US-20220137508-A9 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2022-05-05 US disclosed
CN-109143783-B Coating compositions for use with overcoated photoresists 罗门哈斯电子材料韩国有限公司 2022-04-29 CN disclosed
CN-109541886-B Antireflective compositions, methods of use thereof, and coated substrates 罗门哈斯电子材料韩国有限公司 2022-04-26 CN disclosed
CN-108983549-B Acid generator and photoresist containing the same 罗门哈斯电子材料有限公司 2022-04-26 CN disclosed
WO-2022049911-A1 RADIATION-SENSITIVE RESIN COMPOSITION AND PATTERN FORMATION METHOD JSR株式会社 2022-03-10 WO disclosed
US-11262656-B2 Coating compositions for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2022-03-01 US disclosed
US-11256170-B2 Compound, resist composition, and method for forming resist pattern using it MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2022-02-22 US disclosed
US-11243467-B2 Compound, resin, resist composition or radiation-sensitive composition, resist pattern formation method, method for producing amorphous film, underlayer film forming material for lithography, composition for underlayer film formation for lithography, method for forming circuit pattern, and purification method MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2022-02-08 US disclosed
US-20220011670-A1 RESIST UNDERLAYER SURFACE MODIFICATION INTERNATIONAL BUSINESS MACHINES CORPORATION 2022-01-13 US disclosed
CN-113480439-A Preparation method of aminophenol containing isopropylidene alkane structure 江西同宇新材料有限公司 2021-10-08 CN disclosed
CN-108137478-B Compound, composition thereof, purification method, resist pattern formation method, and amorphous film production method 三菱瓦斯化学株式会社 2021-09-28 CN disclosed
US-20210278764-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2021-09-09 US disclosed
US-11086220-B2 Underlayer coating compositions for use with photoresists ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2021-08-10 US disclosed
CN-107924123-B Material for lithography, method for producing same, composition for lithography, method for forming pattern, compound, resin, and method for purifying same 学校法人关西大学 2021-08-06 CN disclosed
US-20210200097-A1 TREATMENT LIQUID AND PATTERN FORMING METHOD FUJIFILM CORPORATION (JP) 2021-07-01 US disclosed
EP-2420891-B1 Process for immersion lithography ROHM & HAAS ELECT MAT (US) 2021-06-23 EP disclosed
US-11042094-B2 Treatment liquid and pattern forming method FUJIFILM CORPORATION (JP) 2021-06-22 US disclosed
US-11036133-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2021-06-15 US disclosed
CN-107533291-B Compound, resist composition, and resist pattern formation method using same 三菱瓦斯化学株式会社 2021-06-11 CN disclosed
EP-3279727-B1 COMPOUND, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN USING IT MITSUBISHI GAS CHEMICAL CO (JP) 2021-06-09 EP disclosed
EP-3062151-B1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM MITSUBISHI GAS CHEMICAL CO (JP) 2021-05-05 EP disclosed
CN-106647170-B Coating compositions for use with overcoated photoresists 罗门哈斯电子材料韩国有限公司 2021-05-04 CN disclosed
CN-107428717-B Resist composition, resist pattern forming method, and polyphenol compound used for same 三菱瓦斯化学株式会社 2021-04-23 CN disclosed
CN-107533290-B Resist base material, resist composition, and method for forming resist pattern 三菱瓦斯化学株式会社 2021-04-09 CN disclosed
CN-106187964-B Acid generator compound and photoresist comprising the same 罗门哈斯电子材料有限责任公司 2021-04-06 CN disclosed
US-10962884-B2 Treatment liquid and pattern forming method FUJIFILM CORPORATION (JP) 2021-03-30 US disclosed
EP-3141957-B1 RESIST MATERIAL, RESIST COMPOSITION, AND RESIST PATTERN FORMATION METHOD MITSUBISHI GAS CHEMICAL CO (JP) 2021-03-24 EP disclosed
CN-106814543-B Coating compositions for use with overcoated photoresists 罗门哈斯电子材料韩国有限公司 2021-03-23 CN disclosed
EP-3279728-B1 RESIST BASE MATERIAL, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2021-03-17 EP disclosed
CN-108008600-B Radiation-sensitive composition 三菱瓦斯化学株式会社 2021-02-09 CN disclosed
EP-3229075-B1 PHOTORESIST COMPOSITION, METHOD FOR MANUFACTURING SAME, AND METHOD FOR FORMING RESIST PATTERN JSR CORP (JP) 2021-01-06 EP disclosed
US-20200409261-A1 COMPOUND, RESIN, RESIST COMPOSITION OR RADIATION-SENSITIVE COMPOSITION, RESIST PATTERN FORMATION METHOD, METHOD FOR PRODUCING AMORPHOUS FILM, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, COMPOSITION FOR UNDERLAYER FILM FORMATION FOR LITHOGRAPHY, METHOD FOR FORMING CIRCUIT PATTERN, AND PURIFICATION METHOD MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2020-12-31 US disclosed
US-20200401043-A1 PATTERN FORMING METHOD AND DEVELOPER JSR CORPORATION (JP) 2020-12-24 US disclosed
EP-2485090-B1 Radiation-sensitive resin composition for forming resist pattern JSR CORP (JP) 2020-12-23 EP disclosed
US-10844037-B2 Aryl acetate onium materials ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2020-11-24 US disclosed
US-10816898-B2 2020-10-27 US disclosed
US-10809616-B2 Cholate photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2020-10-20 US disclosed
CN-106154747-B Photobase generators and photoresist compositions comprising the same 罗门哈斯电子材料韩国有限公司 2020-10-16 CN disclosed
US-10788751-B2 Coating composition for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2020-09-29 US disclosed
US-20200262787-A1 OPTICAL COMPONENT FORMING COMPOSITION AND CURED PRODUCT THEREOF MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2020-08-20 US disclosed
EP-3279190-B1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND POLYPHENOL COMPOUND USED THEREIN MITSUBISHI GAS CHEMICAL CO (JP) 2020-08-12 EP disclosed
CN-105103051-B Pattern forming method and method for manufacturing electronic component using the same 富士胶片株式会社 2020-07-31 CN disclosed
EP-2080750-B1 RADIATION-SENSITIVE COMPOSITION MITSUBISHI GAS CHEMICAL CO (JP) 2020-07-29 EP disclosed
CN-106462059-B Resist material, resist composition, and resist pattern forming method 三菱瓦斯化学株式会社 2020-07-28 CN disclosed
CN-106957217-B Polyhydric phenol compound for resist composition 三菱瓦斯化学株式会社 2020-07-24 CN disclosed
CN-107267039-B Coating compositions for use with an overcoated photoresist 罗门哈斯电子材料韩国有限公司 2020-07-07 CN disclosed
CN-111352301-A Radiation-sensitive resin composition and method for forming microlens JSR株式会社 2020-06-30 CN disclosed
US-10670965-B2 Polymers and photoresist compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2020-06-02 US disclosed
US-20200166843-A1 PATTERN FORMING METHOD AND PROCESSING LIQUID JSR CORPORATION (JP) 2020-05-28 US disclosed
US-10642156-B2 Resist base material, resist composition and method for forming resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2020-05-05 US disclosed
US-20200124961-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2020-04-23 US disclosed
CN-111033381-A Coating compositions for use with overcoated photoresists 罗门哈斯电子材料韩国有限公司 2020-04-17 CN disclosed
US-10620534-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2020-04-14 US disclosed
EP-3143010-B1 ENERGY EFFICIENT MANUFACTURING PROCESS FOR PREPARING N,O-TRIGLYCIDYL AMINOPHENOLS ADITYA BIRLA CHEMICALS THAILAND LTD (TH) 2020-04-08 EP disclosed
CN-104216224-B Photoresists comprising urethane components 罗门哈斯电子材料有限公司 2020-03-24 CN disclosed
US-10558122-B2 Compositions comprising sulfonamide material and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2020-02-11 US disclosed
CN-104570602-B substituted arylonium materials 罗门哈斯电子材料有限公司 2019-12-10 CN disclosed
US-20190346763-A1 COMPOSITIONS COMPRISING HETERO-SUBSTITUTED CARBOCYCLIC ARYL COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-11-14 US disclosed
US-10474032-B2 Coating compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-11-12 US disclosed
US-10466588-B2 Sulfonyl photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-11-05 US disclosed
CN-110333645-A Photoresist comprising a variety of raw sour immunomodulator compounds 罗门哈斯电子材料有限公司 2019-10-15 CN disclosed
US-10437148-B2 Resist material, resist composition and method for forming resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2019-10-08 US disclosed
US-10429737-B2 Antireflective compositions with thermal acid generators ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2019-10-01 US disclosed
CN-105264440-B Anti-corrosion agent composition 三菱瓦斯化学株式会社 2019-09-24 CN disclosed
US-20190278175-A9 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2019-09-12 US disclosed
CN-106133604-B Protectant composition and protectant pattern forming method 三菱瓦斯化学株式会社 2019-09-06 CN disclosed
US-20190258168-A1 TREATMENT LIQUID AND PATTERN FORMING METHOD FUJIFILM CORPORATION (JP) 2019-08-22 US disclosed
US-20190227433-A1 ACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM & HAAS ELECT MAT (US) 2019-07-25 US disclosed
EP-3118684-B1 RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2019-07-24 EP disclosed
EP-2743249-B1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2019-07-24 EP disclosed
US-10359698-B2 Compositions comprising hetero-substituted carbocyclic aryl component and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-07-23 US disclosed
EP-2911002-B1 RESIST COMPOSITION MITSUBISHI GAS CHEMICAL CO (JP) 2019-07-17 EP disclosed
CN-109988259-A Monomers, polymers and lithographic compositions comprising the same 罗门哈斯电子材料有限责任公司 2019-07-09 CN disclosed
US-20190202955-A1 MONOMERS, POLYMERS AND LITHOGRAPHIC COMPOSITIONS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2019-07-04 US disclosed
CN-109928904-A Zwitterionic compound and photoresist comprising same 罗门哈斯电子材料有限责任公司 2019-06-25 CN disclosed
EP-1720072-B1 Compositons and processes for immersion lithography ROHM & HAAS ELECT MAT (US) 2019-06-05 EP disclosed
US-20190161509-A1 ZWITTERION COMPOUNDS AND PHOTORESISTS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2019-05-30 US disclosed
US-20190163055-A1 SALTS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-05-30 US disclosed
US-20190163058-A1 SALTS AND PHOTORESISTS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2019-05-30 US disclosed
US-10303055-B2 Resist composition and method for forming resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2019-05-28 US disclosed
US-10303058-B2 Pattern forming method, treating agent, electronic device, and method for manufacturing the same FUJIFILM CORPORATION (JP) 2019-05-28 US disclosed
US-20190155162-A1 PATTERN-FORMING METHOD AND COMPOSITION FOR RESIST PATTERN-REFINEMENT JSR CORPORATION (JP) 2019-05-23 US disclosed
CN-109725493-A The primer composition being used together with photoresist 罗门哈斯电子材料韩国有限公司 2019-05-07 CN disclosed
US-20190129305-A1 UNDERLYING COATING COMPOSITIONS FOR USE WITH PHOTORESISTS DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2019-05-02 US disclosed
US-20190129306-A1 UNDERLAYER COATING COMPOSITIONS FOR USE WITH PHOTORESISTS DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2019-05-02 US disclosed
US-10274825-B2 Acid generator compounds and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-04-30 US disclosed
US-10274824-B2 Photobase generators and photoresist compositions comprising same ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2019-04-30 US disclosed
CN-109690361-A Optical component forms composition 三菱瓦斯化学株式会社 2019-04-26 CN disclosed
EP-2505576-B1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION THEREOF, RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD MITSUBISHI GAS CHEMICAL CO (JP) 2019-04-24 EP disclosed
EP-3007004-B1 RESIST COMPOSITION MITSUBISHI GAS CHEMICAL CO (JP) 2019-04-17 EP disclosed
US-10248020-B2 Acid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-04-02 US disclosed
US-20190085173-A1 ANTIREFLECTIVE COMPOSITIONS WITH THERMAL ACID GENERATORS DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2019-03-21 US disclosed
CN-104737073-B Anti-corrosion agent composition 三菱瓦斯化学株式会社 2019-03-08 CN disclosed
US-10222699-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-03-05 US disclosed
US-10221131-B2 Acid generator compounds and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-03-05 US disclosed
US-20190056657-A1 COMPOUND, RESIN, RESIST COMPOSITION OR RADIATION-SENSITIVE COMPOSITION, RESIST PATTERN FORMATION METHOD, METHOD FOR PRODUCING AMORPHOUS FILM, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, COMPOSITION FOR UNDERLAYER FILM FORMATION FOR LITHOGRAPHY, METHOD FOR FORMING CIRCUIT PATTERN, AND PURIFICATION METHOD MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2019-02-21 US disclosed
US-10203602-B2 Coating compositions for use with an overcoated photoresist ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2019-02-12 US disclosed
US-20190025699-A1 FILM-FORMING MATERIAL FOR RESIST PROCESS AND PATTERN-FORMING METHOD JSR CORPORATION (JP) 2019-01-24 US disclosed
US-20190025695-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2019-01-24 US disclosed
CN-104281006-B Radiation-ray sensitive composition 三菱瓦斯化学株式会社 2019-01-22 CN disclosed
US-10180627-B2 Processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-01-15 US disclosed
US-10179778-B2 Substituted aryl onium materials ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2019-01-15 US disclosed
EP-2927911-B1 INSULATED WIRE AND ELECTRICAL/ELECTRONIC DEVICE FURUKAWA ELECTRIC CO LTD (JP) 2019-01-09 EP disclosed
CN-103913951-B Acid agent and photoresist containing it 罗门哈斯电子材料有限公司 2019-01-08 CN disclosed
CN-109143783-A The coating composition being used together with outer painting photoresist 罗门哈斯电子材料韩国有限公司 2019-01-04 CN disclosed
CN-109073782-A Optical element forms composition and its solidfied material 三菱瓦斯化学株式会社 2018-12-21 CN disclosed
US-20180364575-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2018-12-20 US disclosed
WO-2018229554-A2 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2018-12-20 WO disclosed
US-20180364576-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2018-12-20 US disclosed
CN-104391429-B Radiation sensitive resin composition, polymer and resist pattern forming method JSR株式会社 2018-12-18 CN disclosed
CN-108983549-A Acid agent and photoresist containing it 罗门哈斯电子材料有限公司 2018-12-11 CN disclosed
CN-103733135-B Resist composition, method for forming resist pattern, polyphenol compound used for the same, and alcohol compound derived from the polyphenol compound 三菱瓦斯化学株式会社 2018-11-27 CN disclosed
US-20180284607-A1 RADIATION-SENSITIVE COMPOSITION MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-10-04 US disclosed
US-10082733-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2018-09-25 US disclosed
US-20180246405-A1 MATERIAL FOR LITHOGRAPHY, PRODUCTION METHOD THEREFOR, COMPOSITION FOR LITHOGRAPHY, PATTERN FORMATION METHOD, COMPOUND, RESIN, AND METHOD FOR PURIFYING THE COMPOUND OR THE RESIN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-08-30 US disclosed
US-20180217499-A1 TREATMENT LIQUID AND PATTERN FORMING METHOD FUJIFILM CORPORATION (JP) 2018-08-02 US disclosed
US-20180217503-A1 TREATMENT LIQUID AND PATTERN FORMING METHOD FUJIFILM CORPORATION (JP) 2018-08-02 US disclosed
CN-103852973-B Ionic hot acid generating agent for cryogenic applications 罗门哈斯电子材料有限公司 2018-07-31 CN disclosed
CN-104725558-B The method that photic acid generates copolymer and relevant photoetching compositions, the base material of coating and formation electronic device 罗门哈斯电子材料有限公司 2018-07-27 CN disclosed
CN-104076601-B Acid generator and photoresist containing the same 罗门哈斯电子材料有限公司 2018-07-24 CN disclosed
EP-3348542-A1 COMPOUND, RESIN, RESIST COMPOSITION OR RADIATION-SENSITIVE COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING AMORPHOUS FILM, MATERIAL FOR FORMING LITHOGRAPHIC UNDERLAYER FILM, COMPOSTION FOR FORMING LITHOGRAPHIC UNDERLAYER FILM, METHOD FOR FORMING CIRCUIT PATTERN, AND PURIFICATION METHOD Mitsubishi Gas Chemical Company, Inc. (JP) 2018-07-18 EP disclosed
US-10025188-B2 Resist pattern-forming method JSR CORPORATION (JP) 2018-07-17 US disclosed
US-10023548-B2 Energy efficient manufacturing process for preparing N,O-triglycidyl aminophenols ADITYA BIRLA CHEMICALS (THAILAND) LTD. (TH) 2018-07-17 US disclosed
EP-3343290-A1 LITHOGRAPHY MATERIAL AND MANUFACTURING METHOD THEREFOR, LITHOGRAPHY COMPOSITION, PATTERN FORMING METHOD, COMPOUND, RESIN, AND REFINING METHOD FOR COMPOUND AND RESIN A School Corporation Kansai University (JP) 2018-07-04 EP disclosed
CN-108137478-A Compound, resin, resist composition or radiation-sensitive composition, method for forming resist pattern, method for producing amorphous film, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, method for forming circuit pattern, and purification method 三菱瓦斯化学株式会社 2018-06-08 CN disclosed
CN-108139691-A Processing liquid and pattern forming method 富士胶片株式会社 2018-06-08 CN disclosed
EP-2476662-B1 CYCLIC COMPOUND, PROCESS FOR PREPARATION THEREOF, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2018-05-30 EP disclosed
EP-1566693-B1 Use of a Resist Composition for Immersion Exposure and Pattern Formation Method Using the Composition FUJIFILM CORP (JP) 2018-05-23 EP disclosed
CN-108008600-A Radiation-ray sensitive composition 三菱瓦斯化学株式会社 2018-05-08 CN disclosed
US-9958780-B2 Coating compositions for photoresists ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2018-05-01 US disclosed
US-20180107113-A1 RESIST BASE MATERIAL, RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-04-19 US disclosed
CN-107924123-A Photoetching material and its manufacture method, photoetching composition, pattern formation method and, compound, resin and their purification process 学校法人关西大学 2018-04-17 CN disclosed
US-20180101100-A1 TREATMENT LIQUID AND PATTERN FORMING METHOD FUJIFILM CORPORATION (JP) 2018-04-12 US disclosed
WO-2018060770-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2018-04-05 WO disclosed
US-20180095367-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD. (KR) 2018-04-05 US disclosed
US-20180081270-A1 RADIATION-SENSITIVE COMPOSITION, AMORPHOUS FILM, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-03-22 US disclosed
US-9921474-B2 Pattern-forming method and composition JSR CORPORATION (JP) 2018-03-20 US disclosed
US-20180074402-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND POLYPHENOL COMPOUND USED THEREIN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-03-15 US disclosed
US-20180074406-A1 COMPOUND, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN USING IT MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-03-15 US disclosed
US-20180074404-A1 RADIATION-SENSITIVE COMPOSITION AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-03-15 US disclosed
US-9908831-B2 Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-03-06 US disclosed
US-20180052390-A1 ONIUM COMPOUNDS AND METHODS OF SYNTHESIS THEREOF ROHM AND HAAS ELECTRONIC MATERIALS LLC 2018-02-22 US disclosed
EP-3285119-A1 RADIATION-SENSITIVE COMPOSITION Mitsubishi Gas Chemical Company, Inc. (JP) 2018-02-21 EP disclosed
US-9897913-B2 Radiation-sensitive composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2018-02-20 US disclosed
EP-2599814-B1 COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2018-02-14 EP disclosed
EP-3279727-A1 COMPOUND, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN IN WHICH SAME IS USED Mitsubishi Gas Chemical Company, Inc. (JP) 2018-02-07 EP disclosed
EP-3279730-A1 RADIATION-SENSITIVE COMPOSITION, AMORPHOUS FILM, AND RESIST PATTERN-FORMATION METHOD Mitsubishi Gas Chemical Company, Inc. (JP) 2018-02-07 EP disclosed
EP-3279728-A1 RESIST BASE MATERIAL, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2018-02-07 EP disclosed
EP-3279731-A1 RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD Mitsubishi Gas Chemical Company, Inc. (JP) 2018-02-07 EP disclosed
EP-3279190-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND POLYPHENOL COMPOUND USED THEREIN Mitsubishi Gas Chemical Company, Inc. (JP) 2018-02-07 EP disclosed
CN-107533290-A RESIST BASE MATERIAL, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN 三菱瓦斯化学株式会社 2018-01-02 CN disclosed
CN-107533291-A Compound, resist composition, and resist pattern formation method using same 三菱瓦斯化学株式会社 2018-01-02 CN disclosed
CN-107422607-A With the coating composition that outer painting photoresist is used together 罗门哈斯电子材料韩国有限公司 2017-12-01 CN disclosed
CN-107430337-A RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD 三菱瓦斯化学株式会社 2017-12-01 CN disclosed
CN-107428717-A Resist composition, resist pattern forming method, and polyphenol compound used for same 三菱瓦斯化学株式会社 2017-12-01 CN disclosed
CN-107430338-A RADIATION-SENSITIVE COMPOSITION 三菱瓦斯化学株式会社 2017-12-01 CN disclosed
CN-107407874-A Radiation-sensitive composition, amorphous film and corrosion-resisting pattern forming method 三菱瓦斯化学株式会社 2017-11-28 CN disclosed
US-20170336709-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2017-11-23 US disclosed
US-9817311-B2 Resist pattern-forming method, substrate-processing method, and photoresist composition JSR CORPORATION (JP) 2017-11-14 US disclosed
US-20170322492-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2017-11-09 US disclosed
CN-107267039-A The coating composition being used together with outer applying photoresist 罗门哈斯电子材料韩国有限公司 2017-10-20 CN disclosed
EP-3229075-A1 PHOTORESIST COMPOSITION, METHOD FOR MANUFACTURING SAME, AND METHOD FOR FORMING RESIST PATTERN JSR Corporation (JP) 2017-10-11 EP disclosed
US-9785048-B2 Resist composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2017-10-10 US disclosed
US-20170285470-A1 CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-10-05 US disclosed
US-20170285482-A1 ORGANIC PROCESSING LIQUID AND PATTERN FORMING METHOD FUJIFILM CORPORATION (JP) 2017-10-05 US disclosed
US-20170283651-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2017-10-05 US disclosed
US-20170269476-A1 PHOTORESIST COMPOSITION, PRODUCTION METHOD OF PHOTORESIST COMPOSITION, AND RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2017-09-21 US disclosed
US-9766547-B2 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method of manufacturing electronic device using the same, and electronic device FUJIFILM CORPORATION (JP) 2017-09-19 US disclosed
US-9746769-B2 2017-08-29 US disclosed
CN-107111253-A Organic processing liquid and pattern forming method 富士胶片株式会社 2017-08-29 CN disclosed
WO-2017137951-A1 INHERENTLY HEALING POLYCARBONATE RESINS SABIC GLOBAL TECHNOLOGIES B.V. (NL) 2017-08-17 WO disclosed
EP-2189845-B1 Compositions and processes for photolithography ROHM & HAAS ELECT MAT (US) 2017-08-02 EP disclosed
US-9720321-B2 Lactone photoacid generators and resins and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-08-01 US disclosed
US-9720322-B2 Photoresist composition, compound, and production method thereof JSR CORPORATION (JP) 2017-08-01 US disclosed
EP-2003148-B1 RADIATION-SENSITIVE RESIN COMPOSITION COMPRISING A FLUORINE-CONTAINING POLYMER JSR CORP (JP) 2017-07-19 EP disclosed
CN-106957217-A Polyphenol compound for anti-corrosion agent composition 三菱瓦斯化学株式会社 2017-07-18 CN disclosed
US-20170199453-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2017-07-13 US disclosed
US-9703192-B2 Onium compounds and methods of synthesis thereof ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-07-11 US disclosed
US-9696627-B2 Compositions comprising base-reactive component and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-07-04 US disclosed
US-9696622-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-07-04 US disclosed
US-20170183279-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM MITSUBISHI GAS CHEMICAL CO (JP) 2017-06-29 US disclosed
CN-106814543-A The coating composition being used together with outer painting photoresist 罗门哈斯电子材料韩国有限公司 2017-06-09 CN disclosed
US-9671689-B2 Cholate photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-06-06 US disclosed
US-20170153547-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2017-06-01 US disclosed
US-20170152236-A1 ENERGY EFFICIENT MANUFACTURING PROCESS FOR PREPARING N,O-TRIGLYCIDYL AMINOPHENOLS ADITYA BIRLA CHEMICALS (THAILAND) LTD. (TH) 2017-06-01 US disclosed
US-20170153542-A1 SULFONYL PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2017-06-01 US disclosed
US-20170145142-A1 RESIST MATERIAL, RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2017-05-25 US disclosed
US-9651863-B2 Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device FUJIFILM CORPORATION (JP) 2017-05-16 US disclosed
US-9651864-B2 Negative resist composition, method for producing relief pattern using the same, and electronic component using the same DAI NIPPON PRINTING CO., LTD. (JP) 2017-05-16 US disclosed
CN-106647170-A Coating compositions for use with an overcoated photoresist 罗门哈斯电子材料韩国有限公司 2017-05-10 CN disclosed
US-20170123319-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2017-05-04 US disclosed
CN-104725557-B Photoacid-generating copolymer and associated photoresist composition, coated substrate, and method of forming an electronic device 罗门哈斯电子材料有限公司 2017-04-26 CN disclosed
CN-102681336-B Compositions comprising base-reactive component and processes for photolithography 罗门哈斯电子材料有限公司 2017-04-12 CN disclosed
EP-2743769-B1 RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, POLYPHENOL COMPOUND USED THEREIN, AND ALCOHOL COMPOUND CAPABLE OF BEING DERIVED THEREFROM MITSUBISHI GAS CHEMICAL CO (JP) 2017-03-22 EP disclosed
EP-3143010-A1 [0001]ENERGY EFFICIENT MANUFACTURING PROCESS FOR PREPARING N,0- TRIGLYCIDYL AMINOPHENOLS Aditya Birla Chemicals (Thailand) Ltd. (TH) 2017-03-22 EP disclosed
US-9598392-B2 Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2017-03-21 US disclosed
US-9598520-B2 Radiation-sensitive resin composition, polymer and method for forming a resist pattern JSR CORPORATION (JP) 2017-03-21 US disclosed
US-20170075220-A1 RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2017-03-16 US disclosed
EP-3141957-A1 RESIST MATERIAL, RESIST COMPOSITION, AND RESIST PATTERN FORMATION METHOD Mitsubishi Gas Chemical Company, Inc. (JP) 2017-03-15 EP disclosed
CN-106479329-A Coating compositions for use with overcoated photoresists 罗门哈斯电子材料有限责任公司 2017-03-08 CN disclosed
US-20170059989-A1 POLYMER COMPOUND, RADIATION SENSITIVE COMPOSITION AND PATTERN FORMING METHOD MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2017-03-02 US disclosed
US-20170059991-A1 COATING COMPOSITION FOR USE WITH AN OVERCOATED PHOTORESIST U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2017-03-02 US disclosed
US-20170058079-A1 POLYMER COMPOUND, RADIATION SENSITIVE COMPOSITION AND PATTERN FORMING METHOD A SCHOOL CORPORATION KANSAI UNIVERSITY (JP) 2017-03-02 US disclosed
US-9581901-B2 Photoacid-generating copolymer and associated photoresist composition, coated substrate, and method of forming an electronic device ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-02-28 US disclosed
CN-106462059-A Resist material, resist composition, and resist pattern formation method 三菱瓦斯化学株式会社 2017-02-22 CN disclosed
US-9563128-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-02-07 US disclosed
EP-2474538-B1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION OF THE CYCLIC COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2017-01-25 EP disclosed
EP-3118684-A1 RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2017-01-18 EP disclosed
US-9540339-B2 Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2017-01-10 US disclosed
US-9541834-B2 Ionic thermal acid generators for low temperature applications ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2017-01-10 US disclosed
EP-2781504-B1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2017-01-04 EP disclosed
US-9529259-B2 Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, compound, and method for producing compound JSR CORPORATION (JP) 2016-12-27 US disclosed
US-20160370700-A1 PHOTORESIST COMPOSITION, COMPOUND, AND PRODUCTION METHOD THEREOF JSR CORPORATION (JP) 2016-12-22 US disclosed
US-20160347709-A1 ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-12-01 US disclosed
US-9507260-B2 Compositions and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-11-29 US disclosed
CN-106154747-A Light alkali producing agent and comprise its photo-corrosion-resisting agent composition 罗门哈斯电子材料韩国有限公司 2016-11-23 CN disclosed
US-9500947-B2 Acid generator compounds and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-11-22 US disclosed
US-9500950-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2016-11-22 US disclosed
US-9499513-B2 Acid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-11-22 US disclosed
US-20160334703-A1 PHOTOBASE GENERATORS AND PHOTORESIST COMPOSITIONS COMPRISING SAME DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2016-11-17 US disclosed
CN-106133604-A Protectant composition and protectant pattern forming method 三菱瓦斯化学株式会社 2016-11-16 CN disclosed
CN-106125506-A Novel polymer and photo-corrosion-resisting agent composition 罗门哈斯电子材料有限公司 2016-11-16 CN disclosed
US-20160327866-A1 PATTERN FORMING METHOD, TREATING AGENT, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING THE SAME FUJIFILM CORPORATION (JP) 2016-11-10 US disclosed
US-9488910-B2 Sulfonyl photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-11-08 US disclosed
US-20160320705-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2016-11-03 US disclosed
US-9482948-B2 Photoresist compositions and methods of forming photolithographic patterns ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-11-01 US disclosed
US-9477149-B2 Photoresist composition, compound, and production method thereof JSR CORPORATION (JP) 2016-10-25 US disclosed
EP-1580598-B1 Positive resist composition for immersion exposure and pattern-forming method using the same FUJIFILM CORP (JP) 2016-10-12 EP disclosed
US-20160291462-A1 PATTERN-FORMING METHOD AND COMPOSITION FOR RESIST PATTERN-REFINEMENT JSR CORPORATION (JP) 2016-10-06 US disclosed
US-20160266489-A1 RESIST PATTERN-FORMING METHOD, SUBSTRATE-PROCESSING METHOD, AND PHOTORESIST COMPOSITION JSR CORPORATION (JP) 2016-09-15 US disclosed
US-9436082-B2 Compositions comprising base-reactive component and processes for photolithography ROHM AND HAAS ELECTRONICS MATERIALS LLC (US) 2016-09-06 US disclosed
US-9434609-B2 Method for forming pattern, and polysiloxane composition JSR CORPORATION (JP) 2016-09-06 US disclosed
US-20160252818-A9 PRODUCTION METHOD OF SEMICONDUCTOR ELEMENT, AND ION IMPLANTATION METHOD JSR CORPORATION (JP) 2016-09-01 US disclosed
EP-3062151-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-08-31 EP disclosed
EP-1739485-B1 RESIST COMPOSITION MITSUBISHI GAS CHEMICAL CO (JP) 2016-08-31 EP disclosed
CN-103946204-B Cyclic compound, its manufacture method, radiation-sensitive composition and corrosion-resisting pattern forming method 三菱瓦斯化学株式会社 2016-08-24 CN disclosed
CN-103717562-B Cyclic compound, its manufacture method, compositions and corrosion-resisting pattern forming method 三菱瓦斯化学株式会社 2016-08-24 CN disclosed
US-9417527-B2 Resist pattern-forming method, substrate-processing method, and photoresist composition JSR CORPORATION (JP) 2016-08-16 US disclosed
EP-2332960-B1 Cholate photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT (US) 2016-08-10 EP disclosed
EP-1918778-B1 Compositions and processes for immersion lithography ROHM & HAAS ELECT MAT (US) 2016-08-03 EP disclosed
EP-3051348-A1 COMPOSITIONS COMPRISING HETERO-SUBSTITUTED CARBOCYCLIC ARYL COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY Rohm and Haas Electronic Materials LLC (US) 2016-08-03 EP disclosed
EP-3051350-A2 ALCOHOLIC COMPOUND AND METHOD FOR PRODUCING ALCOHOLIC COMPOUND MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-08-03 EP disclosed
US-20160187778-A1 COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST DUPONT SPECIALTY MATERIALS KOREA LTD (KR) 2016-06-30 US disclosed
CN-103353707-B Coating composition for photoresist 罗门哈斯电子材料有限公司 2016-06-29 CN disclosed
US-20160176840-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-06-23 US disclosed
US-20160168117-A1 ARYL ACETATE ONIUM MATERIALS U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2016-06-16 US disclosed
US-9354516-B2 Resist composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-05-31 US disclosed
US-20160145231-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-05-26 US disclosed
CN-102617790-B Polymer, the method for photo-corrosion-resisting agent composition and formation photoengraving pattern ROHM AND HAAS ELECTRONIC MATERIALS CO., LTD. (US) 2016-05-25 CN disclosed
US-9348220-B2 Photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-05-24 US disclosed
US-9348226-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2016-05-24 US disclosed
CN-104130172-B Sulphonyl light acid producing agent and the photoresist that comprises this sulphonyl light acid producing agent ROHM AND HAAS ELECTRONIC MATERIALS CO., LTD. (US) 2016-05-18 CN disclosed
US-9335630-B2 Pattern-forming method, and radiation-sensitive composition JSR CORPORATION (JP) 2016-05-10 US disclosed
US-20160124304-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC 2016-05-05 US disclosed
US-20160124303-A1 RESIST COMPOSITION MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-05-05 US disclosed
EP-2056162-B1 Process for immersion lithography ROHM & HAAS ELECT MAT (US) 2016-05-04 EP disclosed
US-9323146-B2 Photoresist composition, resist pattern-forming method, compound, acid generating agent, and photodegradable base JSR CORPORATION (JP) 2016-04-26 US disclosed
US-20160109800-A1 PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2016-04-21 US disclosed
EP-3007004-A1 RESIST COMPOSITION Mitsubishi Gas Chemical Company, Inc. (JP) 2016-04-13 EP disclosed
US-20160097978-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2016-04-07 US disclosed
US-9304394-B2 Aryl acetate onium materials ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2016-04-05 US disclosed
US-9298090-B2 2016-03-29 US disclosed
US-20160070172-A1 COMPOSITIONS COMPRISING SULFONAMIDE MATERIAL AND PROCESSES FOR PHOTOLITHOGRAPHY U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2016-03-10 US disclosed
US-20160062237-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2016-03-03 US disclosed
EP-1720075-B1 Coating compositions ROHM & HAAS ELECT MAT (US) 2016-03-02 EP disclosed
CN-103052670-B Compound, radiation-sensitive composition, and resist pattern formation method MITSUBISHI GAS CHEMICAL CO.,INC. (JP) 2016-03-02 CN disclosed
US-9268229-B2 Composition for forming resist underlayer film, and pattern-forming method JSR CORPORATION (JP) 2016-02-23 US disclosed
US-9268219-B2 Photoresist composition and resist pattern-forming method JSR CORPORATION (JP) 2016-02-23 US disclosed
US-20160041465-A1 PATTERN FORMING METHOD, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE FUJIFILM CORPORATION (JP) 2016-02-11 US disclosed
EP-2390722-B1 Methods of forming photolithographic patterns ROHM & HAAS ELECT MAT (US) 2016-02-10 EP disclosed
CN-102844707-B Comprise alkali reaction active component composition and for photolithographic method ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2016-02-10 CN disclosed
US-9256125-B2 Acid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2016-02-09 US disclosed
US-9255079-B2 Photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2016-02-09 US disclosed
US-9250526-B2 Composition for forming resist underlayer film, and pattern-forming method JSR CORPORATION (JP) 2016-02-02 US disclosed
US-9244355-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2016-01-26 US disclosed
CN-103102251-B Radiation-ray sensitive composition MITSUBISHI GAS CHEMICAL INC. (JP) 2016-01-20 CN disclosed
CN-105264440-A Resist composition MITSUBISHI GAS CHEMICAL CO 2016-01-20 CN disclosed
US-9239517-B2 Compound, radiation-sensitive composition and resist pattern formation method MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2016-01-19 US disclosed
US-20160011517-A1 PATTERN FORMING METHOD, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, METHOD OF MANUFACTURING ELECTRONIC DEVICE USING THE SAME, AND ELECTRONIC DEVICE FUJIFILM CORPORATION (JP) 2016-01-14 US disclosed
US-20160002199-A1 ACID GENERATORS AND PHOTORESISTS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2016-01-07 US disclosed
US-9229319-B2 Photoacid-generating copolymer and associated photoresist composition, coated substrate, and method of forming an electronic device ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2016-01-05 US disclosed
US-20150378255-A1 COMPOSITIONS COMPRISING CARBOXY COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC 2015-12-31 US disclosed
US-9223207-B2 Resist pattern-forming method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2015-12-29 US disclosed
EP-1698937-B1 Positive resist composition and pattern-forming method using the same FUJIFILM CORP (JP) 2015-12-23 EP disclosed
US-9213236-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2015-12-15 US disclosed
US-20150355539-A1 RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, ACID DIFFUSION CONTROL AGENT, COMPOUND, AND METHOD FOR PRODUCING COMPOUND JSR CORPORATION (JP) 2015-12-10 US disclosed
US-20150355550-A1 PRODUCTION METHOD OF SEMICONDUCTOR ELEMENT, AND ION IMPLANTATION METHOD JSR CORPORATION (JP) 2015-12-10 US disclosed
US-20150355546-A1 COMPOSITION FOR SILICON-CONTAINING FILM FORMATION, PATTERN-FORMING METHOD, AND POLYSILOXANE COMPOUND JSR CORPORATION (JP) 2015-12-10 US disclosed
CN-105122138-A Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device FUJIFILM CORP 2015-12-02 CN disclosed
US-9200098-B2 Radiation-sensitive composition and compound JSR CORPORATION (JP) 2015-12-01 US disclosed
CN-105103051-A Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film, and method for producing electronic device and electronic device using same FUJIFILM CORP 2015-11-25 CN disclosed
WO-2015174936-A1 [0001] ENERGY EFFICIENT MANUFACTURING PROCESS FOR PREPARING N,0- TRIGLYCIDYL AMINOPHENOLS ADITYA BIRLA CHEMICALS (THAILAND) LTD. (TH) 2015-11-19 WO disclosed
US-9188864-B2 Photoresist compositions and methods of forming photolithographic patterns ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2015-11-17 US disclosed
US-9188862-B2 Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the same FUJIFILM CORPORATION (JP) 2015-11-17 US disclosed
US-9182666-B2 Cyclic compound, method for producing the same, radiation-sensitive composition, and resist pattern formation method MITSUBISHI GAS CHEMICAL CO., INC. (JP) 2015-11-10 US disclosed
US-9170488-B2 Resist pattern-forming method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2015-10-27 US disclosed
CN-102653576-B Polymkeric substance, the formation method of photo-corrosion-resisting agent composition and photoengraving pattern ROHM AND HAAS ELECTRONIC MATERIALS CO., LTD. (US) 2015-10-21 CN disclosed
US-9164387-B2 Pattern-forming method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2015-10-20 US disclosed
US-9156785-B2 Base reactive photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2015-10-13 US disclosed
US-9158196-B2 Radiation-sensitive resin composition and pattern-forming method JSR CORPORATION (JP) 2015-10-13 US disclosed
US-20150286136-A1 RESIST COMPOSITION MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2015-10-08 US disclosed
EP-2927911-A1 INSULATED WIRE AND ELECTRICAL/ELECTRONIC DEVICE Furukawa Electric Co., Ltd. (JP) 2015-10-07 EP disclosed
CN-102666461-B Ring compound, its production method, radiation-ray sensitive composition and corrosion-resisting pattern formation method MITSUBISHI GAS CHEMICAL CO.,INC. (JP) 2015-09-30 CN disclosed
US-20150253670-A1 PATTERN-FORMING METHOD AND COMPOSITION JSR CORPORATION (JP) 2015-09-10 US disclosed
CN-102597878-B Radiation-sensitive resin composition, polymer, and method for forming resist pattern JSR CORP. (JP) 2015-09-02 CN disclosed
US-9122163-B2 2015-09-01 US disclosed
US-9122154-B2 Radiation-sensitive resin composition, and radiation-sensitive acid generating agent JSR CORPORATION (JP) 2015-09-01 US disclosed
US-9122153-B2 Cyclic compound, method for producing same, composition, and method for forming resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2015-09-01 US disclosed
EP-2911002-A1 RESIST COMPOSITION Mitsubishi Gas Chemical Company, Inc. (JP) 2015-08-26 EP disclosed
US-9116427-B2 Composition for forming resist underlayer film and pattern-forming method JSR CORPORATION (JP) 2015-08-25 US disclosed
EP-2267532-B1 Photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT (US) 2015-08-19 EP disclosed
US-9104102-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2015-08-11 US disclosed
CN-102445848-B The method of photoetching compositions and formation photoengraving pattern ROHM AND HAAS ELECTRONIC MATERIALS CO., LTD. (US) 2015-08-05 CN disclosed
US-20150212414-A1 IONIC THERMAL ACID GENERATORS FOR LOW TEMPERATURE APPLICATIONS ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2015-07-30 US disclosed
CN-104761608-A Cholate photoacid generators and photoresists comprising the same ROHM & HAAS ELECT MAT 2015-07-08 CN disclosed
US-20150177615-A1 PHOTOACID-GENERATING COPOLYMER AND ASSOCIATED PHOTORESIST COMPOSITION, COATED SUBSTRATE, AND METHOD OF FORMING AN ELECTRONIC DEVICE U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2015-06-25 US disclosed
US-20150177613-A1 PHOTOACID-GENERATING COPOLYMER AND ASSOCIATED PHOTORESIST COMPOSITION, COATED SUBSTRATE, AND METHOD OF FORMING AN ELECTRONIC DEVICE U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2015-06-25 US disclosed
US-20150177616-A1 PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE COMPOSITION JSR CORPORATION (JP) 2015-06-25 US disclosed
CN-104725557-A Photoacid-generating copolymer and associated photoresist composition, coated substrate, and method of forming an electronic device ROHM & HAAS ELECT MAT 2015-06-24 CN disclosed
CN-104725558-A Photoacid-generating copolymer and associated photoresist composition, coated substrate, and method of forming an electronic device ROHM & HAAS ELECT MAT 2015-06-24 CN disclosed
CN-104737073-A Resist composition MITSUBISHI GAS CHEMICAL CO 2015-06-24 CN disclosed
US-20150160556-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2015-06-11 US disclosed
US-9052600-B2 Method for forming resist pattern and composition for forming protective film JSR CORPORATION (JP) 2015-06-09 US disclosed
US-9034559-B2 Pattern-forming method, and radiation-sensitive composition JSR CORPORATION (JP) 2015-05-19 US disclosed
CN-104614938-A ARYL ACETATE ONIUM MATERIALS ROHM & HAAS ELECT MAT 2015-05-13 CN disclosed
US-9023584-B2 Radiation-sensitive composition, and compound JSR CORPORATION (JP) 2015-05-05 US disclosed
US-9023576-B2 Positive resist composition for immersion exposure and pattern-forming method using the same FUJIFILM CORPORATION (JP) 2015-05-05 US disclosed
CN-104570602-A Substituted aryl onium materials LABEAUME PAUL J 2015-04-29 CN disclosed
CN-102566323-B Compositions and processes for immersion lithography ROHM & HAAS ELECT MAT 2015-04-29 CN disclosed
EP-2189846-B1 Process for photolithography applying a photoresist composition comprising a block copolymer ROHM & HAAS ELECT MAT (US) 2015-04-22 EP disclosed
EP-2503392-B1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND RESIST PATTERN FORMATION METHOD JSR CORP (JP) 2015-04-15 EP disclosed
CN-102109760-B Resist pattern forming method JSR CORP 2015-04-15 CN disclosed
US-9005880-B2 Compositions comprising sulfonamide material and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2015-04-14 US disclosed
EP-2360153-B1 Photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT (US) 2015-04-08 EP disclosed
US-20150093708-A1 SUBSTITUTED ARYL ONIUM MATERIALS U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2015-04-02 US disclosed
US-20150093709-A1 ARYL ACETATE ONIUM MATERIALS U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2015-04-02 US disclosed
CN-102225924-B Photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2015-04-01 CN disclosed
US-8993223-B2 Resist pattern-forming method JSR CORPORATION (JP) 2015-03-31 US disclosed
CN-101900953-B Compositions comprising block polymer and processes for photolithography ROHM & HAAS ELECT MAT 2015-03-25 CN disclosed
US-8980539-B2 Developer JSR CORPORATION (JP) 2015-03-17 US disclosed
US-20150072290-A1 COATING COMPOSITIONS ROHM AND HAAS ELECTRONIC MATERIALS LLC 2015-03-12 US disclosed
CN-102617789-B Polymers, photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2015-03-11 CN disclosed
US-8975001-B2 Photoresist compositions and methods of forming photolithographic patterns ROHM AND HAAS ELECTRONICS MATERIALS LLC (US) 2015-03-10 US disclosed
US-8975006-B2 Compositions comprising carboxy component and processes for photolithography WANG DEYAN (US) 2015-03-10 US disclosed
CN-104391429-A RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND METHOD FOR FORMING A RESIST PATTERN JSR CORP 2015-03-04 CN disclosed
US-8969629-B2 Cyclic compound, production process thereof, radiation-sensitive composition and resist pattern formation method MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2015-03-03 US disclosed
US-20150048051-A1 RESIST PATTERN-FORMING METHOD, SUBSTRATE-PROCESSING METHOD, AND PHOTORESIST COMPOSITION JSR CORPORATION (JP) 2015-02-19 US disclosed
US-20150050600-A9 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2015-02-19 US disclosed
US-20150048046-A1 METHOD FOR FORMING PATTERN, AND POLYSILOXANE COMPOSITION JSR CORPORATION (JP) 2015-02-19 US disclosed
US-8956807-B2 Method for forming resist pattern, and composition for forming resist underlayer film JSR CORPORATION (JP) 2015-02-17 US disclosed
US-20150044609-A1 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2015-02-12 US disclosed
US-8945814-B2 Acid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2015-02-03 US disclosed
US-20150030980-A1 RADIATION-SENSITIVE COMPOSITION MITSUBISHI GAS CHEMICAL CO (JP) 2015-01-29 US disclosed
CN-103091978-B Methods of forming photolithographic patterns by negative tone development ROHM & HAAS ELECT MAT 2015-01-28 CN disclosed
CN-102681341-B Photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2015-01-28 CN disclosed
CN-104281006-A Radiation-sensitive composition MITSUBISHI GAS CHEMICAL CO 2015-01-14 CN disclosed
US-8927200-B2 Double patterning method JSR CORPORATION (JP) 2015-01-06 US disclosed
US-20150004545-A1 PHOTORESIST COMPOSITION, COMPOUND, AND PRODUCTION METHOD THEREOF JSR CORPORATION (JP) 2015-01-01 US disclosed
EP-2487148-B1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL CO (JP) 2014-12-31 EP disclosed
CN-101943856-B Composition containing hetero-substituted carbocyclic aryl component for photolithography and preparing method thereof ROHM & HAAS ELECT MAT 2014-12-17 CN disclosed
CN-104216224-A Photoresists comprising carbamate component ROHM & HAAS ELECT MAT 2014-12-17 CN disclosed
US-8911927-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2014-12-16 US disclosed
US-20140363766-A9 RESIST PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2014-12-11 US disclosed
US-20140363773-A1 PATTERN-FORMING METHOD JSR CORPORATION (JP) 2014-12-11 US disclosed
US-20140363769-A1 PHOTORESIST COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, ACID GENERATING AGENT, AND PHOTODEGRADABLE BASE JSR CORPORATION (JP) 2014-12-11 US disclosed
US-20140356785-A1 PHOTORESISTS COMPRISING CARBAMATE COMPONENT U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2014-12-04 US disclosed
CN-102161622-B Compound provided with phenol substituent, method for preparing the compound, and resist composition containing the compound KUMHO PETROCHEMICAL CO LTD 2014-11-26 CN disclosed
US-8889344-B2 Coating compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2014-11-18 US disclosed
US-8889336-B2 Radiation-sensitive resin composition and radiation-sensitive acid generating agent JSR CORPORATION (JP) 2014-11-18 US disclosed
US-8889335-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2014-11-18 US disclosed
US-8889919-B2 Cyclic compound, process for production of the cyclic compound, radiation-sensitive composition, and method for formation of resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-11-18 US disclosed
CN-102681348-B Methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2014-11-12 CN disclosed
CN-102603701-B Monomers, polymers, photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2014-11-12 CN disclosed
US-8883937-B2 Cyclic compound, manufacturing method therefor, radiation-sensitive composition, and method for forming a resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-11-11 US disclosed
US-20140329178-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING THE SAME, RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD MITSUBISHI GAS CHEMICAL COMPANY,INC (JP) 2014-11-06 US disclosed
US-20140329177-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-11-06 US disclosed
CN-104130172-A Sulfonyl photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2014-11-05 CN disclosed
US-20140322648-A1 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2014-10-30 US disclosed
CN-101943858-B Compositions comprising sulfonamide material and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS CO., LTD. (US) 2014-10-29 CN disclosed
US-8871428-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONICS MATERIALS LLC (US) 2014-10-28 US disclosed
US-20140308615-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-10-16 US disclosed
US-20140295347-A1 ACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS, LLC (US) 2014-10-02 US disclosed
US-20140295332-A1 ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD, EACH USING THE SAME FUJIFILM CORPORATION (JP) 2014-10-02 US disclosed
US-20140295350-A1 RESIST PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORP (JP) 2014-10-02 US disclosed
EP-2784584-A1 Compositions comprising sulfonamide material and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2014-10-01 EP disclosed
CN-104076601-A Acid generator and photoresist containing the same ROHM & HAAS ELECT MAT 2014-10-01 CN disclosed
CN-102540703-B Compositions comprising base-reactive component and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS CO., LTD. (US) 2014-10-01 CN disclosed
US-8846292-B2 Radiation-sensitive composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-09-30 US disclosed
EP-2781501-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2014-09-24 EP disclosed
EP-2781504-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2014-09-24 EP disclosed
US-8841059-B2 Crosslinking agent, negative resist composition, and pattern forming method using the negative resist composition DAI NIPPON PRINTING CO., LTD. (JP) 2014-09-23 US disclosed
CN-102591147-B Compositions comprising sugar component and processes for photolithography ROHM & HAAS ELECT MAT 2014-09-10 CN disclosed
US-8829247-B2 Cyclic compound, method of producing the same, radiation sensitive composition, and method of forming resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-09-09 US disclosed
US-20140248561-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-09-04 US disclosed
US-8822140-B2 Resist pattern-forming method JSR CORPORATION (JP) 2014-09-02 US disclosed
US-8815490-B2 Radiation-sensitive resin composition, polymer, and method for forming resist pattern JSR CORPORATION (JP) 2014-08-26 US disclosed
US-8815493-B2 Resist pattern-forming method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2014-08-26 US disclosed
US-8809476-B2 Polymer JSR CORPORATION (JP) 2014-08-19 US disclosed
US-8808974-B2 Method for forming pattern JSR CORPORATION (JP) 2014-08-19 US disclosed
US-8808975-B2 Positive resist composition for immersion exposure and pattern-forming method using the same FUJIFILM CORPORATION (JP) 2014-08-19 US disclosed
CN-102180822-B Sulfonyl photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2014-08-13 CN disclosed
US-8795954-B2 Resist pattern-forming method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2014-08-05 US disclosed
CN-103958455-A Cyclic compound, method for producing same, radiation-sensitive composition, and method for forming resist pattern MITSUBISHI GAS CHEMICAL CO 2014-07-30 CN disclosed
US-8790867-B2 Methods of forming photolithographic patterns by negative tone development ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2014-07-29 US disclosed
CN-103946204-A Cyclic compound, method for producing same, radiation-sensitive composition, and method for forming resist pattern MITSUBISHI GAS CHEMICAL CO 2014-07-23 CN disclosed
CN-103913951-A Acid generators and photoresists comprising the same ROHM & HAAS ELECT MAT 2014-07-09 CN disclosed
CN-102483574-B Radiation-sensitive resin composition and compound JSR CORP 2014-07-09 CN disclosed
US-8771923-B2 Radiation-sensitive composition JSR CORPORATION (JP) 2014-07-08 US disclosed
US-8771917-B2 Monomers, polymers, photoresist compositions and methods of forming photolithographic patterns ROHM AND HAAS ELECTRONICS MATERIALS LLC (US) 2014-07-08 US disclosed
US-20140186767-A1 ACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2014-07-03 US disclosed
CN-102053493-B Radiation-sensitive composition, protective film and inter layer insulating film, and method for forming the same JSR CORP 2014-07-02 CN disclosed
US-8765355-B2 Radiation sensitive resin composition, method for forming a pattern, polymer and compound JSR CORPORATION (JP) 2014-07-01 US disclosed
US-20140178825-A1 DEVELOPER JSR CORPORATION (JP) 2014-06-26 US disclosed
US-8758978-B2 Radiation-sensitive resin composition, resist pattern formation method, and polymer JSR CORPORATION (JP) 2014-06-24 US disclosed
EP-2743769-A1 RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, POLYPHENOL COMPOUND USED THEREIN, AND ALCOHOL COMPOUND CAPABLE OF BEING DERIVED THEREFROM Mitsubishi Gas Chemical Company, Inc. (JP) 2014-06-18 EP disclosed
EP-2743249-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2014-06-18 EP disclosed
US-20140162190-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2014-06-12 US disclosed
CN-103852973-A Ionic thermal acid generators for low temperature applications ROHM & HAAS ELECT MAT 2014-06-11 CN disclosed
US-8748078-B2 Cyclic compound, process for preparation thereof, radiation-sensitive composition, and method for formation of resist pattern MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2014-06-10 US disclosed
US-20140154625-A9 RADIATION-SENSITIVE RESIN COMPOSITION, AND RADIATION-SENSITIVE ACID GENERATING AGENT JSR CORPORATION (JP) 2014-06-05 US disclosed
EP-2738605-A2 Developer for resist pattern-forming method JSR Corporation (JP) 2014-06-04 EP disclosed
US-8741537-B2 Positive resist composition and pattern-forming method using the same FUJIFILM CORPORATION (JP) 2014-06-03 US disclosed
US-20140147794-A1 METHOD OF FORMING PHOTORESIST PATTERN JSR CORPORATION (JP) 2014-05-29 US disclosed
US-20140134544-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2014-05-15 US disclosed
CN-102253596-B Compositions and processes for immersion lithography ROHM & HAAS ELECT MAT 2014-05-14 CN disclosed
CN-101930173-B Photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2014-05-14 CN disclosed
US-8722306-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2014-05-13 US disclosed
CN-102304068-B Photoacid generators and photoresists comprising the same ROHM & HAAS ELECT MAT 2014-04-30 CN disclosed
US-8703401-B2 Method for forming pattern and developer JSR CORPORATION (JP) 2014-04-22 US disclosed
CN-103733135-A Resist composition, method for forming resist pattern, polyphenol compound used for the same, and alcohol compound derived from the polyphenol compound MITSUBISHI GAS CHEMICAL CO 2014-04-16 CN disclosed
US-8697343-B2 Fluorine-containing polymer, purification method, and radiation-sensitive resin composition JSR CORPORATION (JP) 2014-04-15 US disclosed
US-8697335-B2 Radiation-sensitive resin composition and compound JSR CORPORATION (JP) 2014-04-15 US disclosed
CN-103717562-A Cyclic compound, method for producing same, composition, and method for forming resist pattern MITSUBISHI GAS CHEMICAL CO 2014-04-09 CN disclosed
CN-103676478-A Photoresists comprising multiple acid generator compounds ROHM & HAAS ELECT MAT 2014-03-26 CN disclosed
CN-103676477-A Acid generator compounds and photoresists comprising same ROHM & HAAS ELECT MAT 2014-03-26 CN disclosed
CN-103664870-A Onium compounds and methods for preparing the same ROHM & HAAS ELECT MAT 2014-03-26 CN disclosed
US-20140080058-A1 ACID GENERATORS AND PHOTORESISTS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2014-03-20 US disclosed
US-20140080060-A1 ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2014-03-20 US disclosed
US-20140080062-A1 PHOTORESISTS COMPRISING MULTIPLE ACID GENERATOR COMPOUNDS U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2014-03-20 US disclosed
US-20140080056-A1 ONIUM COMPOUNDS AND METHODS OF SYNTHESIS THEREOF ROHM AND HAAS ELECTRONIC MATERIALS, LLC 2014-03-20 US disclosed
US-20140080066-A1 DOUBLE PATTERNING METHOD JSR CORPORATION (JP) 2014-03-20 US disclosed
US-20140080059-A1 ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2014-03-20 US disclosed
US-8669042-B2 Resist pattern-forming method JSR CORPORATION (JP) 2014-03-11 US disclosed
EP-2530525-B1 Method for forming pattern and developer JSR CORP (JP) 2014-02-26 EP disclosed
CN-101526737-B Immersion lithography compositions and immersion lithography method ROHM & HAAS ELECT MAT 2014-02-26 CN disclosed
US-8632945-B2 Radiation-sensitive resin composition, monomer, polymer, and production method of radiation-sensitive resin composition JSR CORPORATION (JP) 2014-01-21 US disclosed
US-8614050-B2 Polymers, photoresist compositions and methods of forming photolithographic patterns ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2013-12-24 US disclosed
US-8609891-B2 Photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2013-12-17 US disclosed
CN-101943860-B Processes for photolithography ROHM & HAAS ELECT MAT 2013-12-11 CN disclosed
CN-103439861-A Radiation-sensitive resin composition and compound JSR CORP 2013-12-11 CN disclosed
US-20130323653-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2013-12-05 US disclosed
CN-102346371-B Photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2013-11-20 CN disclosed
US-20130302735-A1 MONOMERS, POLYMERS AND PHOTORESIST COMPOSITIONS ROHM & HAAS ELECT MAT (US) 2013-11-14 US disclosed
US-20130295506-A1 RESIST PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORP (JP) 2013-11-07 US disclosed
US-20130295505-A1 RADIATION-SENSITIVE RESIN COMPOSITION, AND RADIATION-SENSITIVE ACID GENERATING AGENT JSR CORP (JP) 2013-11-07 US disclosed
US-20130280658-A1 RADIATION-SENSITIVE COMPOSITION, AND COMPOUND JSR CORPORATION (JP) 2013-10-24 US disclosed
CN-103353707-A Coating compositions for photoresists ROHM & HAAS ELECT MAT 2013-10-16 CN disclosed
CN-101907828-B Radiation-sensitive composition, protective film and inter layer insulating film, and process for forming the same JSR CORP 2013-10-16 CN disclosed
US-20130256264-A1 COMPOSITION FOR FORMING RESIST UNDERLAYER FILM, AND PATTERN-FORMING METHOD JSR CORPORATION (JP) 2013-10-03 US disclosed
US-20130260316-A1 RADIATION-SENSITIVE RESIN COMPOSITION AND RADIATION-SENSITIVE ACID GENERATING AGENT JSR CORPORATION (JP) 2013-10-03 US disclosed
US-8535871-B2 Radiation-sensitive resin composition, method for forming a resist pattern, compound, and polymer JSR CORPORATION (JP) 2013-09-17 US disclosed
US-20130233825-A1 COMPOSITION FOR FORMING RESIST UNDERLAYER FILM AND PATTERN-FORMING METHOD JSR CORPORATION (JP) 2013-09-12 US disclosed
US-20130233826-A1 COMPOSITION FOR FORMING RESIST UNDERLAYER FILM, AND PATTERN-FORMING METHOD JSR CORPORATION (JP) 2013-09-12 US disclosed
CN-101528653-B Radiation-sensitive composition MITSUBISHI GAS CHEMICAL CO 2013-09-11 CN disclosed
US-8530146-B2 Method for forming resist pattern JSR CORPORATION (JP) 2013-09-10 US disclosed
US-20130230804-A1 PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE COMPOSITION JSR CORPORATION (JP) 2013-09-05 US disclosed
US-20130230803-A1 RESIST PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2013-09-05 US disclosed
US-20130224661-A1 PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2013-08-29 US disclosed
US-20130224666-A1 RESIST PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2013-08-29 US disclosed
US-20130216948-A1 RADIATION-SENSITIVE RESIN COMPOSITION AND PATTERN-FORMING METHOD JSR CORPORATION (JP) 2013-08-22 US disclosed
US-8507575-B2 Radiation-sensitive resin composition, polymer, and compound JSR CORPORATION (JP) 2013-08-13 US disclosed
US-8501385-B2 Positive-type radiation-sensitive composition, and resist pattern formation method JSR CORPORATION (JP) 2013-08-06 US disclosed
US-20130183624-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2013-07-18 US disclosed
EP-2615497-A1 RESIST PATTERN FORMING METHOD JSR Corporation (JP) 2013-07-17 EP disclosed
CN-101395189-B Fluorine-containing polymer, method for purifying same, and radiation-sensitive resin composition JSR CORP 2013-07-17 CN disclosed
WO-2013100158-A1 ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD, EACH USING THE SAME FUJIFILM CORPORATION (JP) 2013-07-04 WO disclosed
US-20130164695-A1 METHOD FOR FORMING PATTERN JSR CORPORATION (JP) 2013-06-27 US disclosed
US-8470513-B2 Radiation-sensitive resin composition and polymer JSR CORPORATION (JP) 2013-06-25 US disclosed
EP-2599814-A1 COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2013-06-05 EP disclosed
CN-103121951-A Monomers, polymers and photoresist compositions ROHM & HAAS ELECT MAT 2013-05-29 CN disclosed
US-20130122423-A1 COMPOUND, RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2013-05-16 US disclosed
CN-103102251-A Radiation-sensitive composition MITSUBISHI GAS CHEMICAL CO 2013-05-15 CN disclosed
US-8440384-B2 Compound, salt, and radiation-sensitive resin composition JSR CORPORATION (JP) 2013-05-14 US disclosed
US-20130115559-A1 METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS BY NEGATIVE TONE DEVELOPMENT ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2013-05-09 US disclosed
CN-103091978-A Methods of forming photolithographic patterns by negative tone development ROHM & HAAS ELECT MAT 2013-05-08 CN disclosed
US-8435718-B2 Upper layer-forming composition and photoresist patterning method JSR CORPORATION (JP) 2013-05-07 US disclosed
US-20130108962-A1 RADIATION-SENSITIVE COMPOSITION JSR CORPORATION (JP) 2013-05-02 US disclosed
CN-103076720-A Photoresist compositions ROHM & HAAS ELECT MAT 2013-05-01 CN disclosed
US-20130101942-A1 METHOD FOR FORMING RESIST PATTERN, AND COMPOSITION FOR FORMING RESIST UNDERLAYER FILM JSR CORPORATION (JP) 2013-04-25 US disclosed
CN-101516970-B Silicone resin composition and method for forming trench isolation JSR CORP 2013-04-24 CN disclosed
US-20130095428-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2013-04-18 US disclosed
CN-103052670-A Compound, radiation-sensitive composition, and resist pattern formation method MITSUBISHI GAS CHEMICAL CO 2013-04-17 CN disclosed
US-20130089817-A1 PHOTORESIST COMPOSITION AND RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2013-04-11 US disclosed
EP-2065428-B1 METHOD FOR FORMING A SILICONE RESIN JSR CORP (JP) 2013-04-03 EP disclosed
US-20130078571-A1 PHOTORESIST COMPOSITION, METHOD FOR PRODUCING PHOTORESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN JSR CORPORATION (JP) 2013-03-28 US disclosed
CN-101256355-B Composition for immersion lithography and immersion lithography method ROHM & HAAS ELECT MAT 2013-03-27 CN disclosed
US-20130065178-A1 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2013-03-14 US disclosed
US-20130059252-A1 METHOD FOR FORMING RESIST PATTERN AND COMPOSITION FOR FORMING PROTECTIVE FILM JSR CORPORATION (JP) 2013-03-07 US disclosed
US-8389202-B2 Polymer, radiation-sensitive composition, monomer, and method of producing compound JSR CORPORATION (JP) 2013-03-05 US disclosed
US-20130053526-A1 POLYMER JSR CORPORATION (JP) 2013-02-28 US disclosed
US-8377627-B2 Compound and radiation-sensitive composition JSR CORPORATION (JP) 2013-02-19 US disclosed
US-8361691-B2 Radiation-sensitive composition and process for producing low-molecular compound for use therein JSR CORPORATION (JP) 2013-01-29 US disclosed
US-20130017376-A1 NEGATIVE RESIST COMPOSITION, METHOD FOR PRODUCING RELIEF PATTERN USING THE SAME, AND ELECTRONIC COMPONENT USING THE SAME DAI NIPPON PRINTING CO., LTD. (JP) 2013-01-17 US disclosed
US-20130011783-A1 MONOMERS, POLYMERS, PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS DOW GLOBAL TECHNOLOGIES LLC (US) 2013-01-10 US disclosed
EP-1645908-B1 Positive resist composition and pattern-forming method using the same FUJIFILM CORP (JP) 2013-01-09 EP disclosed
CN-102844707-A Compositions comprising base-reactive component and processes for photolithography ROHM & HAAS ELECT MAT 2012-12-26 CN disclosed
US-8338077-B2 Photoacid generators and photoresists comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-12-25 US disclosed
US-8334087-B2 Polymer, radiation-sensitive composition, monomer, and method of producing compound JSR CORPORATION (JP) 2012-12-18 US disclosed
US-20120308938-A1 METHOD FOR FORMING PATTERN AND DEVELOPER JSR CORPORATION (JP) 2012-12-06 US disclosed
EP-2530525-A1 Method for forming pattern and developer JSR Corporation (JP) 2012-12-05 EP disclosed
US-8318582-B2 Method of forming a trench isolation JSR CORPORATION (JP) 2012-11-27 US disclosed
US-20120295197-A1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND METHOD FOR FORMING A RESIST PATTERN JSR CORPORATION (JP) 2012-11-22 US disclosed
US-20120295198-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2012-11-22 US disclosed
US-20120282546-A1 CYCLIC COMPOUND, PRODUCTION PROCESS THEREOF, RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-11-08 US disclosed
US-20120276482-A1 RADIATION SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A PATTERN, POLYMER AND COMPOUND JSR CORPORATION (JP) 2012-11-01 US disclosed
EP-2336826-B1 Sulfonyl photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT (US) 2012-10-24 EP disclosed
CN-102753509-A Cyclic compound, process for production of the cyclic compound, radiation-sensitive composition, and method for formation of resist pattern MITSUBISHI GAS CHEMICAL CO 2012-10-24 CN disclosed
EP-2510398-A2 COMPOSITIONS COMPRISING BASE-REACTIVE COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY Rohm and Haas Electronic Materials LLC (US) 2012-10-17 EP disclosed
EP-1961739-B1 NOVEL COMPOUND, POLYMER, AND RESIN COMPOSITION JSR CORP (JP) 2012-10-17 EP disclosed
US-20120251947-A1 CYCLIC COMPOUND, METHOD OF PRODUCING THE SAME, RADIATION SENSITIVE COMPOSITION, AND METHOD OF FORMING RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-10-04 US disclosed
EP-2505576-A1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION THEREOF, RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD Mitsubishi Gas Chemical Company, Inc. (JP) 2012-10-03 EP disclosed
CN-101788763-B Compositions and processes for immersion lithography ROHM & HAAS ELECT MAT 2012-10-03 CN disclosed
US-20120244478-A1 RESIST PATTERN FORMATION METHOD JSR CORPORATION (JP) 2012-09-27 US disclosed
EP-2503392-A1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND RESIST PATTERN FORMATION METHOD JSR Corporation (JP) 2012-09-26 EP disclosed
US-8273837-B2 Compound, polymer, and resin composition JSR CORPORATION (JP) 2012-09-25 US disclosed
US-20120237876-A1 RADIATION-SENSITIVE RESIN COMPOSITION, MONOMER, POLYMER, AND PRODUCTION METHOD OF RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2012-09-20 US disclosed
CN-102681341-A Photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-09-19 CN disclosed
CN-102681336-A Compositions comprising base-reactive component and processes for photolithography ROHM & HAAS ELECT MAT 2012-09-19 CN disclosed
CN-102681348-A Photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-09-19 CN disclosed
US-8263315-B2 Pattern-forming method JSR CORPORATION (JP) 2012-09-11 US disclosed
CN-102653576-A Polymers, photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-09-05 CN disclosed
US-8257902-B2 Compositons and processes for immersion lithography U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT 2012-09-04 US disclosed
US-20120219902-A1 PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-08-30 US disclosed
US-20120219901-A1 PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-08-30 US disclosed
EP-2492749-A1 Photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-08-29 EP disclosed
EP-2492750-A1 Photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-08-29 EP disclosed
EP-2487148-A1 CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2012-08-15 EP disclosed
US-8241833-B2 Positive resist composition and pattern-forming method using the same FUJIFILM CORPORATION (JP) 2012-08-14 US disclosed
US-20120202150-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2012-08-09 US disclosed
EP-2485090-A1 Radiation-sensitive resin composition for forming resist pattern JSR Corporation (JP) 2012-08-08 EP disclosed
CN-102617789-A Polymers, photoresist compositions and methods of forming photolithographic patterns DOW GLOBAL TECHNOLOGIES LLC 2012-08-01 CN disclosed
CN-102617790-A Polymers, photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-08-01 CN disclosed
CN-102621806-A Lactone photoacid generators and resins and photoresists comprising same ROHM & HAAS ELECT MAT 2012-08-01 CN disclosed
CN-102603701-A Monomers, polymers, photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-07-25 CN disclosed
CN-102603586-A Base reactive photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2012-07-25 CN disclosed
US-20120183908-A1 RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2012-07-19 US disclosed
EP-2476662-A1 CYCLIC COMPOUND, PROCESS FOR PREPARATION THEREOF, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2012-07-18 EP disclosed
CN-102596874-A Cyclic compound, method for producing same, radiation-sensitive composition, and method for forming resist pattern MITSUBISHI GAS CHEMICAL CO 2012-07-18 CN disclosed
CN-102597034-A Cyclic compound, manufacturing method therefor, radiation-sensitive composition, and method for forming a resist pattern MITSUBISHI GAS CHEMICAL CO 2012-07-18 CN disclosed
CN-102591147-A Compositions comprising sugar component and processes for photolithography ROHM & HAAS ELECT MAT 2012-07-18 CN disclosed
US-20120178024-A1 POLYMER, RADIATION-SENSITIVE COMPOSITION, MONOMER, AND METHOD OF PRODUCING COMPOUND JSR CORPORATION (JP) 2012-07-12 US disclosed
EP-2474565-A1 CYCLIC COMPOUND, MANUFACTURING METHOD THEREFOR, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING A RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2012-07-11 EP disclosed
EP-2474538-A1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION OF THE CYCLIC COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2012-07-11 EP disclosed
EP-2474518-A1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION OF THE CYCLIC COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN Mitsubishi Gas Chemical Company, Inc. (JP) 2012-07-11 EP disclosed
CN-102566323-A Compositions and processes for immersion lithography ROHM & HAAS ELECT MAT 2012-07-11 CN disclosed
US-20120171617-A1 POLYMERS, PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS DOW GLOBAL TECHNOLOGIES LLC (US) 2012-07-05 US disclosed
US-20120171615-A1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION OF THE CYCLIC COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-07-05 US disclosed
US-20120171626-A1 COMPOSITIONS COMPRISING BASE-REACTIVE COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-07-05 US disclosed
US-20120171612-A1 RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN FORMATION METHOD, AND POLYMER JSR CORPORATION (JP) 2012-07-05 US disclosed
US-20120171613-A1 UPPER LAYER FILM-FORMING COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN JSR CORPORATION (JP) 2012-07-05 US disclosed
US-20120171379-A1 RADIATION-SENSITIVE COMPOSITION MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-07-05 US disclosed
EP-2472320-A2 Compositions comprising base-reactive component and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2012-07-04 EP disclosed
EP-2472326-A1 Polymers, photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-07-04 EP disclosed
EP-2472324-A1 Monomers, polymers, photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-07-04 EP disclosed
EP-2472325-A1 Polymers, photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-07-04 EP disclosed
CN-102540703-A Compositions comprising base-reactive component and processes for photolithography DOW GLOBAL TECHNOLOGIES LLC 2012-07-04 CN disclosed
US-8211624-B2 Method for pattern formation and resin composition for use in the method JSR CORPORATION (JP) 2012-07-03 US disclosed
US-20120164576-A1 CYCLIC COMPOUND, PROCESS FOR PREPARATION THEREOF, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-06-28 US disclosed
US-20120164575-A1 CYCLIC COMPOUND, MANUFACTURING METHOD THEREFOR, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING A RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-06-28 US disclosed
US-20120164582-A1 RADIATION-SENSITIVE COMPOSITION AND COMPOUND JSR CORPORATION (JP) 2012-06-28 US disclosed
US-8206888-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2012-06-26 US disclosed
US-20120156621-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2012-06-21 US disclosed
US-20120156615-A1 CYCLIC COMPOUND, PROCESS FOR PRODUCTION OF THE CYCLIC COMPOUND, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMATION OF RESIST PATTERN MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-06-21 US disclosed
US-20120156612-A1 RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A RESIST PATTERN, COMPOUND, AND POLYMER JSR CORPORATION (JP) 2012-06-21 US disclosed
US-20120156595-A1 COMPOSITIONS COMPRISING SUGAR COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-06-21 US disclosed
US-20120148952-A1 RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND JSR CORPORATION (JP) 2012-06-14 US disclosed
CN-102498104-A Cyclic compound, process for production of the cyclic compound, radiation-sensitive composition, and method for formation of resist pattern MITSUBISHI GAS CHEMICAL CO 2012-06-13 CN disclosed
US-8198007-B2 Negative-working resist composition and pattern forming method using the same DAI NIPPON PRINTING CO., LTD. (JP) 2012-06-12 US disclosed
EP-2461213-A1 Polymers, photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-06-06 EP disclosed
CN-102483574-A Radiation-sensitive resin composition and compound JSR CORP 2012-05-30 CN disclosed
US-20120129108-A1 BASE REACTIVE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-05-24 US disclosed
US-20120129104-A1 LACTONE PHOTOACID GENERATORS AND RESINS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2012-05-24 US disclosed
US-20120122030-A1 COMPOSITIONS COMPRISING BASE-REACTIVE COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY DOW GLOBAL TECHNOLOGIES LLC (US) 2012-05-17 US disclosed
EP-2058318-B1 PHOSPHATE ESTER COMPOUND, METAL SALT THEREOF, DENTAL MATERIAL, AND DENTAL COMPOSITION MITSUI CHEMICALS INC (JP) 2012-05-16 EP disclosed
EP-2453309-A2 Compositions comprising sugar component and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2012-05-16 EP disclosed
EP-2453308-A1 Compositions comprising base-reactive component and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2012-05-16 EP disclosed
EP-2452932-A2 Base reactive photoacid generators and photoresists comprising same Rohm and Haas Electronic Materials LLC (US) 2012-05-16 EP disclosed
EP-2452941-A1 Lactone photoacid generators and resins and photoresists comprising same Rohm and Haas Electronic Materials LLC (US) 2012-05-16 EP disclosed
US-20120115084-A1 CROSSLINKING AGENT, NEGATIVE RESIST COMPOSITION, AND PATTERN FORMING METHOD USING THE NEGATIVE RESIST COMPOSITION DAI NIPPON PRINTING CO., LTD. (JP) 2012-05-10 US disclosed
CN-102445848-A Photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-05-09 CN disclosed
US-8173351-B2 Compound and radiation-sensitive composition JSR CORPORATION (JP) 2012-05-08 US disclosed
EP-1950610-B1 IMMERSION LITHOGRAPHIC COMPOSITION FOR FORMING UPPER FILM AND METHOD FOR FORMING PHOTORESIST PATTERN JSR CORP (JP) 2012-05-02 EP disclosed
US-8163462-B2 Photosensitive composition, method for forming pattern, and method for manufacturing semiconductor device RENESAS ELECTRONICS CORPORATION (JP) 2012-04-24 US disclosed
US-20120094234-A1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER, AND METHOD FOR FORMING RESIST PATTERN JSR CORPORATION (JP) 2012-04-19 US disclosed
CN-1881085-B Compositions and methods for immersion lithography ROHM & HAAS ELECT MAT 2012-04-18 CN disclosed
US-8158338-B2 Resist sensitizer MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2012-04-17 US disclosed
US-20120065291-A1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER, AND COMPOUND JSR CORPORATION (JP) 2012-03-15 US disclosed
US-20120064456-A1 PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS DOW GLOBAL TECHNOLOGIES LLC (US) 2012-03-15 US disclosed
EP-2428843-A1 Photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2012-03-14 EP disclosed
US-20120058429-A1 RADIATION-SENSITIVE RESIN COMPOSITION AND POLYMER JSR CORPORATION (JP) 2012-03-08 US disclosed
EP-2420891-A1 Compositions and processes for immersion lithography Rohm and Haas Electronic Materials LLC (US) 2012-02-22 EP disclosed
EP-2420892-A1 Compositions and processes for immersion lithography Rohm and Haas Electronic Materials LLC (US) 2012-02-22 EP disclosed
CN-102346371-A Photoresist compositions and methods of forming photolithographic patterns ROHM & HAAS ELECT MAT 2012-02-08 CN disclosed
US-8110339-B2 Multi-tone resist compositions MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2012-02-07 US disclosed
US-8110334-B2 Radiation-sensitive composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2012-02-07 US disclosed
US-20120028198-A1 UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD JSR CORPORATION (JP) 2012-02-02 US disclosed
CN-102304068-A Photoacid generators and photoresists comprising the same ROHM & HAAS ELECT MAT 2012-01-04 CN disclosed
CN-102279520-A Novel polymers and photoresist compositions 2011-12-14 CN disclosed
EP-2390722-A1 Photoresist compositions and methods of forming photolithographic patterns Rohm and Haas Electronic Materials LLC (US) 2011-11-30 EP disclosed
US-20110287361-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-11-24 US disclosed
CN-102253596-A Compositions and processes for immersion lithography ROHM & HAAS ELECT MAT 2011-11-23 CN disclosed
US-8053378-B2 Modified phenolic resin, epoxy resin composition containing the same, and prepreg containing the composition MITSUI CHEMICALS, INC. (JP) 2011-11-08 US disclosed
US-20110269070-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-11-03 US disclosed
US-20110269074-A1 NOVEL POLYMERS AND PHOTORESIST COMPOSITIONS ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-11-03 US disclosed
EP-2383611-A2 Photoacid generators and photoresists comprising same Rohm and Haas Electronic Materials LLC (US) 2011-11-02 EP disclosed
CN-102225924-A Photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2011-10-26 CN disclosed
US-8043786-B2 Acid generators, sulfonic acids, sulfonyl halides, and radiation sensitive resin compositions JSR CORPORATION (JP) 2011-10-25 US disclosed
US-20110257693-A1 HARD TISSUE ANCHORS AND DELIVERY DEVICES TC1 LLC 2011-10-20 US disclosed
US-20110255061-A1 COMPOSITIONS COMPRISING BASE-REACTIVE COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. (US) 2011-10-20 US disclosed
US-20110255069-A1 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-10-20 US disclosed
US-20110250542-A1 SULFONYL PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-10-13 US disclosed
US-20110250537-A1 CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-10-13 US disclosed
US-20110250538-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-10-13 US disclosed
CN-102212100-A Cholate photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2011-10-12 CN disclosed
EP-2372455-A2 Photoacid generators and photoresists comprising the same Rohm and Haas Electronic Materials LLC (US) 2011-10-05 EP disclosed
EP-2372456-A2 Novel polymers and photoresist compositions Rohm and Haas Electronic Materials LLC (US) 2011-10-05 EP disclosed
US-8026039-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2011-09-27 US disclosed
CN-102180822-A Sulfonyl photoacid generators and photoresists comprising same ROHM & HAAS ELECT MAT 2011-09-14 CN disclosed
EP-2360153-A2 Photoacid generators and photoresists comprising same Rohm and Haas Electronic Materials LLC (US) 2011-08-24 EP disclosed
CN-102161622-A Compound provided with phenol substituent, method for preparing the compound, and resist composition containing the compound KUMHO PETROCHEMICAL CO LTD 2011-08-24 CN disclosed
US-20110198730-A1 HYPERBRANCHED POLYMER SYNTHESIZING METHOD, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND SEMICONDUCTOR INTEGRATED CIRCUIT FABRICATION METHOD LION CORPORATION 2011-08-18 US disclosed
EP-1764647-B1 Use of a positive resist composition for immersion exposure, positive resist composition and immersion lithographic pattern-forming method using the same FUJIFILM CORP (JP) 2011-08-17 EP disclosed
US-7977442-B2 Radiation-sensitive composition, polymer and monomer JSR CORPORATION (JP) 2011-07-12 US disclosed
CN-102109760-A Resist pattern forming method JSR CORP 2011-06-29 CN disclosed
US-7968268-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-06-28 US disclosed
US-20110151378-A1 RADIATION-SENSITIVE RESIN COMPOSITION FOR LIQUID IMMERSION LITHOGRAPHY, POLYMER, AND RESIST PATTERN-FORMING METHOD JSR CORPORATION (JP) 2011-06-23 US disclosed
EP-2336826-A2 Sulfonyl photoacid generators and photoresists comprising same Rohm and Haas Electronic Materials LLC (US) 2011-06-22 EP disclosed
WO-2011072307-A2 COMPOSITIONS COMPRISING BASE-REACTIVE COMPONENT AND PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. (US) 2011-06-16 WO disclosed
US-20110143281-A1 COATING COMPOSITIONS FOR PHOTORESISTS ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-06-16 US disclosed
EP-2332960-A2 Cholate photoacid generators and photoresists comprising same Rohm and Haas Electronic Materials LLC (US) 2011-06-15 EP disclosed
CN-101084250-B Modified phenol resin, epoxy resin composition containing the same, and prepreg using the composition MITSUI CHEMICALS INC 2011-06-15 CN disclosed
CN-102099749-A Positive-type radiation-sensitive composition, and resist pattern formation method JSR CORP 2011-06-15 CN disclosed
US-20110123937-A1 COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-05-26 US disclosed
US-20110117489-A1 COMPOUND AND RADIATION-SENSITIVE COMPOSITION JSR CORPORATION (JP) 2011-05-19 US disclosed
CN-102053493-A Radiation-sensitive composition, protective film and inter layer insulating film, and method for forming the same JSR CORP 2011-05-11 CN disclosed
US-20110101503-A1 HYPERBRANCHED POLYMER SYNTHESIZING METHOD, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND SEMICONDUCTOR INTEGRATED CIRCUIT FABRICATION METHOD LION CORPORATION (JP) 2011-05-05 US disclosed
US-20110104612-A1 POSITIVE-TYPE RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD JSR CORPORATION (JP) 2011-05-05 US disclosed
CN-102037030-A Radiation-sensitive resin composition for liquid immersion exposure, polymer and method for forming resist pattern JSR CORP 2011-04-27 CN disclosed
EP-2309332-A1 POSITIVE-TYPE RADIATION-SENSITIVE COMPOSITION, AND RESIST PATTERN FORMATION METHOD JSR Corporation (JP) 2011-04-13 EP disclosed
US-20110076622-A1 POSITIVE RESIST COMPOSITION FOR IMMERSION EXPOSURE AND PATTERN-FORMING METHOD USING THE SAME FUJIFILM CORPORATION (JP) 2011-03-31 US disclosed
CN-1708728-B Radiation-sensitive resin composition JSR CORP 2011-03-16 CN disclosed
US-7906268-B2 Positive resist composition for immersion exposure and pattern-forming method using the same FUJIFILM CORPORATION (JP) 2011-03-15 US disclosed
US-20110053340-A1 METHOD OF FORMING A TRENCH ISOLATION JSR CORPORATION (JP) 2011-03-03 US disclosed
US-7897821-B2 Sulfonium compound JSR CORPORATION (JP) 2011-03-01 US disclosed
EP-2280308-A1 Processes for photolithography Rohm and Haas Electronic Materials, L.L.C. (US) 2011-02-02 EP disclosed
CN-101959908-A Radiation-sensitive composition, polymer and monomer JSR CORP 2011-01-26 CN disclosed
US-7871751-B2 Resist composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2011-01-18 US disclosed
CN-101943856-A Composition containing hetero-substituted carbocyclic aryl component for photolithography and preparing method thereof ROHM & HAAS ELECT MAT 2011-01-12 CN disclosed
CN-101943860-A Lithographic process ROHM & HAAS ELECT MAT 2011-01-12 CN disclosed
CN-101943857-A Compositions and processes for photolithography ROHM & HAAS ELECT MAT 2011-01-12 CN disclosed
CN-101943858-A Compositions comprising sulfonamide material and processes for photolithography ROHM & HAAS ELECT MAT 2011-01-12 CN disclosed
US-20110003257-A1 PROCESSES FOR PHOTOLITHOGRAPHY ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2011-01-06 US disclosed
US-20100331440-A1 RADIATION-SENSITIVE COMPOSITION, POLYMER AND MONOMER JSR CORPORATION (JP) 2010-12-30 US disclosed
EP-2267532-A1 Photoacid generators and photoresists comprising same Rohm and Haas Electronic Materials, L.L.C. (US) 2010-12-29 EP disclosed
CN-101930173-A Photic acid producing agent and its photoresist ROHM & HAAS ELECT MAT 2010-12-29 CN disclosed
US-20100323294-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-12-23 US disclosed
US-20100324329-A1 COMPOUND JSR CORPORATION (JP) 2010-12-23 US disclosed
US-20100323292-A1 RESIST PATTERN FORMATION METHOD, AND RESIN COMPOSITION CAPABLE OF INSOLUBILIZING RESIST PATTERN JSR CORPORATION (JP) 2010-12-23 US disclosed
US-20100310991-A1 POSITIVE RESIST COMPOSITION FOR IMMERSION EXPOSURE AND PATTERN-FORMING METHOD USING THE SAME FUJIFILM CORPORATION (JP) 2010-12-09 US disclosed
US-20100310987-A1 POLYMER, RADIATION-SENSITIVE COMPOSITION, MONOMER, AND METHOD OF PRODUCING COMPOUND JSR CORPORATION (JP) 2010-12-09 US disclosed
CN-101907828-A Radiation-ray sensitive composition, diaphragm, interlayer dielectric and their formation method JSR CORP 2010-12-08 CN disclosed
US-20100304290-A1 Compositions and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-12-02 US disclosed
CN-101182372-B Weather-resistant polycarbonate containing N,N'-oxalyl diphenylamine structure unit, manufacturing method therefore and products made thereby GEN ELECTRIC 2010-12-01 CN disclosed
CN-101900953-A Compositions comprising block polymer and processes for photolithography ROHM & HAAS ELECT MAT 2010-12-01 CN disclosed
US-20100297549-A1 Compositions comprising hetero-substituted carbocyclic aryl component and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-11-25 US disclosed
US-20100297550-A1 Compositions comprising sulfonamide material and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-11-25 US disclosed
US-20100297553-A1 POSITIVE RESIST COMPOSITION AND PATTERN-FORMING METHOD USING THE SAME FUJIFILM CORPORATION (JP) 2010-11-25 US disclosed
CN-1916760-B Acid generator, sulfonic acid derivative and radiation-sensitive resin composition JSR CORP 2010-10-13 CN disclosed
CN-1877450-B Coating compositions ROHM & HAAS ELECT MAT 2010-10-13 CN disclosed
US-7812105-B2 Compound, polymer, and radiation-sensitive composition JSR CORPORATION (JP) 2010-10-12 US disclosed
US-7811740-B2 comprising acrylate resin having a monocyclic or polycyclic alicyclic hydrocarbon structure, and a surfactant containing a fluorine compound or fluorine containing polyethers; resist pattern with good sensitivity, resolution, adhesion, and little in development defects; for an immersion exposure FUJIFILM CORPORATION (JP) 2010-10-12 US disclosed
US-20100248167-A1 PATTERN-FORMING METHOD JSR CORPORATION (JP) 2010-09-30 US disclosed
US-7803511-B2 resin containing acrylic ester monomers capable of increasing solubility in alkali developer by action of acid, acid generator, aryldicycloalkylsulfonium compounds, and nonionic surfactant; semiconductors, integrated circuits FUJIFILM CORPORATION (JP) 2010-09-28 US disclosed
US-20100239980-A1 NEGATIVE-WORKING RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME DAI NIPPON PRINTING CO., LTD. (JP) 2010-09-23 US disclosed
CN-1780813-B Acid generator, sulfonic acid, sulfonyl halide, and radiation-sensitive resin composition JSR CORP 2010-09-22 CN disclosed
EP-1586594-B1 ACRYLIC COPOLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORP (JP) 2010-09-15 EP disclosed
CN-101827813-A Sulfone compound, sulfonate and radiation-sensitive resin composition JSR CORP 2010-09-08 CN disclosed
US-20100221659-A1 COMPOUND, SALT, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2010-09-02 US disclosed
US-7781141-B2 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-08-24 US disclosed
US-7776506-B2 Coating compositions for photoresists ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-08-17 US disclosed
CN-1737685-B Composition and process for immersion lithography ROHM & HAAS ELECT MAT 2010-08-04 CN disclosed
US-20100190104-A1 METHOD FOR PATTERN FORMATION AND RESIN COMPOSITION FOR USE IN THE METHOD JSR CORPORATION (JP) 2010-07-29 US disclosed
CN-101788763-A compositions and processes for immersion lithography ROHM & HAAS ELECT MAT 2010-07-28 CN disclosed
US-20100178608-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2010-07-15 US disclosed
US-20100173245-A1 Compositions comprising carboxy component and processes for photolithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-07-08 US disclosed
US-20100167024-A1 NEGATIVE-TONE RADIATION-SENSITIVE COMPOSITION, CURED PATTERN FORMING METHOD, AND CURED PATTERN JSR CORPORATION (JP) 2010-07-01 US disclosed
EP-1253470-B1 Radiation-sensitive resin composition JSR CORP (JP) 2010-06-16 EP disclosed
EP-2189847-A2 Compositions comprising hetero-substituted carbocyclic aryl component and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2010-05-26 EP disclosed
EP-2189844-A2 Compositions comprising sulfonamide material and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2010-05-26 EP disclosed
EP-2189845-A2 Compositions and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2010-05-26 EP disclosed
EP-2189846-A1 Compositions comprising block polymer and processes for photolithography Rohm and Haas Electronic Materials LLC (US) 2010-05-26 EP disclosed
WO-2010054760-A1 POLYURETHANE DISPERSIONS FOR COATINGS HAVING BARRIER PROPERTIES BAYER MATERIALSCIENCE AG (DE) 2010-05-20 WO disclosed
EP-2186839-A1 Polyurethane dispersions for coating with barrier features Bayer MaterialScience AG (DE) 2010-05-19 EP disclosed
CN-1942825-B Resist composition MITSUBISHI GAS CHEMICAL CO 2010-05-12 CN disclosed
CN-1821869-B Photoresist compositions ROHM & HAAS ELECT MAT 2010-05-12 CN disclosed
US-7704668-B1 Photoresist compositions and methods and articles of manufacture comprising same ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2010-04-27 US disclosed
US-7704669-B2 Acrylic polymer and radiation-sensitive resin composition JSR CORPORATION (JP) 2010-04-27 US disclosed
CN-1732408-B Radiation-sensitive resin composition JSR CORP 2010-04-21 CN disclosed
US-20100068650-A1 POSITIVE-WORKING RADIATION-SENSITIVE COMPOSITION AND METHOD FOR RESIST PATTERN FORMATION USING THE COMPOSITION JSR CORPORATION (JP) 2010-03-18 US disclosed
EP-1225480-B1 Radiation-sensitive resin composition JSR CORP (JP) 2010-03-17 EP disclosed
US-20100047709-A1 RADIATION-SENSITIVE COMPOSITION MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2010-02-25 US disclosed
US-20100040977-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2010-02-18 US disclosed
US-20100028800-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2010-02-04 US disclosed
US-20100024683-A1 PHOSPHATE COMPOUND, METAL SALT THEREOF, DENTAL MATERIAL AND DENTAL COMPOSITION MITSUI CHEMICALS, INC. (JP) 2010-02-04 US disclosed
US-20100029057-A1 SILICONE RESIN COMPOSITION AND METHOD OF FORMING A TRENCH ISOLATION JSR CORPORATION (JP) 2010-02-04 US disclosed
WO-2010005428-A1 RESIST SENSITIZER MASSACHUSETTS INSTITUTE OF TECHNOLOGY (MIT) (US) 2010-01-14 WO disclosed
US-20100009289-A1 RESIST SENSITIZER MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2010-01-14 US disclosed
US-20100003615-A1 UPPER LAYER-FORMING COMPOSITION AND PHOTORESIST PATTERNING METHOD JSR CORPORATION (JP) 2010-01-07 US disclosed
EP-1521794-B1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM SABIC INNOVATIVE PLASTICS IP (NL) 2010-01-06 EP disclosed
US-7638261-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2009-12-29 US disclosed
US-20090318652-A1 NOVEL COMPOUND, POLYMER, AND RESIN COMPOSITION JSR CORPORATION (JP) 2009-12-24 US disclosed
US-20090317742-A1 Photosensitive composition, method for forming pattern, and method for manufacturing semiconductor device NEC ELECTRONICS CORPORATION (JP) 2009-12-24 US disclosed
EP-1238972-B1 Novel carbazole derivative and chemically amplified radiation-sensitive resin composition JSR CORP (JP) 2009-12-16 EP disclosed
US-20090305161-A1 LIQUID IMMERSION LITHOGRAPHY JSR CORPORATION (JP) 2009-12-10 US disclosed
EP-2131240-A1 POSITIVE-WORKING RADIATION-SENSITIVE COMPOSITION AND METHOD FOR RESIST PATTERN FORMATION USING THE COMPOSITION JSR Corporation (JP) 2009-12-09 EP disclosed
EP-2128706-A1 RESIST PATTERN FORMATION METHOD, AND RESIN COMPOSITION CAPABLE OF INSOLUBILIZING RESIST PATTERN JSR Corporation (JP) 2009-12-02 EP disclosed
EP-1270553-B1 Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition JSR CORP (JP) 2009-11-18 EP disclosed
US-20090280433-A1 RADIATION-SENSITIVE COMPOSITION AND PROCESS FOR PRODUCING LOW-MOLECULAR COMPOUND FOR USE THEREIN JSR CORPORATION (JP) 2009-11-12 US disclosed
US-20090274977-A1 COMPOUND AND RADIATION-SENSITIVE COMPOSITION JSR CORPORATION (JP) 2009-11-05 US disclosed
CN-100549051-C Photoresist polymer composition JSR CORP (JP) 2009-10-14 CN disclosed
US-7592126-B2 Positive resist composition and pattern forming method using the resist composition FUJIFILM CORPORATION (JP) 2009-09-22 US disclosed
EP-2100870-A1 COMPOUND AND RADIATION-SENSITIVE COMPOSITION JSR Corporation (JP) 2009-09-16 EP disclosed
CN-101533224-A Radiation-sensitive resin composition JSR CORP (JP) 2009-09-16 CN disclosed
CN-101528653-A Radiation-sensitive composition MITSUBISHI GAS CHEMICAL CO (JP) 2009-09-09 CN disclosed
CN-101526737-A Immersion lithography compositions and immersion lithography method ROHM & HAAS ELECT MAT 2009-09-09 CN disclosed
CN-100533271-C Photoresist compositions ROHM & HAAS ELECT MAT (US) 2009-08-26 CN disclosed
CN-101516970-A Silicone resin composition and method for forming trench isolation JSR CORP (JP) 2009-08-26 CN disclosed
US-20090202945-A1 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2009-08-13 US disclosed
EP-2088467-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2009-08-12 EP disclosed
EP-2080750-A1 RADIATION-SENSITIVE COMPOSITION Mitsubishi Gas Chemical Company, Inc. (JP) 2009-07-22 EP disclosed
CN-100503666-C Hyperbranched polymer, method for producing same, and resist composition containing same LION CORP (JP) 2009-06-24 CN disclosed
US-20090148790-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR CORPORATION (JP) 2009-06-11 US disclosed
EP-2065428-A1 SILICONE RESIN COMPOSITION AND METHOD FOR FORMING TRENCH ISOLATION JSR Corporation (JP) 2009-06-03 EP disclosed
EP-2060949-A1 RADIATION-SENSITIVE COMPOSITION AND PROCESS FOR PRODUCING LOW-MOLECULAR COMPOUND FOR USE THEREIN JSR Corporation (JP) 2009-05-20 EP disclosed
CN-100489027-C Flame-retardant epoxy resin composition and phosphorus-containing compound CHANGCHUN ARTIFICIAL RESIN FAC (CN) 2009-05-20 CN disclosed
US-20090123869-A1 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2009-05-14 US disclosed
EP-2058318-A1 PHOSPHATE ESTER COMPOUND, METAL SALT THEREOF, DENTAL MATERIAL, AND DENTAL COMPOSITION Mitsui Chemicals, Inc. (JP) 2009-05-13 EP disclosed
US-7531286-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2009-05-12 US disclosed
US-20090117489-A1 Compositons and processes for immersion lithography ROHM AND HAAS ELECTRONICS MATERIALS LLC (US) 2009-05-07 US disclosed
EP-2056162-A1 Compositions and processes for immersion lithography Rohm and Haas Electronic Materials LLC (US) 2009-05-06 EP disclosed
EP-2003148-A9 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2009-04-22 EP disclosed
US-7521169-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2009-04-21 US disclosed
CN-100476583-C Ring sulfonium and sulfonium oxide and photoacid generator and photoetching glue containing ring sulfonium and sulfonium oxide SHIPRAY CO (US) 2009-04-08 CN disclosed
CN-100475912-C Halogen-free resin composition CHANG CHUN PLASTICS CO LTD (CN) 2009-04-08 CN disclosed
US-7510817-B2 Photoresist polymer compositions JSR CORPORATION (JP) 2009-03-31 US disclosed
CN-101395189-A Fluorine-containing polymer, method for purifying same, and radiation-sensitive resin composition JSR CORP (JP) 2009-03-25 CN disclosed
EP-1840650-B1 Positive type radiation-sensitive resin composition JSR CORP (JP) 2009-03-18 EP disclosed
US-20090069521-A1 Novel Compound, Polymer, and Radiation-Sensitive Composition JSR CORPORATION (JP) 2009-03-12 US disclosed
WO-2009032890-A1 MULTI-TONE RESIST COMPOSITIONS MASSACHUSETTS INSTITUTE OF TECHNOLOGY (MIT) (US) 2009-03-12 WO disclosed
US-20090068589-A1 MULTI-TONE RESIST COMPOSITIONS MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2009-03-12 US disclosed
US-7498115-B2 Photoresist compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2009-03-03 US disclosed
US-7488566-B2 Positive type radiation-sensitive resin composition JSR CORPORATION (JP) 2009-02-10 US disclosed
CN-100457749-C Sulfonium salt compound, radiation-sensitive acid generator, and positive-type radiation-sensitive resin composition JSR CORP (JP) 2009-02-04 CN disclosed
CN-100457823-C Epoxy resin composition, cured article obtained from the epoxy resin, and semiconductor device obtained thereof MITSUI CHEMICALS INC (JP) 2009-02-04 CN disclosed
US-7482107-B2 Photoresist composition SHIPLEY COMPANY, L.L.C. (US) 2009-01-27 US disclosed
EP-1652866-B1 ACRYLIC POLYMERS AND RADIATION-SENSITIVE RESIN COMPOSITIONS JSR CORP (JP) 2008-12-24 EP disclosed
EP-2003148-A2 FLUORINE-CONTAINING POLYMER, PURIFICATION METHOD, AND RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2008-12-17 EP disclosed
CN-101313246-A Radiation-sensitive resin composition JSR CORP (JP) 2008-11-26 CN disclosed
EP-1640804-B1 Positive-tone radiation-sensitive resin composition JSR CORP (JP) 2008-11-19 EP disclosed
US-7452655-B2 Acrylic copolymer and radiation-sensitive resin composition JSR CORPORATION (JP) 2008-11-18 US disclosed
CN-101256355-A Composition for immersion lithography and immersion lithography method ROHM & HAAS ELECT MAT (US) 2008-09-03 CN disclosed
EP-1961739-A1 NOVEL COMPOUND, POLYMER, AND RESIN COMPOSITION JSR Corporation (JP) 2008-08-27 EP disclosed
US-20080193872-A1 Applying on photoresist, a photoactive component, and material(s) having a water contact angle changeable by base treatment; activation by immersion exposing to radiation; reduced leaching; pentafluoroacrylate-ethyl cyclopentyl methacrylate-trimethylolpropane triacrylate terpolymer ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2008-08-14 US disclosed
US-20080187859-A1 Radiation-Sensitive Resin Composition JSR CORPORATION (JP) 2008-08-07 US disclosed
EP-1953593-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2008-08-06 EP disclosed
EP-1953595-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2008-08-06 EP disclosed
EP-1950610-A1 COMPOSITION FOR FORMING UPPER FILM AND METHOD FOR FORMING PHOTORESIST PATTERN JSR Corporation (JP) 2008-07-30 EP disclosed
CN-101215421-A Radiation-sensitive resin composition JSR CORP (JP) 2008-07-09 CN disclosed
US-20080160449-A1 Photoresist polymer having nano-smoothness and etching resistance, and resist composition LION CORPORATION (JP) 2008-07-03 US disclosed
US-20080153031-A1 Resist composition MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2008-06-26 US disclosed
CN-101182372-A Weather-resistant polycarbonate containing N,N'-oxalyl diphenylamine structure unit, manufacturing method therefore and products made thereby GEN ELECTRIC (US) 2008-05-21 CN disclosed
US-7371503-B2 Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin composition JSR CORPORATION (JP) 2008-05-13 US disclosed
US-7371505-B2 Photosensitive composition and method for forming pattern using the same FUJIFILM CORPORATION (JP) 2008-05-13 US disclosed
EP-1918778-A2 Compositions and processes for immersion lithography Rohm and Haas Electronic Materials LLC (US) 2008-05-07 EP disclosed
EP-1897869-A1 NOVEL COMPOUND, POLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2008-03-12 EP disclosed
CN-100374506-C Radiation-sensitive resin composition JSR CORP (JP) 2008-03-12 CN disclosed
CN-100374475-C Acrylic polymer and radiation-sensitive resin composition JSR CORP (JP) 2008-03-12 CN disclosed
US-7335457-B2 Positive-tone radiation-sensitive resin composition JSR CORPORATION (JP) 2008-02-26 US disclosed
US-20080044667-A1 Modified Phenolic Resin, Epoxy Resin Composition Containing the Same, and Prepreg Containing the Composition MITSUI CHEMICALS, INC. (JP) 2008-02-21 US disclosed
CN-100366659-C Weather-resistant polycarbonate containing oxanilide structural unit, manufacturing method thereof and product prepared from same GEN ELECTRIC (US) 2008-02-06 CN disclosed
US-7326518-B2 Photoresist compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2008-02-05 US disclosed
US-7326516-B2 Resist composition for immersion exposure and pattern formation method using the same FUJIFILM CORPORATION (JP) 2008-02-05 US disclosed
US-20080026314-A1 Silane Compound, Polysiloxane, and Radiation-Sensitive Resin Composition JSR CORPORATION (JP) 2008-01-31 US disclosed
US-7323284-B2 Negative type radiation sensitive resin composition JSR CORPORATION (JP) 2008-01-29 US disclosed
US-7314701-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2008-01-01 US disclosed
CN-101084250-A Modified phenol resin, epoxy resin composition containing the same, and prepreg using the composition MITSUI CHEMICALS INC (JP) 2007-12-05 CN disclosed
US-20070269754-A1 Acrylic Polymer and Radiation-Sensitive Resin Composition JSR CORPORATION (JP) 2007-11-22 US disclosed
US-20070269735-A1 Radiation-Sensitive Resin Composition JSR CORPORATION (JP) 2007-11-22 US disclosed
US-7297461-B2 Radiation sensitive resin composition JSR CORPORATION (JP) 2007-11-20 US disclosed
US-20070254247-A1 Radiation-sensitive resin composition YAMAMOTO MASAFUMI 2007-11-01 US disclosed
US-7288359-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2007-10-30 US disclosed
US-20070248911-A1 Pattern forming method and bilayer film IWASAWA HARUO 2007-10-25 US disclosed
EP-1840650-A1 Positive type radiation-sensitive resin composition JSR Corporation (JP) 2007-10-03 EP disclosed
US-7273690-B2 Positive resist composition for immersion exposure and method of pattern formation with the same FUJIFILM CORPORATION (JP) 2007-09-25 US disclosed
CN-100336836-C Acrylic copolymer and radiation-sensitive resin composition JSR CORP (JP) 2007-09-12 CN disclosed
EP-1641848-B1 PHOTORESIST POLYMER COMPOSITIONS JSR CORP (JP) 2007-08-22 EP disclosed
CN-1333014-C Halogen-free resin composition CHANGCHU ARTIFICIAL RESIN FACT (CN) 2007-08-22 CN disclosed
US-7258962-B2 Positive-tone radiation-sensitive resin composition JSR CORPORATION (JP) 2007-08-21 US disclosed
CN-101008782-A Coating composition for photoresist ROHM & HAAS ELECT MAT (US) 2007-08-01 CN disclosed
US-7244549-B2 Pattern forming method and bilayer film JSR CORPORATION (JP) 2007-07-17 US disclosed
US-20070160930-A1 Coating compositions for photoresists ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2007-07-12 US disclosed
EP-1806621-A1 Coating compositions for photoresists Rohm and Haas Electronic Materials LLC (US) 2007-07-11 EP disclosed
US-20070148585-A1 Hyperbranched polymer, production method therefor and resist composition containing hyperbranched polymer LION CORPORATION. 2007-06-28 US disclosed
US-7217492-B2 Onium salt compound and radiation-sensitive resin composition JSR CORPORATION (JP) 2007-05-15 US disclosed
CN-1310089-C Photoetching adhesive composition SHIPLEY CO LLC (US) 2007-04-11 CN disclosed
US-7202016-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2007-04-10 US disclosed
CN-1942825-A Resist composition MITSUBISHI GAS CHEMICAL CO (JP) 2007-04-04 CN disclosed
US-20070072112-A1 Coating compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2007-03-29 US disclosed
EP-1764647-A2 Positive resist composition for immersion exposure and pattern-forming method using the same FUJIFILM Corporation (JP) 2007-03-21 EP disclosed
US-20070054214-A1 Acid generators, sulfonic acids, sulfonyl halides, and radiation sensitive resin compositions JSR CORPORATION (JP) 2007-03-08 US disclosed
EP-1757980-A1 Radiation sensitive resin composition JSR Corporation (JP) 2007-02-28 EP disclosed
US-20070042292-A1 Radiation sensitive resin composition JSR CORPORATION (JP) 2007-02-22 US disclosed
US-20070042290-A1 resin containing acrylic ester monomers capable of increasing solubility in alkali developer by action of acid, acid generator, aryldicycloalkylsulfonium compounds, and nonionic surfactant; semiconductors, integrated circuits FUJI PHOTO FILM CO., LTD. 2007-02-22 US disclosed
CN-1916760-A Acid generator, sulfonic acid derivative and radiation-sensitive resin composition JSR CORP (JP) 2007-02-21 CN disclosed
CN-1898281-A Hyperbranched polymer, method for producing same, and resist composition containing same LION CORP (JP) 2007-01-17 CN disclosed
EP-1739485-A1 RESIST COMPOSITION MITSUBISHI GAS CHEMICAL COMPANY, INC. (JP) 2007-01-03 EP disclosed
EP-1736829-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2006-12-27 EP disclosed
CN-1886410-A Silane compound, polysiloxane and radiation-sensitive resin composition JSR CORP (JP) 2006-12-27 CN disclosed
US-7153630-B2 Resist with reduced line edge roughness MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2006-12-26 US disclosed
CN-1881085-A Compositions and methods for immersion lithography ROHM & HAAS ELECT MAT (US) 2006-12-20 CN disclosed
CN-1877450-A Coating compositions ROHM & HAAS ELECT MAT (US) 2006-12-13 CN disclosed
CN-1288499-C Radiation-sensitive resin composition JSR CORP (JP) 2006-12-06 CN disclosed
US-7144675-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2006-12-05 US disclosed
EP-1726608-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2006-11-29 EP disclosed
CN-1285636-C Process for producing oxyalkylene derivative MITSUI CHEMICALS INC (JP) 2006-11-22 CN disclosed
US-20060257781-A1 Photoacid generator, and a polymer with units of 2-alkyladamantyl (meth)acrylate, 3-hydroxyadamantyl (meth)acrylate, 1-alkylcyclopentyl (meth)acrylate or 7-oxo-3,8-methano-6-oxabicyclo(3.2.1)octan-4-yl (meth)acrylate, made with a chain transfer agent; e.g. RAFT polymer; narrow polydispersity FREESLATE, INC. 2006-11-16 US disclosed
EP-1720075-A1 Coating compositions Rohm and Haas Electronic Materials, L.L.C. (US) 2006-11-08 EP disclosed
EP-1720064-A1 Radiation-sensitive resin composition JSR Corporation (JP) 2006-11-08 EP disclosed
EP-1720072-A1 Compositons and processes for immersion lithography Rohm and Haas Electronic Materials, L.L.C. (US) 2006-11-08 EP disclosed
US-20060246373-A1 Applying on photoresist, a photoactive component, and material(s) having a water contact angle changeable by base treatment; activation by immersion exposing to radiation; reduced leaching; pentafluoroacrylate-ethyl cyclopentyl methacrylate-trimethylolpropane triacrylate terpolymer ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2006-11-02 US disclosed
US-20060234153-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2006-10-19 US disclosed
US-20060234154-A1 Mixture containing acid generator and free radical catalyst; acrylated ester monomer JSR CORPORATION (JP) 2006-10-19 US disclosed
US-20060228647-A1 Photoresist composition SHIPLEY COMPANY, L.L.C. (US) 2006-10-12 US disclosed
CN-1845941-A Photoresist polymer compositions JSR CORP (JP) 2006-10-11 CN disclosed
US-20060223001-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2006-10-05 US disclosed
US-20060223010-A1 Positive type radiation-sensitive resin composition JSR CORPORATION (JP) 2006-10-05 US disclosed
CN-1842551-A Acrylic polymers and radiation-sensitive resin compositions JSR CORP (JP) 2006-10-04 CN disclosed
CN-1837957-A Photoresist composition ROHM & HAAS ELECT MAT (US) 2006-09-27 CN disclosed
US-20060210922-A1 Positive resist composition and pattern forming method using the resist composition FUJI PHOTO FILM CO., LTD. 2006-09-21 US disclosed
EP-1703322-A2 Positive resist composition and pattern forming method using the resist composition FUJI PHOTO FILM CO., LTD. (JP) 2006-09-20 EP disclosed
CN-1276303-C Acid generator and radiation-sensitive resin composition JSR CORP (JP) 2006-09-20 CN disclosed
US-7108955-B2 Polysiloxane, process for production thereof and radiation-sensitive resin composition JSR CORPORATION (JP) 2006-09-19 US disclosed
US-7105269-B2 Copolymer, polymer mixture, and radiation-sensitive resin composition JSR CORPORATION (JP) 2006-09-12 US disclosed
US-20060199100-A1 Positive resist composition and pattern-forming method using the same FUJI PHOTO FILM CO., LTD. 2006-09-07 US disclosed
EP-1698645-A1 HYPERBRANCHED POLYMER, PROCESS FOR PRODUCING THE SAME AND RESIST COMPOSITION CONTAINING THE HYPERBRANCHED POLYMER Lion Corporation (JP) 2006-09-06 EP disclosed
EP-1011029-B1 Radiation-sensitive resin composition JSR CORP (JP) 2006-08-30 EP disclosed
US-20060188812-A1 Phenolic hydroxyl group-containing copolymer and radiation-sensitive resin composition JSR CORPORATION (JP) 2006-08-24 US disclosed
CN-1821869-A Photoresist compositions ROHM & HAAS ELECT MAT (US) 2006-08-23 CN disclosed
US-20060172224-A1 Photoresist compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2006-08-03 US disclosed
US-20060172223-A1 Photoresist compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2006-08-03 US disclosed
US-20060172225-A1 Photoresist compositions ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2006-08-03 US disclosed
EP-1686424-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2006-08-02 EP disclosed
CN-1811595-A Photoresist compositions ROHM & HAAS ELECT MAT (US) 2006-08-02 CN disclosed
US-7084194-B2 Halogen-free resin composition CHANG CHUN PLASTICS CO., LTD. (TW) 2006-08-01 US disclosed
US-20060166138-A1 Radiation-sensitive resin composition JSR CORPORATION 2006-07-27 US disclosed
EP-1140827-B1 SYNTHESIS OF PHENOLIC MONOMERS CONTAINING IMIDE OR DIIMIDE MOIETIES AND HIGH HEAT CARBONATE POLYMERS PREPARED THEREFROM GEN ELECTRIC (US) 2006-07-26 EP disclosed
US-7078148-B2 Photoresist with improved sensitivity and resolution to deep ultraviolet rays/excimer lasers; semiconductors; integrated circuits JSR CORPORATION (JP) 2006-07-18 US disclosed
EP-1679314-A1 SILANE COMPOUND, POLYSILOXANE AND RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2006-07-12 EP disclosed
US-20060141383-A1 Sulfonium salts, radiation- sensitive acid generators, and positive radiator-sensitive resin compositions JSR CORPORATION (JP) 2006-06-29 US disclosed
US-7060414-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2006-06-13 US disclosed
EP-1666968-A1 Photoresist compositions Rohm and Haas Electronic Materials, L.L.C. (US) 2006-06-07 EP disclosed
CN-1781985-A Epoxy resin composition, cured article obtained from the epoxy resin, and semiconductor device obtained thereof MITSUI CHEMICALS INC (JP) 2006-06-07 CN disclosed
EP-1662321-A1 Photoresist compositions Rohm and Haas Electronic Materials, L.L.C. (US) 2006-05-31 EP disclosed
EP-1662320-A1 Photoresist compositions Rohm and Haas Electronic Materials, L.L.C. (US) 2006-05-31 EP disclosed
CN-1780813-A Acid generator, sulfonic acid, sulfonyl halide, and radiation-sensitive resin composition JSR CORP (JP) 2006-05-31 CN disclosed
US-20060105272-A1 Compositions and processes for immersion lithography ROHM AND HAAS ELECTRONIC MATERIALS LLC (US) 2006-05-18 US disclosed
EP-1652866-A1 ACRYLIC POLYMERS AND RADIATION-SENSITIVE RESIN COMPOSITIONS JSR Corporation (JP) 2006-05-03 EP disclosed
US-20060078820-A1 Resist with reduced line edge roughness MASS INSTITUTE OF TECHNOLOGY (MIT) (US) 2006-04-13 US disclosed
US-20060078823-A1 Positive resist composition and pattern-forming method using the same FUJI PHOTO FILM CO., LTD. 2006-04-13 US disclosed
US-20060078821-A1 A caroboxyalkylanthracene based compound, a hydroxy or alkoxystyrene polymer, and a sulfonimide compound as photoacid generator; low sublimation properties and excellent compatibility with other components; exhibits optimum controllability of radiation transmittance; microfabrication JSR CORPORATION (JP) 2006-04-13 US disclosed
EP-1645908-A1 Positive resist composition and pattern-forming method using the same FUJI PHOTO FILM CO., LTD. (JP) 2006-04-12 EP disclosed
US-7026093-B2 Photoresist compositions SHIPLEY COMPANY, L.L.C. (US) 2006-04-11 US disclosed
US-20060074139-A1 Acrylic copolymer and radiation-sensitive resin composition JSR CORPORATION (JP) 2006-04-06 US disclosed
EP-1641848-A1 PHOTORESIST POLYMER COMPOSITIONS JSR Corporation (JP) 2006-04-05 EP disclosed
EP-1641849-A1 PHOTORESIST POLYMERS AND COMPOSITIONS HAVING ACRYLIC- OR METHACRYLIC-BASED POLYMERIC RESIN PREPARED BY A LIVING FREE RADICAL PROCESS Symyx Technologies, Inc. (US) 2006-04-05 EP disclosed
CN-1249790-C Ray sensitive compasition for preparing insulation film and display JSR CORP (JP) 2006-04-05 CN disclosed
CN-1249126-C Polysiloxane, process for production thereof and radiation-sensitive resin composition JSR CORP (JP) 2006-04-05 CN disclosed
EP-1640804-A2 Positive-tone radiation-sensitive resin composition JSR Corporation (JP) 2006-03-29 EP disclosed
US-7005231-B2 Positive type radiosensitive composition and method for forming pattern JSR CORPORATION (JP) 2006-02-28 US disclosed
US-7005230-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2006-02-28 US disclosed
CN-1737685-A Composition and process for immersion lithography ROHM & HAAS ELECT MAT (US) 2006-02-22 CN disclosed
CN-1738813-A Sulfonium salt compound, radiation-sensitive acid generator, and positive-type radiation-sensitive resin composition JSR CORP (JP) 2006-02-22 CN disclosed
US-RE38980-E1 Photoresist compositions SHIPLEY COMPANY, L.L.C. (US) 2006-02-14 US disclosed
CN-1732408-A Radiation-sensitive resin composition JSR CORP (JP) 2006-02-08 CN disclosed
CN-1238766-C Positive type radiation-sensitive composition and method for forming pattern JSR CORP (JP) 2006-01-25 CN disclosed
EP-1085379-B1 Radiation-sensitive resin composition JSR CORP (JP) 2006-01-04 EP disclosed
EP-1612604-A2 Compositions and processes for immersion lithography Rohm and Haas Electronic Materials, L.L.C. (US) 2006-01-04 EP disclosed
US-20050287473-A1 Photosensitive composition and method for forming pattern using the same FUJI PHOTO FILM CO., LTD. 2005-12-29 US disclosed
CN-1714110-A Acrylic copolymer and radiation-sensitive resin composition JSR CORP (JP) 2005-12-28 CN disclosed
CN-1708728-A Radiation-sensitive resin composition JSR CORP (JP) 2005-12-14 CN disclosed
EP-1602975-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2005-12-07 EP disclosed
EP-1600437-A1 ACID GENERATORS, SULFONIC ACIDS, SULFONYL HALIDES, AND RADIATION-SENSITIVE RESIN COMPOSITIONS JSR Corporation (JP) 2005-11-30 EP disclosed
US-6964840-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2005-11-15 US disclosed
US-20050244747-A1 Positive-tone radiation-sensitive resin composition JSR CORPORATION (JP) 2005-11-03 US disclosed
EP-1586594-A1 ACRYLIC COPOLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2005-10-19 EP disclosed
EP-1586570-A1 SULFONIUM SALTS, RADIATION-SENSITIVE ACID GENERATORS, AND POSITIVE RADIATION-SENSITIVE RESIN COMPOSITIONS JSR Corporation (JP) 2005-10-19 EP disclosed
CN-1223622-C Curing agent composition for epoxy resin, epoxy resin composition and use thereof MITSUI CHEMICALS INC (JP) 2005-10-19 CN disclosed
US-20050214680-A1 Radiation-sensitive resin composition MIYAJI MASAAKI 2005-09-29 US disclosed
EP-1580598-A2 Positive resist composition for immersion exposure and pattern-forming method using the same Fuji Photo Film Co. Ltd. (JP) 2005-09-28 EP disclosed
US-20050208419-A1 Fluoropolymer containing unsaturated monomer with a adamantyl, decalin, norbornyl, cedrol , cyclohexyl, cycloheptyl, cyclooctyl , a cyclodecanyl, cyclododecanyl and/or tricyclodecanyl group; sulfonium type compound generates acid upon exposure to actinic radiation; semiconductor, integrated circuits FUJI PHOTO FILM CO., LTD. 2005-09-22 US disclosed
CN-1668670-A Weather-resistant polycarbonate containing oxanilide structural unit, manufacturing method thereof and product prepared from same GEN ELECTRIC (US) 2005-09-14 CN disclosed
EP-1035436-B1 Resist pattern formation method JSR CORP (JP) 2005-09-07 EP disclosed
US-6936398-B2 Resist with reduced line edge roughness MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2005-08-30 US disclosed
US-20050186505-A1 Positive resist composition for immersion exposure and method of pattern formation with the same FUJI PHOTO FILM CO., LTD. 2005-08-25 US disclosed
US-20050186503-A1 Resist composition for immersion exposure and pattern formation method using the same FUJI PHOTO FILM CO., LTD. 2005-08-25 US disclosed
EP-1566693-A2 Resist composition for immersion exposure and pattern forming method using the same FUJI PHOTO FILM CO., LTD. (JP) 2005-08-24 EP disclosed
US-6933094-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2005-08-23 US disclosed
US-20050171226-A1 Radiation sensitive resin composition JSR CORPORATION (JP) 2005-08-04 US disclosed
EP-1557718-A1 RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2005-07-27 EP disclosed
US-20050158657-A1 Radiation-sensitive resin composition SUZUKI AKI (JP) 2005-07-21 US disclosed
US-6911503-B2 A curing formualtion for an epoxy resin, containing a curing agent, selected from the group: a phenol compound having two or more hydroxy groups and a phenolic compound with 2 or more acylated hydroxy groups; phosphazenium cure promoter MITSUI CHEMICALS, INC. (JP) 2005-06-28 US disclosed
US-6908722-B2 Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition JSR CORPORATION (JP) 2005-06-21 US disclosed
US-6900269-B2 Halogen-free resin composition CHANG CHUN PLASTICS CO., LTD. (TW) 2005-05-31 US disclosed
US-6899989-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2005-05-31 US disclosed
US-20050095527-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2005-05-05 US disclosed
EP-0853080-B1 Oxanilide U-V absorbers GEN ELECTRIC (US) 2005-05-04 EP disclosed
US-20050079443-A1 Radiation-sensitive polymer composition and pattern forming method using the same SHIN-ETSU CHEMICAL CO., LTD. 2005-04-14 US disclosed
EP-1521794-A1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM GENERAL ELECTRIC COMPANY (US) 2005-04-13 EP disclosed
CN-1196730-C Preparation of Copolycarbonates by Solid State Polymerization GEN ELECTRIC (US) 2005-04-13 CN disclosed
US-20050053861-A1 Onium salt compound and radiation-sensitive resin composition JSR CORPORATION (JP) 2005-03-10 US disclosed
CN-1592764-A Method for producing organic compound, epoxy resin composition, cured product of the epoxy resin, and semiconductor device formed using the epoxy resin MITSUI CHEMICALS INC (JP) 2005-03-09 CN disclosed
EP-1099691-B1 N-Sulfonyloxyimide compound and radiation-sensitive resin composition using the same JSR CORP (JP) 2005-03-02 EP disclosed
CN-1580127-A Halogen-free resin composition CHANGCHU ARTIFICIAL RESIN FACT (CN) 2005-02-16 CN disclosed
CN-1580128-A Halogen-free resin composition CHANGCHUN ARTIFICIAL RESIN FAC (CN) 2005-02-16 CN disclosed
CN-1580120-A Flame-retardant epoxy resin composition and phosphorus-containing compound CHANGCHUN ARTIFICIAL RESIN FAC (CN) 2005-02-16 CN disclosed
US-6849374-B2 Photoacid generators and photoresists comprising same SHIPLEY COMPANY, L.L.C. (US) 2005-02-01 US disclosed
US-6846607-B2 Carbazole derivative and chemically amplified radiation-sensitive resin composition JSR CORPORATION (JP) 2005-01-25 US disclosed
US-6846895-B2 Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition JSR CORPORATION (JP) 2005-01-25 US disclosed
WO-2005003198-A1 PHOTORESIST POLYMER COMPOSITIONS JSR CORPORATION (JP) 2005-01-13 WO disclosed
WO-2005000923-A1 PHOTORESIST POLYMERS AND COMPOSITIONS HAVING ACRYLIC- OR METHACRYLIC-BASED POLYMERIC RESIN PREPARED BY A LIVING FREE RADICAL PROCESS SYMYX TECHNOLOGIES, INC. (US) 2005-01-06 WO disclosed
US-6838225-B2 Radiation-sensitive resin composition JSR CORPORATION (JP) 2005-01-04 US disclosed
US-20040260039-A1 Process for producing organic compound epoxy resin composition, cured article obtained from the epoxy resin, and semiconductor device obtained with epoxy resin MITSUI CHEMICALS, INC. (JP) 2004-12-23 US disclosed
US-6830868-B2 Useful as a chemically amplified resist responding to active radiation, for example ultraviolet rays such as a KrF excimer laser, ArF excimer laser, and F2 excimer laser JSR CORPORATION (JP) 2004-12-14 US disclosed
US-20040241580-A1 Radiation-sensitive resin composition NISHIMURA YUKIO (JP) 2004-12-02 US disclosed
US-6824954-B2 DIHALOMETHYL SULFONYLOXIME COMPOUNDS; FOR EXAMPLE, 2,2-DIFLUORO-2-METHYLACETOPHENONE-O-METHYLSULFONYLOXIME; HEAT STABILITY AND STORAGE STABILITY; SENSITIVE TO FAR ULTRAVIOLET RADIATION OR ELECTRON BEAMS; RESISTS JSR CORPORATION (JP) 2004-11-30 US disclosed
US-6821705-B2 USED AS CHEMICALLY AMPLIFIED RESIST, EXHIBITS HIGH SENSITIVITY, RESOLUTION, RADIATION TRANSMITTANCE, AND SURFACE SMOOTHNESS, AND IS FREE FROM THE PROBLEM OF PARTIAL INSOLUBLIZATION DURING OVEREXPOSURE JSR CORPORATION (JP) 2004-11-23 US disclosed
US-6811961-B2 PHOTORESIST RELEIF IMAGES; MIXTURE OF RESIN AND ACID GENERATORS SHIPLEY COMPANY, L.L.C. 2004-11-02 US disclosed
EP-0901043-B1 Radiation-sensitive resin composition JSR CORP (JP) 2004-10-27 EP disclosed
US-20040197698-A1 Positive type radiosensitive composition and method for forming pattern JSR CORPORATION (JP) 2004-10-07 US disclosed
US-6800419-B2 FOR USE AS CHEMICALLY-AMPLIFIED RESIST FOR MICROFABRICATION UTILIZING DEEP ULTRAVIOLET RAYS AND EXHIBITS EXCELLENT FILM THICKNESS UNIFORMITY AND STORAGE STABILITY JSR CORPORATION (JP) 2004-10-05 US disclosed
US-6800414-B2 FLUOROPOLYMER JSR CORPORATION (JP) 2004-10-05 US disclosed
US-6797453-B2 WHICH HAS RESOLUTION HIGH ENOUGH TO FORM THROUGH HOLE OR U-SHAPED DEPRESSION; COMPRISES SILANE COUPLING AGENT; FOR ELECTROLUMINESCENT LIQUID CRYSTAL DISPLAYS JSR CORPORATION (JP) 2004-09-28 US disclosed
US-6797450-B2 ALKALI-SOLUBLE RESIN HAVING NO EPOXY GROUP AND A 1,2-QUINONEDIAZIDE COMPOUND JSR CORPORATION (JP) 2004-09-28 US disclosed
US-6783912-B2 POSITIVE OR NEGATIVE AMPLIFICATION SHIPLEY COMPANY, L.L.C. 2004-08-31 US disclosed
US-20040158023-A1 Halogen-free resin composition CHANG CHUN PLASTICS CO., LTD. (TW) 2004-08-12 US disclosed
US-6770780-B1 QUATERNIZATION OF T-BUTYL BROMOACETATE WITH TRI(N-BUTYL)PHOSPHINE TO FORM PHOSPHONIUM SALT; REACTING WITH BASE TO FORM PHOSPHORUS YLIDE; FORMING 2,4,6-TRIS(3', 5'-DI-T-BUTYL-4'-HYDROXYBENZYL)METHYL-STYRENE; HYDROLYSIS JSR CORPORATION (JP) 2004-08-03 US disclosed
US-20040147640-A1 Halogen-free resin composition CHANG CHUN PLASTICS CO., LTD. (TW) 2004-07-29 US disclosed
US-20040146802-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2004-07-29 US disclosed
EP-1440991-A1 CURING AGENT COMPOSITION FOR EPOXY RESINS, EPOXY RESIN COMPOSITION AND USE THEREOF Mitsui Chemicals, Inc. (JP) 2004-07-28 EP disclosed
US-20040143082-A1 Polysiloxane, process for production thereof and radiation-sensitive resin composition JSR CORPORATION (JP) 2004-07-22 US disclosed
CN-1156532-C Epoxy-resin composition and use thereof 三井化学株式会社 2004-07-07 CN disclosed
CN-1155654-C Epoxy-resin composition and use thereof 三井化学株式会社 2004-06-30 CN disclosed
CN-1507580-A Positive type radiation-sensitive composition and method for forming pattern JSR株式会社 2004-06-23 CN disclosed
US-6753124-B2 AMPLIFIED POSITIVE PHOTORESISTS JSR CORPORATION (JP) 2004-06-22 US disclosed
CN-1505651-A Polysiloxane, process for production thereof and radiation-sensitive resin composition JSR��ʽ���� 2004-06-16 CN disclosed
CN-1501166-A Radiation-sensitive resin composition JSR株式会社 2004-06-02 CN disclosed
US-6743563-B2 COMPRISING A RESIN, A PHOTOACID GENERATOR COMPOUND, AND AN ACID; IMPROVED STORAGE STABILITY; PREFERABLY CONTAINS AN ESTER SOLVENT SUCH AS ETHYL LACTATE OR PROPYLENE GLYCOL MONOMETHYL ETHER ACETATE SHIPLEY COMPANY, L.L.C. 2004-06-01 US disclosed
WO-2002069039-A9 PHOTOACID GENERATOR SYSTEMS FOR SHORT WAVELENGTH IMAGING SHIPLEY CO LLC (US) 2004-05-06 WO disclosed
US-20040077821-A1 Flame retarding resin composition CHANG CHUN PLASTICS CO., LTD. (TW) 2004-04-22 US disclosed
EP-1411390-A1 POSITIVE TYPE RADIOSENSITIVE COMPOSITION AND METHOD FOR FORMING PATTERN JSR Corporation (JP) 2004-04-21 EP disclosed
US-20040072094-A1 Radiation sensitive resin composition JSR CORPORATION (JP) 2004-04-15 US disclosed
CN-1489608-A Curing agent composition for epoxy resin, epoxy resin composition and use thereof ������ѧ��ʽ���� 2004-04-14 CN disclosed
EP-0959389-B1 Diazodisulfone compound and radiation-sensitive resin composition JSR CORP (JP) 2004-03-31 EP disclosed
EP-1398339-A1 POLYSILOXANE, PROCESS FOR PRODUCTION THEREOF AND RADIATION-SENSITIVE RESIN COMPOSITION JSR Corporation (JP) 2004-03-17 EP disclosed
US-20040048192-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2004-03-11 US disclosed
US-20040044167-A1 Sealing semiconductor; integrated circuits; phenol compound as curing agents and phosphazenium compound MITSUI CHEMICALS, INC. (JP) 2004-03-04 US disclosed
EP-1142928-B1 Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin compounds JSR CORP (JP) 2004-02-18 EP disclosed
WO-2004005372-A1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM GENERAL ELECTRIC COMPANY (US) 2004-01-15 WO disclosed
US-6664022-B1 Forming relief image on substrate by coating with amplified positive resin and iodinium or sulfonium compound comprising naphthyl, thienyl or pentafluorophenyl substituents; exposure to patterned activating radiation; development SHIPLEY COMPANY, L.L.C. 2003-12-16 US disclosed
US-20030219680-A1 Photoresists useful for microfabrication utilizing deep ultraviolet rays such as an excimer laser, x-rays such as synchrotron radiation, and electron beams JSR CORPORATION (JP) 2003-11-27 US disclosed
US-20030215737-A1 Radiation sensitive composition for forming an insulating film, insulating film and display device JSR CORPORATION (JP) 2003-11-20 US disclosed
US-20030215748-A1 Mixtures of alkaline soluble terpolymers and acid generators used to form films for transfering images to substrates SHIPLEY COMPANY, L.L.C. (US) 2003-11-20 US disclosed
US-6645698-B1 Photoresist compositions comprising a resin binder having acid labile blocking groups requiring an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon SHIPLEY COMPANY, L.L.C. 2003-11-11 US disclosed
US-20030203307-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2003-10-30 US disclosed
US-20030203309-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2003-10-30 US disclosed
US-20030194634-A1 Novel anthracene derivative and radiation-sensitive resin composition JSR CORPORATION (JP) 2003-10-16 US disclosed
US-20030191268-A1 Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin composition IWASAWA HARUO (JP) 2003-10-09 US disclosed
US-6623907-B2 Chemical amplified photoresist JSR CORPORATION (JP) 2003-09-23 US disclosed
US-20030170561-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2003-09-11 US disclosed
EP-1343048-A2 Anthracene derivative and radiation-sensitive resin composition JSR Corporation (JP) 2003-09-10 EP disclosed
CN-1438543-A Ring sulfonium and sulfonium oxide and photoacid generator and photoetching glue SHIPRAY CO (US) 2003-08-27 CN disclosed
US-20030157423-A1 Copolymer, polymer mixture, and radiation-sensitive resin composition JSR CORPORATION (JP) 2003-08-21 US disclosed
EP-1331518-A2 Radiation sensitive composition for forming an insulating film, insulating film and display device JSR Corporation (JP) 2003-07-30 EP disclosed
CN-1432873-A Acid generator, sulfonic acid derivative and radiation-sensitive resin composition JSR CORP (JP) 2003-07-30 CN disclosed
US-20030134227-A1 Cyclic sulfonium and sulfoxonium photoacid generators and photoresists comprising same SHIPLEY COMPANY, LLC 2003-07-17 US disclosed
US-20030113660-A1 Sulfonyloxime compound, and radiation sensitive acid generator, positive type radiation sensitive resin composition and negative type radiation sensitive resin composition using same JSR CORPORATION (JP) 2003-06-19 US disclosed
US-20030113658-A1 Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition JSR CORPORATION (JP) 2003-06-19 US disclosed
EP-1312982-A1 RADIATION-SENSITIVE COMPOSITION, INSULATING FILM AND ORGANIC EL DISPLAY ELEMENT JSR Corporation (JP) 2003-05-21 EP disclosed
US-20030073040-A1 Pattern forming method and bilayer film JSR CORPORATION (JP) 2003-04-17 US disclosed
EP-0898201-B1 Radiation sensitive resin composition JSR CORP (JP) 2003-04-09 EP disclosed
CN-1407406-A Photoetching adhesive composition HIPREY CORP (US) 2003-04-02 CN disclosed
US-20030054284-A1 Radiation-sensitive composition, insulating film and organic el display element JSR CORPORATION (JP) 2003-03-20 US disclosed
US-6531260-B2 Photoresist JSR CORPORATION (JP) 2003-03-11 US disclosed
US-20030044716-A1 Photoresist compositions SHIPLEY COMPANY, L.L.C. 2003-03-06 US disclosed
US-20030036015-A1 Resist with reduced line edge roughness AIR FORCE, UNITED STATES 2003-02-20 US disclosed
EP-1284443-A1 Photoresist compositions Shipley Co. L.L.C. (US) 2003-02-19 EP disclosed
US-6517992-B1 N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same JSR CORPORATION (JP) 2003-02-11 US disclosed
US-20030027061-A1 Photoacid generators and photoresists comprising same SHIPLEY COMPANY, L.L.C. 2003-02-06 US disclosed
US-20030022095-A1 Negative type radiation sensitive resin composition JSR CORPORATION (JP) 2003-01-30 US disclosed
US-20030013049-A1 Photoacid generator systems for short wavelength imaging SHIPLEY COMPANY, L.L.C. 2003-01-16 US disclosed
CN-1391591-A Copolycarbonate preparation by solid state polymerization GEN ELECTRIC (US) 2003-01-15 CN disclosed
US-6506537-B2 Photopolymerization JSR CORPORATION (JP) 2003-01-14 US disclosed
EP-1270553-A2 Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition JSR Corporation (JP) 2003-01-02 EP disclosed
US-20020192593-A1 Used as chemically amplified resist, exhibits high sensitivity, resolution, radiation transmittance, and surface smoothness, and is free from the problem of partial insolublization during overexposure JSR CORPORATION (JP) 2002-12-19 US disclosed
US-20020172885-A1 Novel carbazole derivative and chemically amplified radiation-sensitive resin composition JSR CORPORATION (JP) 2002-11-21 US disclosed
US-6482568-B1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-11-19 US disclosed
US-6482567-B1 Oxime sulfonate and N-oxyimidosulfonate photoacid generators and photoresists comprising same SHIPLEY COMPANY, L.L.C. 2002-11-19 US disclosed
WO-2002091084-A2 RESIST WITH REDUCED LINE EDGE ROUGHNESS MASSACHUSETTS INSTITUTE OF TECHNOLOGY (US) 2002-11-14 WO disclosed
US-20020161164-A1 WEATHERABLE POLYCARBONATES COMPRISING OXANILIDE STRUCTURAL UNITS, METHOD, AND ARTICLES MADE THEREFROM GENERAL ELECTRIC COMPANY 2002-10-31 US disclosed
EP-1253470-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2002-10-30 EP disclosed
US-6465150-B1 COMPRISING AN AROMATIC SULFONIC ACID ONIUM SALT COMPOUND ACID GENERATOR, FOR EXAMPLE, 2,4-DIFLUOROBENZENESULFONIC ACID ANION AND AN ONIUM CATION OF SULFUR OR IODONIUM, AND A COPOLYMER REPRESENTED BY 4-HYDROXYSTYRENE/4-T-BUTOXYSTYRENE COPOLYMER JSR CORPORATION (JP) 2002-10-15 US disclosed
US-6462168-B1 POLYCARBONATE COMPOSITIONS OF ULTRAVIOLET ABSORBING COMPOUNDS TO PREVENT PHOTOYELLOWING GENERAL ELECTRIC COMPANY 2002-10-08 US disclosed
US-6458506-B2 GENERATING ANTHRACENE ACID UPON EXPOSURE TO ACTIVATING RADIATION SHIPLEY COMPANY, LLC 2002-10-01 US disclosed
US-20020132181-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-09-19 US disclosed
EP-1238972-A1 Novel carbazole derivative and chemically amplified radiation-sensitive resin composition JSR Corporation (JP) 2002-09-11 EP disclosed
EP-1231205-A1 VINYLPHENYLPROPIONIC ACID DERIVATIVES, PROCESSES FOR PRODUCTION OF THE DERIVATIVES, POLYMERS THEREOF AND RADIOSENSITIVE RESIN COMPOSITIONS JSR Corporation (JP) 2002-08-14 EP disclosed
EP-1225480-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2002-07-24 EP disclosed
US-20020090569-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-07-11 US disclosed
EP-1212369-A1 COPOLYCARBONATE PREPARATION BY SOLID STATE POLYMERIZATION GENERAL ELECTRIC COMPANY (US) 2002-06-12 EP disclosed
US-6403288-B1 COATING WITH COPOLYMER COMPRISING HYDROXYSTYRENE DERIVATIVE MONOMER HAVING ACID DISSOCIABLE GROUP; EXPOSURE TO RADIATION; DEVELOPMENT JSR CORPORATION (JP) 2002-06-11 US disclosed
US-6403280-B1 TERPOLYMER COMPRISING MALEIC ANHYDRIDE, NORBORNENE ESTER DERIVATIVE, AND ALICYCLIC (METH)ACRYLATE MONOMERS; DURABILITY TO DRY ETCHING; TRANSPARENCY, STORAGE STABILITY JSR CORPORATION (JP) 2002-06-11 US disclosed
WO-2002042845-A2 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY COMPANY, L.L.C. (US) 2002-05-30 WO disclosed
US-20020058201-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-05-16 US disclosed
US-20020051932-A1 Photoresists for imaging with high energy radiation SHIPLEY COMPANY, L.L.C. 2002-05-02 US disclosed
EP-1193558-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2002-04-03 EP disclosed
EP-0691575-B1 Positive photosensitive composition FUJI PHOTO FILM CO LTD (JP) 2002-03-20 EP disclosed
WO-2002019033-A2 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY COMPANY, L.L.C. (US) 2002-03-07 WO disclosed
WO-2002017019-A2 OXIME SULFONATE AND N-OXYIMIDOSULFONATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY COMPANY, L.L.C. (US) 2002-02-28 WO disclosed
US-20020012872-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-01-31 US disclosed
US-20020009668-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-01-24 US disclosed
US-20020009667-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2002-01-24 US disclosed
US-20020009663-A1 Photoacid generators and photoresists comprising same SHIPLEY COMPANY, L.L.C. 2002-01-24 US disclosed
CN-1332205-A Radiation-sensitive resin composition JSR CORP (JP) 2002-01-23 CN disclosed
US-6337171-B1 AS A RESIST APPLICABLE TO FAR ULTRAVIOLET RAYS SUCH AS A KRF EXCIMER LASER, CHARGED PARTICLE RAYS SUCH AS ELECTRON BEAMS, AND X-RAYS JSR CORPORATION (JP) 2002-01-08 US disclosed
US-20020001770-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY COMPANY, L.L.C. 2002-01-03 US disclosed
US-6333394-B1 BIREFRINGENCE-REDUCING OR ?SOFT BLOCK? UNITS; MELT POLYMERIZATION OR EQUILIBRATION, OF A PRECURSOR POLYCARBONATE AND A MONOMER, OLIGOMER, OR HIGH MOLECULAR WEIGHT POLYCARBONATE WHICH IS A SOURCE OF OTHER STRUCTURAL UNITS; GENERAL ELECTRIC COMPANY 2001-12-25 US disclosed
EP-1164433-A1 Radiation-sensitive resin composition JSR Corporation (JP) 2001-12-19 EP disclosed
EP-1164434-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2001-12-19 EP disclosed
EP-1162506-A1 Radiation-sensitive resin composition JSR Corporation (JP) 2001-12-12 EP disclosed
US-20010041769-A1 Polysiloxane, method of manufacturing same, silicon-containingalicyclic compouns, and radiation-sensitive resin composition JSR CORPORATION (JP) 2001-11-15 US disclosed
US-6310147-B1 EPOXY RESIN AND BIFUNCTIONAL ESTER AS CURING AGENT AND PROMOTERS OF AMINO PHOSPHORUS OXIDE MITSUI CHEMICALS, INC. (JP) 2001-10-30 US disclosed
EP-1142928-A1 Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin compounds JSR Corporation (JP) 2001-10-10 EP disclosed
EP-1140827-A1 SYNTHESIS OF PHENOLIC MONOMERS CONTAINING IMIDE OR DIIMIDE MOIETIES AND HIGH HEAT CARBONATE POLYMERS PREPARED THEREFROM GENERAL ELECTRIC COMPANY (US) 2001-10-10 EP disclosed
US-6297332-B1 FOR SEALING A SEMICONDUCTOR INTEGRATED CIRCUIT, AMINOPHOSPHINE OXIDE AS IMPROVED ACCELERATING AGENT, PACKAGE BETTER IN CRACK RESISTANCE MITSUI CHEMICALS, INC. (JP) 2001-10-02 US disclosed
US-20010023050-A1 Radiation-sensitive resin composition JSR CORPORATION (JP) 2001-09-20 US disclosed
WO-2001063363-A2 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY COMPANY, L.L.C. (US) 2001-08-30 WO disclosed
EP-1122605-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2001-08-08 EP disclosed
US-6235446-B1 MIXTURE OF P-HYDROXYSTYRENE, ACRYLATED ESTER JSR CORPORATION (JP) 2001-05-22 US disclosed
EP-1099691-A1 N-Sulfonyloxyimide compound and radiation-sensitive resin composition using the same JSR Corporation (JP) 2001-05-16 EP disclosed
US-RE37179-E1 ADDITION POLYMER JSR CORPORATION (JP) 2001-05-15 US disclosed
EP-1085379-A1 Radiation-sensitive resin composition JSR Corporation (JP) 2001-03-21 EP disclosed
JP-2001064247-A AROMATIC DIAMINO COMPOUND MITSUI CHEMICALS INC 2001-03-13 JP disclosed
WO-2001014453-A1 COPOLYCARBONATE PREPARATION BY SOLID STATE POLYMERIZATION GENERAL ELECTRIC COMPANY (US) 2001-03-01 WO disclosed
US-6183934-B1 FOE USE IN FORMATION OF PATTERN OF INSULATION FILM, PASSIVATION FILM, .ALPHA.-RAY SHIELDING FILM, OPTICAL WAVEGUIDE KABUSHIKI KAISHA TOSHIBA (JP) 2001-02-06 US disclosed
US-6180316-B1 SUITABLE FOR USE AS CHEMICALLY AMPLIFIED RESIST USED IN MANUFACTURING OF INTEGRATED CIRCUITS JSR CORPORATION (JP) 2001-01-30 US disclosed
EP-0793144-B1 Radiation sensitive composition JAPAN SYNTHETIC RUBBER CO LTD (JP) 2001-01-17 EP disclosed
US-6159654-A Negative photosensitive polymer composition of a thermosetting polymer precursor curable by cyclodehydration upon heating KABUSHIKI KAISHA TOSHIBA (JP) 2000-12-12 US disclosed
US-6143460-A PHOTOACID GENERATOR PROVIDING IMPROVED PHOTORESIST RESOLUTION JSR CORPORATION (JP) 2000-11-07 US disclosed
EP-1048983-A1 Radiation sensitive resin composition JSR Corporation (JP) 2000-11-02 EP disclosed
US-6136500-A CONTAINS A PHOTOACID GENERATOR COMPRISING A COMBINATION OF A COMPOUND THAT GENERATES A CARBOXYLIC ACID UPON EXPOSURE TO RADIATION AND ANOTHER COMPOUND THAT GENERATES ANOTHER ACID UPON EXPOSURE TO RADIATION JSR CORPORATION (JP) 2000-10-24 US disclosed
US-6120972-A COPOLYMER OF ACRYLIC ESTER AND CARBONATE WITH PHOTOACID GENERATOR FOR PHOTOSENSITIVE ELEMENTS JSR CORPORATION (JP) 2000-09-19 US disclosed
EP-1035436-A1 Resist pattern formation method JSR Corporation (JP) 2000-09-13 EP disclosed
US-6096853-A Synthesis of phenolic monomers containing imide or diimide moieties and high heat carbonate polymers prepared therefrom GENERAL ELECTRIC COMPANY (US) 2000-08-01 US disclosed
WO-2000037442-A1 SYNTHESIS OF PHENOLIC MONOMERS CONTAINING IMIDE OR DIIMIDE MOIETIES AND HIGH HEAT CARBONATE POLYMERS PREPARED THEREFROM GENERAL ELECTRIC COMPANY (US) 2000-06-29 WO disclosed
EP-1011029-A2 Radiation-sensitive resin composition JSR Corporation (JP) 2000-06-21 EP disclosed
WO-2000010056-A9 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY CO LLC (US) 2000-06-08 WO disclosed
EP-0726500-B1 Chemically amplified, radiation-sensitive resin composition JAPAN SYNTHETIC RUBBER CO LTD (JP) 2000-05-31 EP disclosed
US-6048672-A RELIEF IMAGES ON SUBSTRATES WITH TITANIUM NITRIDE SURFACES, HEATING, COATING, EXPOSURE AND DEVELOPMENT SHIPLEY COMPANY, L.L.C. (US) 2000-04-11 US disclosed
US-6037107-A EXPOSING TO ACTIVATION RADIATION A POSITIVE WORKING PHOTORESIST COMPRISING AN ALKALI SOLUBLE RESIN SUBSTITUTED WITH AN ACID LABILE BLOCKING GROUP TO GENERATE HALOGENATED SULFONIC ACID BY PHOTOLYSIS SHIPLEY COMPANY, L.L.C. (US) 2000-03-14 US disclosed
WO-2000010056-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME SHIPLEY COMPANY, L.L.C. (US) 2000-02-24 WO disclosed
CN-1239116-A Epoxy-resin composition and use thereof MITSUI CHEMICALS INC (US) 1999-12-22 CN disclosed
US-6001517-A A THERMOSETTING POLYMER WHICH CAN BE CURED THROUGH CYCLODEHYDRATION UPON HEATING AND A CURE ACCELERATOR WHICH CAN BE DEACTIVATED OF ITS CURE ACCELERATION PROPERTY BY IRRIDIATION OF LIGHT KABUSHIKI KAISHA TOSHIBA (JP) 1999-12-14 US disclosed
CN-1236788-A Epoxy-resin composition and use thereof MITSUI CHEMICALS INC (JP) 1999-12-01 CN disclosed
EP-0959088-A2 An epoxy-resin composition and use thereof Mitsui Chemicals, Inc. (JP) 1999-11-24 EP disclosed
EP-0959389-A1 Diazodisulfone compound and radiation-sensitive resin composition JSR Corporation (JP) 1999-11-24 EP disclosed
EP-0953588-A2 An epoxy-resin composition and use thereof Mitsui Chemicals, Inc. (JP) 1999-11-03 EP disclosed
US-5962180-A COMPRISING (A) A COPOLYMER COMPRISING RECURRING UNITS OF A P-HYDROXYSTYRENE UNIT AND A STYRENE UNIT HAVING AN ACETAL GROUP OR A KETAL GROUP AT THE P-POSITION, (B) A COPOLYMER COMPRISING RECURRING UNITS OF A T-BUTYL (METH)ACRYLATE UNIT JSR CORPORATION (JP) 1999-10-05 US disclosed
EP-0938029-A2 Methods using photoresist compositions and articles produced therewith Shipley Company LLC (US) 1999-08-25 EP disclosed
EP-0930541-A1 Radiation sensitive resin composition JSR Corporation (JP) 1999-07-21 EP disclosed
EP-0659802-B1 Polyimide MITSUI CHEMICALS INC (JP) 1999-03-17 EP disclosed
EP-0901043-A1 Radiation-sensitive resin composition JSR Corporation (JP) 1999-03-10 EP disclosed
EP-0898201-A1 Radiation sensitive resin composition JSR Corporation (JP) 1999-02-24 EP disclosed
US-5847196-A Oxanilide U-V absorbers GENERAL ELECTRIC COMPANY (US) 1998-12-08 US disclosed
US-5824451-A CONTAINING RESIN INSOLUBLE IN WATER BUT SOLUBLE IN ALKALI SOLUTION, COMPOUND GENERATING ACID WHEN IRRADIATED, LOW MOLECULAR WEIGHT ACID-DECOMPOSABLE DISSOLUTION INHIBITOR;LITHOGRAPHIC PLATE, INTEGRATED CIRCITS FUJI PHOTO FILM CO., LTD. (JP) 1998-10-20 US disclosed
CN-1188103-A Oxanilide U-V absorbers GEN ELECTRIC (US) 1998-07-22 CN disclosed
EP-0853080-A1 Oxanilide U-V absorbers GENERAL ELECTRIC COMPANY (US) 1998-07-15 EP disclosed
US-5753407-A Polyamic acid composition KABUSHIKI KAISHA TOSHIBA (JP) 1998-05-19 US disclosed
US-5731125-A FOR FORMING RESIST FILM JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1998-03-24 US disclosed
US-5698732-A Oxanilide U-V absorbers GENERAL ELECTRIC COMPANY (US) 1997-12-16 US disclosed
US-5693452-A FOR USE IN PRODUCTION OF SEMICONDUCTORS FUJI PHOTO FILM CO., LTD. (JP) 1997-12-02 US disclosed
EP-0478321-B1 Photosenstive resin composition for forming polyimide film pattern and method of forming polyimide film pattern TOSHIBA KK (JP) 1997-11-12 EP disclosed
US-5679495-A TERPOLYMER PHOTORESIST CONTAINING VINYLPHENOL DERIVATIVE, TERT-BUTYL (METH)ACRYLATE, AND A UNIT TO REDUCE ALKALINE SOLUBILITY; DRY ETCH RESISTANCE JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1997-10-21 US disclosed
EP-0793144-A2 Radiation sensitive composition JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1997-09-03 EP disclosed
US-5631377-A LONG-CHAIN AROMATIC DIAMINE MONOMER; MELT PROCESSABILITY, HEAT RESISTANCE MITSUI TOATSU CHEMICALS, INC. (JP) 1997-05-20 US disclosed
EP-0660187-B1 Radiation-sensitive resin composition JAPAN SYNTHETIC RUBBER CO LTD (JP) 1997-03-05 EP disclosed
EP-0356172-B1 Epoxy resins containing imido rings, production process thereof, and epoxy resin compositions containing the same MITSUI TOATSU CHEMICALS (JP) 1997-01-15 EP disclosed
US-5585217-A Polyamic acid composition KABUSHIKI KAISHA TOSHIBA (JP) 1996-12-17 US disclosed
US-5580695-A POLYHYDROXYSTYRENE AS ALKALI-SOLUBLE RESIN; TRIPHENYLSULFONIUM TRIFLUOROMETHANESULFONATE AS ACID GENERATING AGENT JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1996-12-03 US disclosed
US-5556734-A RESISTS JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1996-09-17 US disclosed
EP-0726500-A1 Chemically amplified, radiation-sensitive resin composition JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1996-08-14 EP disclosed
US-5518864-A PHOTOSENSITIVE, QUINONE DIAZIDE KABUSHIKI KAISHA TOSHIBA (JP) 1996-05-21 US disclosed
EP-0709736-A1 Positive chemically amplified resist composition and method for producing compounds used therein FUJI PHOTO FILM CO., LTD. (JP) 1996-05-01 EP disclosed
US-5508377-A IMPROVED PROCESSABILITY, HEAT RESISTANCE; ELECTRONICS, STRUCTURAL MATERIALS MITSUI TOATSU CHEMICALS, INC. (JP) 1996-04-16 US disclosed
JP-H0881556-A POLYIMIDE MITSUI TOATSU CHEM INC 1996-03-26 JP disclosed
US-5491201-A HEAT/CHEMICAL RESISTANCE; HIGH MECHANICAL STRENGTH THE DOW CHEMICAL COMPANY (US) 1996-02-13 US disclosed
EP-0691575-A2 Positive photosensitive composition FUJI PHOTO FILM CO., LTD. (JP) 1996-01-10 EP disclosed
EP-0524419-B1 Heat-sensitive recording materials and phenol compounds MITSUI TOATSU CHEMICALS (JP) 1995-09-06 EP disclosed
EP-0431971-B1 Photosensitive composition and resin-encapsulated semiconductor device TOSHIBA KK (JP) 1995-07-19 EP disclosed
EP-0659802-A1 Polyimide MITSUI TOATSU CHEMICALS, Inc. (JP) 1995-06-28 EP disclosed
EP-0660187-A1 Radiation-sensitive resin composition JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1995-06-28 EP disclosed
US-5391806-A A storage stable chromogens as color-developing agent or stabilizers MITSUI TOATSU CHEMICALS, INCORPORATED (JP) 1995-02-21 US disclosed
US-5348835-A Without photoresist KABUSHIKI KAISHA TOSHIBA (JP) 1994-09-20 US disclosed
US-5340684-A Polyimidesiloxane copolymers KABUSHIKI KAISHA TOSHIBA (JP) 1994-08-23 US disclosed
US-5338828-A Mesogenic cyclic imino ether-containing compositions and polymerization products thereof THE DOW CHEMICAL COMPANY (US) 1994-08-16 US disclosed
JP-H06172273-A PRODUCTION OF 2-@(3754/24)4-HYDROXYPHENYL)-2-(4'-AMINOPHENYL)-PROPANE MITSUI TOATSU CHEM INC 1994-06-21 JP disclosed
EP-0359341-B1 1,6-diazaspiro[4,4]nonane-2,7-dione derivatives SHELL INT RESEARCH (NL) 1994-02-16 EP disclosed
US-5281675-A Liquid crystal polymers THE DOW CHEMICAL COMPANY (US) 1994-01-25 US disclosed
US-5270281-A Chromogenic compound MITSUI TOATSU CHEMICALS, INCORPORATED (JP) 1993-12-14 US disclosed
EP-0359500-B1 Resin compositions for sealing semiconductors MITSUI TOATSU CHEMICALS (JP) 1993-12-08 EP disclosed
EP-0558280-A1 Chemically amplified resist JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1993-09-01 EP disclosed
EP-0524419-A1 Heat-sensitive recording materials and phenol compounds MITSUI TOATSU CHEMICALS, Inc. (JP) 1993-01-27 EP disclosed
EP-0523957-A1 Radiation-sensitive composition JAPAN SYNTHETIC RUBBER CO., LTD. (JP) 1993-01-20 EP disclosed
JP-H04328121-A EPOXY RESIN COMPOSITION FOR SEALING SEMICONDUCTOR SUMITOMO BAKELITE CO LTD 1992-11-17 JP disclosed
US-5145937-A Solvent and alkali resistant THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION (US) 1992-09-08 US disclosed
US-5120803-A Modified epoxy resin and silicon polymer MITSUI TOATSU CHEMICALS, INC. (JP) 1992-06-09 US disclosed
EP-0478321-A1 Photosenstive resin composition for forming polyimide film pattern and method of forming polyimide film pattern KABUSHIKI KAISHA TOSHIBA (JP) 1992-04-01 EP disclosed
US-5089560-A Fiber reinforced composites AMOCO CORPORATION (US) 1992-02-18 US disclosed
US-5082880-A Shock and heat resistant MITSUI TOATSU CHEMICALS, INC. (JP) 1992-01-21 US disclosed
US-5079331-A Sealing electronic devices such as semiconductors, polyepoxides, hardeners MITSUI TOATSU CHEMICAL, INC. (JP) 1992-01-07 US disclosed
US-5061780-A Poly(ether-bis-imide-spiro dilactam) polymer SHELL OIL COMPANY (US) 1991-10-29 US disclosed
JP-H03231916-A POLYOL COMPOSITION AND USE THEREOF MITSUI TOATSU CHEM INC 1991-10-15 JP disclosed
US-5053518-A Hydroxy-substituted cyclic-1,6-diaza[4.4]spirodilactams SHELL OIL COMPANY (US) 1991-10-01 US disclosed
EP-0256470-B1 LINEAR POLYURETHANE ELASTOMERS AND PROCESS FOR THEIR PREPARATION BAYER AG (DE) 1991-08-14 EP disclosed
EP-0431971-A2 Photosensitive composition and resin-encapsulated semiconductor device KABUSHIKI KAISHA TOSHIBA (JP) 1991-06-12 EP disclosed
JP-H0341067-A PRODUCTION OF 2-(4-HYDROXYPHENYL)-2-(4'-MALEIMIDEPHENYL) PROPANE MITSUI TOATSU CHEM INC 1991-02-21 JP disclosed
JP-H03724-A HEAT-RESISTANT THERMOSETTING RESIN COMPOSITION MITSUI TOATSU CHEM INC 1991-01-07 JP disclosed
JP-H03725-A HEAT-RESISTANT EPOXY RESIN COMPOSITION MITSUI TOATSU CHEM INC 1991-01-07 JP disclosed
US-4977218-A FILLERS FOR EPOXY RESINS; COMPRESSIVE AND IMPACT STRENGTH AMOCO CORPORATION (US) 1990-12-11 US disclosed
US-4977215-A CONTAINING EPOXY RESIN AMOCO CORPORATION (US) 1990-12-11 US disclosed
EP-0400898-A2 Heat resistant epoxy resin composition MITSUI TOATSU CHEMICALS, Inc. (JP) 1990-12-05 EP disclosed
US-4957994-A Epoxy resins containing imido rings, production process thereof and epoxy resin compositions containing the same MITSUI TOATSU CHEMICALS, INC. (JP) 1990-09-18 US disclosed
EP-0166693-B1 SUBSTITUTED UNSATURATED BICYCLIC IMIDES WITH HYDROXYL GROUPS, AND THEIR POLYMERS CIBA-GEIGY AG (CH) 1990-07-11 EP disclosed
US-4939251-A Novel spirolactones SHELL OIL COMPANY (US) 1990-07-03 US disclosed
JP-H02147621-A EPOXY RESIN HAVING IMIDE RING, PREPARATION THEREOF AND EPOXY RESIN COMPOSITION CONTAINING THE SAME RESIN MITSUI TOATSU CHEM INC 1990-06-06 JP disclosed
EP-0359341-A2 1,6-diazaspiro[4,4]nonane-2,7-dione derivatives SHELL INTERNATIONALE RESEARCHMAATSCHAPPIJ B.V. (NL) 1990-03-21 EP disclosed
EP-0356172-A2 Epoxy resins containing imido rings, production process thereof, and epoxy resin compositions containing the same MITSUI TOATSU CHEMICALS, Inc. (JP) 1990-02-28 EP disclosed
EP-0351025-A2 Fiber reinforced composites toughened with carboxylated rubber particles AMOCO CORPORATION (US) 1990-01-17 EP disclosed
US-4820798-A Cyanate functional maleimide thermosetting composition THE DOW CHEMICAL COMPANY (US) 1989-04-11 US disclosed
US-4820797-A ACETYLENIC COPOLYMERS THE DOW CHEMICAL COMPANY (US) 1989-04-11 US disclosed
US-4791187-A POLYUREAS, POLYESTERURETHANE COPOLYMERS; MELT SPINNING; LIQUID CRYSTAL CHAIN EXTENDERS BAYER AKTEINGESELLSCHAFT (DE) 1988-12-13 US disclosed
EP-0291552-A1 Cyanate functional maleimides THE DOW CHEMICAL COMPANY (US) 1988-11-23 EP disclosed
US-4769440-A FLEXIBILITY THE DOW CHEMICAL COMPANY (US) 1988-09-06 US disclosed
US-4731426-A Polymerization product from cyanate functional maleimide THE DOW CHEMICAL COMPANY (US) 1988-03-15 US disclosed
US-4728742-A NON-CONJUGATED POLYENES CIBA-GEIGY CORPORATION (US) 1988-03-01 US disclosed
EP-0256470-A2 Linear polyurethane elastomers and process for their preparation BAYER AG (DE) 1988-02-24 EP disclosed
US-4683276-A CASTING, LAMINATION, COATING THE DOW CHEMICAL COMPANY (US) 1987-07-28 US disclosed
US-4680378-A Cyanate functional maleimide and polyamine copolymer THE DOW CHEMICAL COMPANY (US) 1987-07-14 US disclosed
JP-S62145063-A NOVEL DIPHENOL HAVING IMIDE RING AND PRODUCTION THEREOF MITSUI TOATSU CHEM INC 1987-06-29 JP disclosed
US-4654401-A SOLVENT RESISTANCE, HIGH IMPACT STRENGTH MOLDING MATERIAL GENERAL ELECTRIC COMPANY (US) 1987-03-31 US disclosed
JP-S6210051-A NOVEL ETHERDIAMINE AND PRODUCTION THEREOF MITSUI TOATSU CHEM INC 1987-01-19 JP disclosed
US-4632962-A USING IN MAKING MODIFIED POLYESTERS, POLYCARBONATES GENERAL ELECTRIC COMPANY (US) 1986-12-30 US disclosed
EP-0166693-A2 Substituted unsaturated bicyclic imides with hydroxyl groups, and their polymers CIBA-GEIGY AG (CH) 1986-01-02 EP disclosed
EP-0051687-B1 MALEIMIDES AND PROCESS FOR THE PREPARATION OF SAME MITSUI TOATSU CHEMICALS, Inc. (JP) 1984-05-16 EP disclosed
JP-S58177945-A NOVEL AROMATIC DIAMINE AND ITS PREPARATION MITSUI TOATSU CHEM INC 1983-10-18 JP disclosed
US-4400521-A RESINS, VARNICHES, CURING AGENTS, LAMINATION, ADHESIVES, HEAT RESISTANCE MITSUI TOATSU CHEMICALS, INCORPORATED (JP) 1983-08-23 US disclosed
US-4374272-A Process for preparing 2-(4'-hydroxyaryl)-2-(4'-aminoaryl)-propanes MITSUI TOATSU CHEMICALS, INC. (JP) 1983-02-15 US disclosed
US-4351957-A Process for preparing diaminodiphenyl-alkanes THE UPJOHN COMPANY (US) 1982-09-28 US disclosed
EP-0051687-A1 Maleimides and process for the preparation of same MITSUI TOATSU CHEMICALS, Inc. (JP) 1982-05-19 EP disclosed
JP-S5745092-A RECORDING MATERIAL MITSUI TOATSU CHEM INC 1982-03-13 JP disclosed
US-4177211-A Process for the preparation of bis(aminophenyl)alkanes THE UPJOHN COMPANY (US) 1979-12-04 US disclosed
US-4094861-A Process for the production of non-inflammable polytriazines BAYER AKTIENGESELLSCHAFT (DT) 1978-06-13 US disclosed
US-4082768-A NEW IMIDES OF UNSATURATED DICARBOXYLIC ACIDS, PROCESSES FOR THEIR MANUFACTURE, AND THEIR USE CIBA-GEIGY CORPORATION (US) 1978-04-04 US disclosed
US-4059567-A High molecular weight polytriazines of soluble polymeric N-cyano-isourea ethers BAYER AKTIENGESELLSCHAFT (DT) 1977-11-22 US disclosed
US-3960812-A DIELECTRICS, MECHANICAL PROPERTIES CIBA-GEIGY CORPORATION (US) 1976-06-01 US disclosed
US-3960812-A DIELECTRICS, MECHANICAL PROPERTIES CIBA-GEIGY CORPORATION (US) 1976-06-01 US disclosed

Patent text — is the patent's own abstract consistent with the prediction?

For each of this compound's patents that has machine-readable text (50 of them — usually the abstract, not the full specification), we ask MedCPT which protein the text reads most about, and where the chemistry-predicted target lands among 4885 human targets. A high rank means the patent's own wording is consistent with the prediction — a weak, independent signal, not proof of activity.

PatentTitleText reads most aboutPredicted target · text-rank
US-20090318652-A1 NOVEL COMPOUND, POLYMER, AND RESIN COMPOSITION ERCC4, RAD51, RTF1 ESR1 653/4885ESR2 1037/4885CYP3A4 4757/4885
US-20030194634-A1 Novel anthracene derivative and radiation-sensitive resin composition SRSF1, ARL1, ERCC4 ESR1 683/4885ESR2 1051/4885CYP3A4 4324/4885
US-20120148952-A1 RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND RAD1, RER1, RPA1 ESR1 331/4885ESR2 966/4885CYP3A4 2993/4885
US-20140363769-A1 PHOTORESIST COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, ACID GENERATING AGENT, AND PHOTODEGRADABLE BASE FRG1, FGFR1, IGF1R ESR1 1051/4885ESR2 2179/4885CYP3A4 1405/4885
US-20120115084-A1 CROSSLINKING AGENT, NEGATIVE RESIST COMPOSITION, AND PATTERN FORMING METHOD USING THE NEGATIVE RESIST COMPOSITION SEM1, ELL, POLL ESR1 267/4885ESR2 61/4885CYP3A4 3456/4885
US-20120156612-A1 RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A RESIST PATTERN, COMPOUND, AND POLYMER RER1, PRMT1, REV1 ESR1 585/4885ESR2 1219/4885CYP3A4 3855/4885
US-20120276482-A1 RADIATION SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A PATTERN, POLYMER AND COMPOUND RAD51, MRE11, RER1 ESR1 1298/4885ESR2 2096/4885CYP3A4 3771/4885
US-20100024683-A1 PHOSPHATE COMPOUND, METAL SALT THEREOF, DENTAL MATERIAL AND DENTAL COMPOSITION CAD, PPIP5K2, SLC20A1 ESR1 2561/4885ESR2 3805/4885CYP3A4 4831/4885
US-20110287361-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME PPOX, PARN, PNN ESR1 2325/4885ESR2 3890/4885CYP3A4 2091/4885
US-20120251947-A1 CYCLIC COMPOUND, METHOD OF PRODUCING THE SAME, RADIATION SENSITIVE COMPOSITION, AND METHOD OF FORMING RESIST PATTERN MRE11, SLC11A2, CROCC ESR1 3009/4885ESR2 2030/4885CYP3A4 2359/4885
US-11480877-B2 Resist composition, method for forming resist pattern, and polyphenol compound used therein SLC11A2, ABCC1, FBL ESR1 245/4885ESR2 198/4885CYP3A4 1997/4885
US-20100324329-A1 COMPOUND AFF2, AFF1, AFF4 ESR1 395/4885ESR2 326/4885CYP3A4 1052/4885
US-20160370700-A1 PHOTORESIST COMPOSITION, COMPOUND, AND PRODUCTION METHOD THEREOF RARA, H1-0, NR2E3 ESR1 414/4885ESR2 612/4885CYP3A4 2154/4885
US-20090280433-A1 RADIATION-SENSITIVE COMPOSITION AND PROCESS FOR PRODUCING LOW-MOLECULAR COMPOUND FOR USE THEREIN ACP1, PLG, ALG1 ESR1 4663/4885ESR2 2863/4885CYP3A4 4785/4885
US-20190163058-A1 SALTS AND PHOTORESISTS COMPRISING SAME SLC6A6, TST, SLC6A12 ESR1 2042/4885ESR2 2188/4885CYP3A4 4084/4885
US-12547072-B2 Self-aligned build-up processing MYBBP1A, SMURF1, MYB ESR1 1842/4885ESR2 1963/4885CYP3A4 3499/4885
US-10023548-B2 Energy efficient manufacturing process for preparing N,O-triglycidyl aminophenols HPD, PAH, ATIC ESR1 97/4885ESR2 309/4885CYP3A4 28/4885
US-20170285470-A1 CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME GGCT, LCAT, SLC7A11 ESR1 1641/4885ESR2 3739/4885CYP3A4 535/4885
US-11852970-B2 Material for lithography, production method therefor, composition for lithography, pattern formation method, compound, resin, and method for purifying the compound or the resin SLC39A11, CROCC, TERB1 ESR1 3319/4885ESR2 3628/4885CYP3A4 3096/4885
US-10274824-B2 Photobase generators and photoresist compositions comprising same PPOX, CRY1, CCNB1 ESR1 234/4885ESR2 1375/4885CYP3A4 1036/4885
US-10809616-B2 Cholate photoacid generators and photoresists comprising same GGCT, LCAT, SLC7A11 ESR1 1641/4885ESR2 3739/4885CYP3A4 535/4885
US-20090069521-A1 Novel Compound, Polymer, and Radiation-Sensitive Composition MRE11, RAD51, MRPS22 ESR1 219/4885ESR2 298/4885CYP3A4 4493/4885
US-10303055-B2 Resist composition and method for forming resist pattern HEATR1, ABCC1, HEATR6 ESR1 1708/4885ESR2 2376/4885CYP3A4 1660/4885
US-20140248561-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM ADH1C, ADH1A, FABP6 ESR1 1296/4885ESR2 512/4885CYP3A4 2091/4885
US-11880134-B2 Salts and photoresists comprising same SLC6A6, TST, XPOT ESR1 2024/4885ESR2 2151/4885CYP3A4 4086/4885
US-20160347709-A1 ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME HAO2, PHGDH, PAH ESR1 831/4885ESR2 2109/4885CYP3A4 1640/4885
US-20180052390-A1 ONIUM COMPOUNDS AND METHODS OF SYNTHESIS THEREOF NISCH, TST, SCLY ESR1 2222/4885ESR2 2343/4885CYP3A4 2272/4885
US-20190085173-A1 ANTIREFLECTIVE COMPOSITIONS WITH THERMAL ACID GENERATORS ASIC1, ASIC3, ASF1A ESR1 3559/4885ESR2 3818/4885CYP3A4 4466/4885
US-20170059991-A1 COATING COMPOSITION FOR USE WITH AN OVERCOATED PHOTORESIST COL14A1, COPE, COL2A1 ESR1 762/4885ESR2 932/4885CYP3A4 1651/4885
US-11256170-B2 Compound, resist composition, and method for forming resist pattern using it RDX, SLC11A2, FBL ESR1 767/4885ESR2 1078/4885CYP3A4 2133/4885
US-20200409261-A1 COMPOUND, RESIN, RESIST COMPOSITION OR RADIATION-SENSITIVE COMPOSITION, RESIST PATTERN FORMATION METHOD, METHOD FOR PRODUCING AMORPHOUS FILM, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, COMPOSITION FOR UNDERLAYER FILM FORMATION FOR LITHOGRAPHY, METHOD FOR FORMING CIRCUIT PATTERN, AND PURIFICATION METHOD C9, C1R, RAD51 ESR1 404/4885ESR2 596/4885CYP3A4 1964/4885
US-20160124304-A1 PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME GSS, PAG1, PPOX ESR1 2094/4885ESR2 3563/4885CYP3A4 1457/4885
US-20110117489-A1 COMPOUND AND RADIATION-SENSITIVE COMPOSITION ERCC2, RAD51, ATM ESR1 790/4885ESR2 124/4885CYP3A4 2125/4885
US-20140295347-A1 ACID GENERATORS AND PHOTORESISTS COMPRISING SAME PPOX, HAO2, DUOX1 ESR1 1055/4885ESR2 2412/4885CYP3A4 1254/4885
US-10429737-B2 Antireflective compositions with thermal acid generators ASIC1, ASIC3, ASF1A ESR1 3559/4885ESR2 3818/4885CYP3A4 4466/4885
US-20180246405-A1 MATERIAL FOR LITHOGRAPHY, PRODUCTION METHOD THEREFOR, COMPOSITION FOR LITHOGRAPHY, PATTERN FORMATION METHOD, COMPOUND, RESIN, AND METHOD FOR PURIFYING THE COMPOUND OR THE RESIN CROCC, TERB1, LRRC47 ESR1 3167/4885ESR2 3390/4885CYP3A4 3279/4885
US-20020172885-A1 Novel carbazole derivative and chemically amplified radiation-sensitive resin composition ARID2, RAD1, RAD51 ESR1 1337/4885ESR2 1305/4885CYP3A4 2085/4885
US-20150212414-A1 IONIC THERMAL ACID GENERATORS FOR LOW TEMPERATURE APPLICATIONS TRIM4, TRMT1, TRIM59 ESR1 2842/4885ESR2 3781/4885CYP3A4 3308/4885
US-20100221659-A1 COMPOUND, SALT, AND RADIATION-SENSITIVE RESIN COMPOSITION AFF1, RER1, AFF4 ESR1 359/4885ESR2 843/4885CYP3A4 3605/4885
US-20160176840-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM ADH1C, ADH1A, FABP6 ESR1 642/4885ESR2 311/4885CYP3A4 887/4885
US-20110250537-A1 CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME GGCT, LCAT, SLC7A11 ESR1 1641/4885ESR2 3739/4885CYP3A4 535/4885
US-11448960-B2 Salts and photoresists comprising same SLC6A6, TST, SLC6A12 ESR1 2089/4885ESR2 2315/4885CYP3A4 3889/4885
US-20130122423-A1 COMPOUND, RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD DDB1, DNAJB11, RAD51 ESR1 452/4885ESR2 517/4885CYP3A4 912/4885
US-11572430-B2 Compound, resin, resist composition or radiation-sensitive composition, resist pattern formation method, method for producing amorphous film, underlayer film forming material for lithography, composition for underlayer film formation for lithography, method for forming circuit pattern, and purification method C9, C5, C1R ESR1 446/4885ESR2 699/4885CYP3A4 1754/4885
US-20120171379-A1 RADIATION-SENSITIVE COMPOSITION PARG, RAD51, SRMS ESR1 86/4885ESR2 279/4885CYP3A4 2580/4885
US-20130011783-A1 MONOMERS, POLYMERS, PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PHOTOLITHOGRAPHIC PATTERNS PARG, MMAB, MAT1A ESR1 1071/4885ESR2 3157/4885CYP3A4 3024/4885
US-20190056657-A1 COMPOUND, RESIN, RESIST COMPOSITION OR RADIATION-SENSITIVE COMPOSITION, RESIST PATTERN FORMATION METHOD, METHOD FOR PRODUCING AMORPHOUS FILM, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, COMPOSITION FOR UNDERLAYER FILM FORMATION FOR LITHOGRAPHY, METHOD FOR FORMING CIRCUIT PATTERN, AND PURIFICATION METHOD C9, C5, C1R ESR1 446/4885ESR2 699/4885CYP3A4 1754/4885
US-20020009663-A1 Photoacid generators and photoresists comprising same GSS, TST, SQOR ESR1 2831/4885ESR2 3528/4885CYP3A4 1732/4885
US-20180074406-A1 COMPOUND, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN USING IT RDX, SLC11A2, FBL ESR1 767/4885ESR2 1078/4885CYP3A4 2133/4885
US-20170183279-A1 RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYPHENOLIC COMPOUND FOR USE IN THE COMPOSITION, AND ALCOHOLIC COMPOUND THAT CAN BE DERIVED THEREFROM ADH1C, FABP6, ADH1A ESR1 1092/4885ESR2 527/4885CYP3A4 1117/4885

“Text reads most about” is the patent abstract's nearest protein in MedCPT space (background-debiased). Only ~1.4% of patents have machine-readable text, so most compounds won't have this panel.